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Journal ArticleDOI

Profilometry with a coherence scanning microscope.

Byron S. Lee, +1 more
- 10 Sep 1990 - 
- Vol. 29, Iss: 26, pp 3784-3788
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TLDR
This approach has two significant implications for profilometry: the longitudinal resolution is decoupled from the lateral resolution, and interference effects can be used to further enhance the longitudinalresolution.
Abstract: 
Coherence scanning microscopy is a new technique in high resolution imaging. It shares many of the features of confocal microscopy but uses coherence effects to enhance the lateral and longitudinal resolution rather than physical apertures. This approach has two significant implications for profilometry: the longitudinal resolution is decoupled from the lateral resolution, and interference effects can be used to further enhance the longitudinal resolution. We detail the features of coherence scanning profilometry and give some examples.

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Citations
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Journal ArticleDOI

Optical coherence tomography

David Huang, +10 more
- 22 Nov 1991 - 
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI

Optical Coherence Tomography

Eric A. Swanson, +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI

Three-dimensional sensing of rough surfaces by coherence radar

Thomas Dresel, +2 more
- 01 Mar 1992 - 
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.
Journal ArticleDOI

Efficient nonlinear algorithm for envelope detection in white light interferometry

Kieran G. Larkin
- 01 Apr 1996 - 
TL;DR: The new algorithm is shown to be near optimal in terms of computational efficiency and can be represented as a second-order nonlinear filter and in combination with a carefully designed peak detection method the algorithm exhibits exceptionally good performance on simulated interferograms.
Journal ArticleDOI

High-speed noncontact profiler based on scanning white-light interferometry

Leslie L. Deck, +1 more
- 01 Nov 1994 - 
TL;DR: A system for fast three-dimensional profilometry, of both optically smooth and optically rough surfaces, based on scanning white-light techniques, using an efficient algorithm to extract and save only the region of interference, substantially reducing both the acquisition and the analysis times.
References
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Journal ArticleDOI

Testing aspherics using two-wavelength holography.

James C. Wyant
- 01 Sep 1971 - 
TL;DR: It is shown that both single exposure and double exposure two-wavelength holography provide a good method of using visible light to obtain an interferogram identical to what would be obtained if a longer nonvisible wavelength were used.
Journal ArticleDOI

Laser diode feedback interferometer for stabilization and displacement measurements.

Toshihiko Yoshino, +4 more
- 01 Mar 1987 - 
TL;DR: Active laser diode interferometer in which the interference signal is fed back to the diode current are investigated for Twyman-Green and self-coupling interferometers and shows hysteresis and multistable behavior, in accordance with theoretical results.
Journal ArticleDOI

Optical ranging by wavelength multiplexed interferometry

Clayton C. Williams, +1 more
- 15 Sep 1986 - 
TL;DR: In this paper, a new optical technique is described for measurement of absolute distance based upon a wavelength multiplexed heterodyne interferometer with FM demodulation, which can achieve complete elimination of interferometric range ambiguity while maintaining the high range sensitivity and resolution.
Proceedings ArticleDOI

First Results Of A Product Utilizing Coherence Probe Imaging For Wafer Inspection

Mark P. Davidson, +2 more
TL;DR: In this article, a Coherence Probe Imaging (CPI) system was proposed to produce 3D images of higher resolution than an ordinary microscope using a nonlinear transformation implemented electronically to produce three dimensional images.
Journal ArticleDOI

Extended unambiguous range interferometry.

Timothy C. Strand, +1 more
- 01 Oct 1987 - 
TL;DR: A system which uses fringe contrast to help determine the absolute phase in the interference image within the limits of the coherence length of the illumination, which obviates the need for phase unwrapping and is unaffected by surface discontinuities or by data dropout.