Journal ArticleDOI
Fabrication of high aspect ratio structures for microchannel plates
TLDR
In this article, high aspect ratio pores are constructed using reactive ion etching and streaming electron cyclotron resonance etching, and low pressure chemical vapor deposition (LPCVD).Abstract:
Substrates for microchannel plates have been fabricated using Si micromachining techniques. High aspect ratio pores are constructed using reactive ion etching and streaming electron cyclotron resonance etching, and low‐pressure chemical vapor deposition (LPCVD). In one process, 40 μm deep pores with 2 μm openings on 4 μm centers are directly etched in Si. Alternatively, pores with aspect ratios of 30:1 are constructed in a low‐stress SiNx membrane using a sacrificial template process whereby pillars of Si are etched and then subsequently backfilled with a dielectric using LPCVD.read more
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Patent
Control of solid state dimensional features
Jene Andrew Golovchenko,Daniel Branton,Michael J. Aziz,Jiali Li,Derek Stein,Ciaran J. McMullan +5 more
TL;DR: In this paper, a method for controlled fabrication of a structural feature on a solid state structure by exposing the structure to a fabrication process environment the conditions of which are selected to produce a prespecified feature in the structure.
Patent
Pulsed ion beam control of solid state features
TL;DR: In this article, a solid state structure is provided, having a surface and having a structural feature, where the structure is exposed to a first periodic flux of ions having a first exposure duty cycle characterized by a first ion exposure duration and a first nonexposure duration for the first duty cycle, and then at a second periodic flux having a second exposure duty-cycled ion flux, which is greater than the first exposure duration, to cause transport, within the structure including the structure surface, of material of the structure to the structural feature in response to the ion flux exposure to change at least
Patent
Controlled fabrication of gaps in electrically conducting structures
TL;DR: In this article, a method for controlling the gap between electrically conducting electrodes provided on a support structure is proposed, where each electrode has an electrode tip separated from other electrode tips by a gap, and during exposure of the structure to the process environment, a voltage bias is applied across the gap.
Patent
Solid state molecular probe device
Jiali Li,Derek Stein,Gregor M. Schurmann,Gavin M. King,Jene Andrew Golovchenko,Daniel Branton,Michael J. Aziz +6 more
TL;DR: In this paper, the authors describe a solid state nanopore device including two or more materials and a method for fabricating the same, which includes a solid-state insulating membrane having an exposed surface, a conductive material disposed on at least a portion of the exposed surface of the solid state membrane, and a nanopore penetrating an area of the conductive materials and at least part of the surface.
Journal ArticleDOI
MEMS Mass Spectrometers: the Next Wave of Miniaturization
Richard R. A. Syms,Steven Wright +1 more
TL;DR: In this article, a review of mass spectrometers based on microelectro-mechanical systems (MEMS) technology is presented, and applications for miniaturized and portable systems are discussed, and challenges and opportunities are presented.
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