Journal ArticleDOI
A review of the analysis of surfaces and thin films by AES and XPS
TLDR
In this paper, the physical bases of Auger electron spectroscopy and X-ray photoelectron spectroscopic analysis are briefly presented in order that their practical applicability and limitations may be understood.About:
This article is published in Vacuum.The article was published on 1984-03-01. It has received 75 citations till now. The article focuses on the topics: Auger electron spectroscopy.read more
Citations
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Journal ArticleDOI
Adsorbed layer and thin film growth modes monitored by Auger electron spectroscopy
C. Argile,G.E. Rhead +1 more
TL;DR: In this paper, the authors present a review of the use of the Auger electron spectroscopy (AS-t plots) for the analysis of adsorbed quantities in the range from submonolayers to several monolayers.
Journal ArticleDOI
Angle-resolved XPS and AES: depth-resolution limits and a general comparison of properties of depth-profile reconstruction methods
TL;DR: In this article, it was shown that the depth resolution in ARXPS is limited by signal-to-noise ratio, not the number of emission angles for which data is acquired, and that depth resolution can be improved by up to a factor of about 2 by confining the interval over which the CDP is reconstructed.
Journal ArticleDOI
AES and XPS study of thin RF-sputtered Ta2O5 layers
TL;DR: In this article, the influence of gas composition (O2 content in the gas mixture 0.1%-50%) and substrate temperature (300 or 493 K) during the film deposition has been studied.
Journal ArticleDOI
A step-by-step guide to perform x-ray photoelectron spectroscopy
Grzegorz Greczynski,Lars Hultman +1 more
TL;DR: In this paper , the authors present a comprehensive tutorial written in the form of a step-by-step guide starting from experimental planning, through sample selection and handling, instrument setup, data acquisition, spectra analysis, and results presentation.
Journal ArticleDOI
Practical surface analysis: state of the art and recent developments in AES, XPS, ISS and SIMS
TL;DR: A review of surface analysis techniques can be found in this paper, where the authors compare AES, XPS, ISS and SIMS in a comparative manner, confronting fundamental principles and present instrumental performance with the requests of the scientist.
References
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Journal ArticleDOI
High-Resolution X-Ray Photoemission Spectrum of the Valence Bands of Gold
TL;DR: In this paper, high-resolution gold-valence-band photoemission spectra were obtained by the use of monochromatized k-ensuremath-alpha (kα) radiation and a single-crystal specimen.
Journal ArticleDOI
Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids
Martin P. Seah,W. A. Dench +1 more
TL;DR: In this paper, a compilation of all published measurements of electron inelastic mean free path lengths in solids for energies in the range 0-10 000 eV above the Fermi level is presented.
Journal ArticleDOI
Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
TL;DR: In this article, an integrodifferential equation for the sputtering yield is developed from the general Boltzmann transport equation, and solutions of the integral equation are given that are asymptotically exact in the limit of high ion energy as compared to atomic binding energies.
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Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids
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