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Experimental Investigation of Micro HeatPipes Fabricated in Silicon Wafers
G. P. Peterson
- Vol. 115, pp 751
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TLDR
In this paper, the thermal behavior of arrays of micro heat pipes fabricated in silicon wafers was investigated using an infrared thermal imaging unit, the temperature gradients and maximum localized temperatures were measured and an effective thermal conductivity was computed.Abstract:
An experimental investigation was conducted to determine the thermal behavior of arrays of micro heat pipes fabricated in silicon wafers. Two types of micro heat pipe arrays were evaluated, one that utilized machined rectangular channels and the other that used an anisotropic etching process to produce triangular channels. Once fabricated, a clear pyrex cover plate was bonded to the top surface of each wafer using an ultraviolet bonding technique to form the micro heat pipe array. These micro heat pipe arrays were then evacuated and charged with a predetermined amount of methanol. Using an infrared thermal imaging unit, the temperature gradients and maximum localized temperatures were measured and an effective thermal conductivity was computed. The experimental results were compared with those obtained for a plain silicon waferread more
Citations
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BookDOI
The MEMS Handbook
TL;DR: In this paper, the authors present a detailed overview of the history of the field of flow simulation for MEMS and discuss the current state-of-the-art in this field.
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Advances and challenges in the development of power-generation systems at small scales
David C. Walther,Jeongmin Ahn +1 more
TL;DR: The field of micro-scale combustion and power generation is a new frontier of technological development, and only a few projects have been funded as discussed by the authors, however, significant progress has been made to date.
Journal ArticleDOI
A review of small heat pipes for electronics
TL;DR: A review of small heat pipes, including their design, analysis, and fabrication, is presented in this article, where the authors also discuss the potential of nano-wicks, such as carbon nanotubes (CNTs), to represent the future of heat pipes.
Journal ArticleDOI
The Graetz problem extended to slip-flow
TL;DR: In this paper, the effect of slip-flow on the convection heat transfer coefficient was investigated and a special technique was developed to evaluate the eigenvalues for the problem, where the authors developed simplified relationships to describe the relationship between slip flow and heat transfer coefficients.
References
More filters
BookDOI
The MEMS Handbook
TL;DR: In this paper, the authors present a detailed overview of the history of the field of flow simulation for MEMS and discuss the current state-of-the-art in this field.
Journal ArticleDOI
Advances and challenges in the development of power-generation systems at small scales
David C. Walther,Jeongmin Ahn +1 more
TL;DR: The field of micro-scale combustion and power generation is a new frontier of technological development, and only a few projects have been funded as discussed by the authors, however, significant progress has been made to date.
Journal ArticleDOI
A review of small heat pipes for electronics
TL;DR: A review of small heat pipes, including their design, analysis, and fabrication, is presented in this article, where the authors also discuss the potential of nano-wicks, such as carbon nanotubes (CNTs), to represent the future of heat pipes.
Journal ArticleDOI
The Graetz problem extended to slip-flow
TL;DR: In this paper, the effect of slip-flow on the convection heat transfer coefficient was investigated and a special technique was developed to evaluate the eigenvalues for the problem, where the authors developed simplified relationships to describe the relationship between slip flow and heat transfer coefficients.