Journal ArticleDOI
Characterization of masking layers for deep wet etching of glass in an improved HF/HCl solution
TLDR
In this paper, a solution for improving the quality of the surface generated during deep wet etching of glass using an HF (49%)/HCl (37%) solution in a volumetric ratio 10:1 was presented.Abstract:
The paper presents a solution for improving the quality of the surface generated during deep wet etching of glass using an HF (49%)/HCl (37%) solution in a volumetric ratio 10:1. Pyrex glass (Corning 7740) and soda lime glass were analyzed. In addition, the characterization of the main masking layers, including photoresist, amorphous silicon, polysilicon and Cr/Au for deep wet etching in the optimal solution, is described.read more
Citations
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Journal ArticleDOI
A practical guide for the fabrication of microfluidic devices using glass and silicon
TL;DR: The paper outlines techniques for forming electrical connections between microfluidic devices and external circuits and proposes a framework for the synthesis of a complete glass/silicon device fabrication flow.
Journal ArticleDOI
On the wet etching of Pyrex glass
TL;DR: In this paper, the authors address a commonly raised question regarding wet etching of Pyrex glass: how are the defects on the glass generated during etching process while most of the masking materials are chemically inert in the etching solution?
Journal ArticleDOI
Microchip technology in mass spectrometry.
Tiina Sikanen,Sami Franssila,Tiina J. Kauppila,Risto Kostiainen,Tapio Kotiaho,Raimo A. Ketola +5 more
TL;DR: All common types of mass analyzers have been realized by microfabrication and, in most cases, successfully applied to MS analysis in conjunction with on-chip ionization.
Journal ArticleDOI
Fabrication of a dielectrophoretic chip with 3D silicon electrodes
TL;DR: In this paper, the DEP electrodes form the channel walls of a microfluidic channel wall, which is used as a DEP electrode to concentrate yeast cells and beads at the nominal operating potential of 25 Vp-p.
Journal ArticleDOI
Fish and Chips: a microfluidic perfusion platform for monitoring zebrafish development
Deepak Choudhury,Deepak Choudhury,Danny van Noort,Ciprian Iliescu,Baixue Zheng,Kar-Lai Poon,Svetlana Korzh,Vladimir Korzh,Vladimir Korzh,Hanry Yu +9 more
TL;DR: A multi-channel microfluidic perfusion platform for culturing zebrafish embryos and capturing live images of various tissues and organs inside the embryo showed developmental abnormalities under the influence of the drug valproic acid (VPA).
References
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Book
Fundamentals of microfabrication
TL;DR: The second edition of the Fundamentals of Microfabrication as discussed by the authors provides an in-depth coverage of the science of miniaturization, its methods, and materials, from the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering.
Journal ArticleDOI
Microfabrication Technology for the Production of Capillary Array Electrophoresis Chips
TL;DR: In this article, the authors used an array of sample wells fabricated from an elastomeric sheet to analyze 12 DNA samples in parallel on a micro-fabricated CAE chip and the development of methods for injecting multiple samples onto a single capillary without cross contamination.
Journal ArticleDOI
A new masking technology for deep glass etching and its microfluidic application
TL;DR: In this paper, a new masking technique for glass etching in concentrated hydrofluoric acid (HF) was proposed, which was applied to fabricate microfluidic components for a micro-peristaltic pump to be integrated in a micro polymerase chain reaction (PCR) device.
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Deep wet etching of fused silica glass for hollow capillary optical leaky waveguides in microfluidic devices
TL;DR: In this article, a single-layer photoresist soft mask was developed to achieve channel etch depths up to 33 µm in fused silica glass with a single layer soft etch mask.
Journal ArticleDOI
High quality mechanical etching of brittle materials by powder blasting
TL;DR: In this article, the authors introduce the technique and discuss the mechanism behind the process on the base of theoretical models, and present the versatility of powder blasting as well as well-controllable etching process for a wide range of brittle materials.