Journal ArticleDOI
Determination of fringe order in white-light interference microscopy
Reads0
Chats0
TLDR
The algorithm adapts to surface texture and noise level and dynamically compensates for optical aberrations, distortions, diffraction, and dispersion that would otherwise lead to incorrect fringe order.Abstract:
Combining phase and coherence information for improved precision in white-light interference microscopy requires a robust strategy for dealing with the inconsistencies between these two types of information. We correct for these inconsistencies on every measurement by direct analysis of the difference map between the coherence and the phase profiles. The algorithm adapts to surface texture and noise level and dynamically compensates for optical aberrations, distortions, diffraction, and dispersion that would otherwise lead to incorrect fringe order. The same analysis also provides the absolute height data that are essential to relational measurements between disconnected surfaces.read more
Citations
More filters
Journal ArticleDOI
Quadrature wavelength scanning interferometry.
TL;DR: A novel method to double the measurement range of wavelength scanning interferometery (WSI) and a theoretical analysis of the advantages and of signal errors due to nonideal quadrature are reported.
Journal ArticleDOI
White light diffraction phase microscopy as profilometry tool
TL;DR: In this article, a reflection type white light diffraction phase microscope for full field surface profiling of opaque samples is proposed, which extracts surface profile from one recorded interferogram without any mechanical movement and the use of white light makes it free from speckle noise.
Dissertation
Experimentelle Untersuchung des Optimierungspotenzials in der kurzkohärenten Interferenzmikroskopie
TL;DR: In this paper, the European commission (project NanoCMM, grant no. FP6-026717-2) Deutsche Forschungsgemeinschaft (DFG) project LE 992/6-1
Journal ArticleDOI
Elimination of the direction ambiguity and the dead zone in spectrally resolved interferometry
TL;DR: In this paper, the authors proposed a method to eliminate the direction ambiguity and the dead zone, which limit the measurable range in spectrally resolved interferometry (SRI), by using a dispersive material, which can provide useful information and determine the direction of measuring distances.
Dissertation
Development and calibration of wavelength scanning interferometry for surface topography measurement
TL;DR: In this paper, a traceability for a WSI instrument is established, i.e. a procedure is defined to estimate the measurement uncertainty according to recent development in ISO standards for surface texture measurement.
References
More filters
Book
Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software
Dennis C. Ghiglia,Mark D. Pritt +1 more
TL;DR: Methods for Phase Unwrapping, Phase Data, Quality Maps, Masks, and Filters, and Minimum-Norm Methods.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.
Journal ArticleDOI
Efficient nonlinear algorithm for envelope detection in white light interferometry
TL;DR: The new algorithm is shown to be near optimal in terms of computational efficiency and can be represented as a second-order nonlinear filter and in combination with a carefully designed peak detection method the algorithm exhibits exceptionally good performance on simulated interferograms.
Journal ArticleDOI
Mirau correlation microscope.
TL;DR: A correlation microscope based on the Mirau interferometer configuration using a thin silicon nitride film beam splitter is constructed, which predicts accurately both the transverse resolution at a sharp edge and the range resolution for a perfect plane reflector.
Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
TL;DR: In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.