Journal ArticleDOI
Characterization of diamond-like nanocomposite thin films grown by plasma enhanced chemical vapor deposition
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TLDR
In this article, a-C:H and a-Si:O networks of diamond-like nanocomposite (DLN) thin films were analyzed by atomic force microscopy.Abstract:
Diamond-like nanocomposite (DLN) thin films, comprising the networks of a-C:H and a-Si:O were deposited on pyrex glass or silicon substrate using gas precursors (e.g., hexamethyldisilane, hexamethyldisiloxane, hexamethyldisilazane, or their different combinations) mixed with argon gas, by plasma enhanced chemical vapor deposition technique. Surface morphology of DLN films was analyzed by atomic force microscopy. High-resolution transmission electron microscopic result shows that the films contain nanoparticles within the amorphous structure. Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy, and x-ray photoelectron spectroscopy (XPS) were used to determine the structural change within the DLN films. The hardness and friction coefficient of the films were measured by nanoindentation and scratch test techniques, respectively. FTIR and XPS studies show the presence of CC, CH, SiC, and SiH bonds in the a-C:H and a-Si:O networks. Using Raman spectroscopy, we also found that the hardness of the DLN films varies with the intensity ratio ID/IG. Finally, we observed that the DLN films has a better performance compared to DLC, when it comes to properties like high hardness, high modulus of elasticity, low surface roughness and low friction coefficient. These characteristics are the critical components in microelectromechanical systems (MEMS) and emerging nanoelectromechanical systems (NEMS).read more
Citations
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Fabrication of DLC thin films with improved diamond-like carbon character by the application of external magnetic field
TL;DR: In this paper, the role of magnetic field on the structural, morphological, mechanical properties and deposition rate of diamond-like carbon (DLC) thin films has been studied.
Journal ArticleDOI
Correlations between microstructure and hydrophobicity properties of pulsed laser deposited diamond-like carbon films
TL;DR: In this paper, the structural, hydrophobicity, mechanical, and morphological properties of the diamond-like carbon (DLC) thin films were investigated by Raman spectroscopy, X-ray photoelectron spectrography (XPS), nanoindentation, water contact angle (CA) measurement, atomic force microscopy (AFM), and they were attributed to structural changes during deposition based on the sub-plantation model and stress induced mechanism.
Journal ArticleDOI
Structure, Properties and Applications of Diamond Like Nanocomposite (SiOx Containing DLC) Films: A Review
TL;DR: In this paper, the current situation on SiOx containing diamond like carbon (diamond like nanocomposite) films is reviewed and discussed, and a survey of different potential and industrial applications of diamond-like nanocompositionite films is presented.
Journal ArticleDOI
Operando formation of an ultra-low friction boundary film from synthetic magnesium silicon hydroxide additive
Qiuying Chang,Pavlo Rudenko,Pavlo Rudenko,Dean J. Miller,Jianguo Wen,Diana Berman,Yuepeng Zhang,Bruce W. Arey,Zihua Zhu,Ali Erdemir +9 more
TL;DR: In this paper, the authors reported the operando and self-healing formation of DLC films at sliding contact surfaces by the addition of synthetic magnesium silicon hydroxide (MSH) nanoparticles to base oil.
Journal ArticleDOI
Effect of silicon and oxygen dopants on the stability of hydrogenated amorphous carbon under harsh environmental conditions
Filippo Mangolini,Brandon A. Krick,Tevis D. B. Jacobs,Subarna Khanal,Frank Streller,J. Brandon McClimon,James Hilbert,Somuri V. Prasad,Thomas W. Scharf,James Anthony Ohlhausen,Jennifer R. Lukes,W. Gregory Sawyer,Robert W. Carpick +12 more
TL;DR: In this article, a-C:H:Si:O was mounted on the exterior of the International Space Station (MISSE) via the Materials International Space station (MISCSE) mission 7b.
References
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Journal ArticleDOI
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