Showing papers in "Journal of Micromechanics and Microengineering in 2016"

State-of-the-art in vibration-based electrostatic energy harvesting

Abstract: Recently, embedded systems and wireless sensor nodes have been gaining importance. For operating these devices several vibration-based energy harvesters have been successfully developed and reported, such as piezoelectric, electromagnetic, and electrostatic energy harvesters (EEHs). This paper presents the state-of-the-art in the field of vibration-based EEHs. Mainly, two types of EEHs, electret-free and electret-based, are reported in the literature. The developed EEHs are mostly of the centimeter scale. These energy harvesters, with resonant frequencies ranging from 2 Hz to 1.7 kHz, when subjected to excitation on the order of 0.25 g to 14.2 g, generate power that ranges from 0.46 nW to 2.1 mW.

Review of polymer MEMS micromachining

Abstract: The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric materials feature a diverse set of properties not present in traditional microfabrication materials. The investigation and development of these materials have opened the door to alternative and potentially more cost effective manufacturing options to produce highly flexible structures and substrates with tailorable bulk and surface properties. As a broad review of the progress of polymers within MEMS, major and recent developments in polymer micromachining are presented here, including deposition, removal, and release techniques for three widely used MEMS polymer materials, namely SU-8, polyimide, and Parylene C. The application of these techniques to create devices having flexible substrates and novel polymer structural elements for biomedical MEMS (bioMEMS) is also reviewed.

3D printing of high-resolution PLA-based structures by hybrid electrohydrodynamic and fused deposition modeling techniques

Abstract: Recently, the three-dimensional (3D) printing technique has received much attention for shape forming and manufacturing. The fused deposition modeling (FDM) printer is one of the various 3D printers available and has become widely used due to its simplicity, low-cost, and easy operation. However, the FDM technique has a limitation whereby its patterning resolution is too low at around 200 μm. In this paper, we first present a hybrid mechanism of electrohydrodynamic jet printing with the FDM technique, which we name E-FDM. We then develop a novel high-resolution 3D printer based on the E-FDM process. To determine the optimal condition for structuring, we also investigated the effect of several printing parameters, such as temperature, applied voltage, working height, printing speed, flow-rate, and acceleration on the patterning results. This method was capable of fabricating both high resolution 2D and 3D structures with the use of polylactic acid (PLA). PLA has been used to fabricate scaffold structures for tissue engineering, which has different hierarchical structure sizes. The fabrication speed was up to 40 mm/s and the pattern resolution could be improved to 10 μm.

Rapid fabrication of a four-layer PMMA-based microfluidic chip using CO2-laser micromachining and thermal bonding

Abstract: A smart design method to transform the original two-layer microfluidic chip into a four-layer 3D microfluidic chip is proposed. A novel fabrication method is established to rapidly and effectively produce a four-layer microfluidic chip device made entirely from polymethylmethacrylate (PMMA). Firstly, the CO2-laser cuts the PMMA sheets by melting and blowing away vaporized material from the parent material to obtain high-quality channels of the microfluidic chip. An orthogonal experimental method is used to study its processing stability. In addition, a simple, rapid thermal bonding technique is successfully applied in fabricating the four-layer microfluidic chip, which has a bond strength of 1.3 MPa. A wooden pole is used to improve the accuracy of the alignment. Finally, a mixing experiment with blue ink and water is carried out, which proves that this smart design method and rapid manufacturing technology are successful.

A novel two-degree-of-freedom MEMS electromagnetic vibration energy harvester

Abstract: In this paper, a vibration-based MEMS electromagnetic energy harvester (EM-EH) device with two-degree-of-freedom (2DOF) configuration has been presented, modeled and characterized. The proposed 2DOF system comprises a primary subsystem for power generation, and an accessory subsystem for frequency tuning. A lumped parametric 2DOF model is built and examined in respect of energy harvesting capabilities. By controlling the mass ratio and frequency ratio, the first two resonances of primary mass can be tuned close to each other while maintaining comparable magnitudes. The 2DOF configuration is expected to be more adaptive and efficient than the conventional 1DOF structure, which could only operate near its sole resonance. The 2DOF EM-EH chip is fabricated on silicon-on-insulator (SOI) wafer through double-sided deep reactive-ion etching (DRIE). Induction coil is only patterned on the primary mass for energy conversion. With current prototype at an acceleration of 0.12 g, two resonances of 326 and 391 Hz with output voltages of 3.6 and 6.5 mV are obtained respectively, providing good validation for the modeling results. This paper offers new insights of implementing a multimodal MEMS EM-EH device.

Rapid fabrication of microfluidic PDMS devices from reusable PDMS molds using laser ablation

Abstract: The conventional fabrication methods for microfluidic devices require cleanroom processes that are costly and time-consuming. We present a novel, facile, and low-cost method for rapid fabrication of polydimethylsiloxane (PDMS) molds and devices. The method consists of three main fabrication steps: female mold (FM), male mold (MM), and chip fabrication. We use a CO2 laser cutter to pattern a thin, spin-coated PDMS layer for FM fabrication. We then obtain reusable PDMS MM from the FM using PDMS/PDMS casting. Finally, a second casting step is used to replicate PDMS devices from the MM. Demolding of one PDMS layer from another is carried out without any potentially hazardous chemical surface treatment. We have successfully demonstrated that this novel method allows fabrication of microfluidic molds and devices with precise dimensions (thickness, width, length) using a single material, PDMS, which is very common across microfluidic laboratories. The whole process, from idea to device testing, can be completed in 1.5 h in a standard laboratory.

A new simple and fast thermally-solvent assisted method to bond PMMA–PMMA in micro-fluidics devices

Abstract: A rapid and simple thermally-solvent assisted method of bonding was introduced for poly(methyl methacrylate) (PMMA) based microfluidic substrates. The technique is a low-temperature (), and rapid () bonding technique; in addition, only a fan-assisted oven with some paper clamps are used. Two different solvents (ethanol and isopropyl alcohol) with two different methods of cooling (one-step and three steps) were employed to determine the best solvent and method of cooling (residual stresses may be released in different cooling methods) by considering bonding strength and quality. In this bonding technique, a thin film of solvent between two PMMA sheets disperses tends to dissolve a thin film of PMMA sheet surface, then evaporate, and finally reconnect monomers of the PMMA sheets at the specific operating temperature. The operating temperature of this method comes from the coincidence of the solubility parameter graph of PMMA with the solubility parameter graph of the solvents. Different tests such as tensile strength test, deformation test, leakage tests, and surface characteristics tests were performed to find the optimum conditions for this bonding strategy. The best bonding quality and the highest bonding strength () occurred when 70% isopropyl alcohol solution was employed with the one-step cooling method. Furthermore, the bonding reversibility was taken into account and critical percentages for irreversible bonding were obtained for both of the solvents and methods. This method provides a perfect bonding quality for PMMA substrates, and can be used in laboratories without needing any expensive and special instruments, because of its merits such as lower bonding time, lower-cost, and higher strength etc in comparison with the majority of other common bonding techniques.

A review on the importance of surface coating of micro/nano-mold in micro/nano-molding processes

Abstract: Micro/nano hot-embossing and injection molding are two promising manufacturing processes for the mass production of workpieces bearing micro/nanoscale features. However, both the workpiece and micro/nano-mold are susceptive to structural damage due to high thermal stress, adhesion and friction, which occur at the interface between the workpiece and the mold during these processes. Hence, major constraints of micro/nano-molds are mainly attributed to improper replication and their inability to withstand a prolonged sliding surface contact because of high sidewall friction and/or high adhesion. Consequently, there is a need for proper surface coating as it can improve the surface properties of micro/nano-molds such as having a low friction coefficient, low adhesion and low wear rate. This review deals with the physical, mechanical and tribological properties of various surface coatings and their impact on the replication efficiency and lifetime of micro/nano-molds that are used in micro/nano hot-embossing and injection molding processes.

A hollow stainless steel microneedle array to deliver insulin to a diabetic rat

Abstract: A novel fabrication process has been described for the development of a hollow stainless steel microneedle array using femto second laser micromachining. Using this method, a complicated microstructure can be fabricated in a single process step without using masks. The mechanical stability of the fabricated microneedle array was measured for axial and transverse loading. Skin histology was carried out to study the microneedle penetration into the rat skin. Fluid flow through the microneedle array was studied for different inlet pressures. The packaging of the microneedle array, to protect the microneedle bore blockage from dust and other atmospheric contaminations, was also considered. Finally, the microneedle array was tested and studied in vivo for insulin delivery to a diabetic rat. The results obtained were compared with the standard subcutaneous delivery with the same dose rate and were found to be in good agreement.

A batch-fabricated electret-biased wideband MEMS vibration energy harvester with frequency-up conversion behavior powering a UHF wireless sensor node

Abstract: This paper reports a batch-fabricated, low-frequency and wideband MEMS electrostatic vibration energy harvester (e-VEH), which implements corona-charged vertical electrets and nonlinear elastic stoppers. A numeric model is used to perform parametric study, where we observe a wideband bi-modality resulting from nonlinearity. The nonlinear stoppers improve the bandwidth and induce a frequency-up feature at low frequencies. When the e-VEH works with a bias of 45 V, the power reaches a maximum value of 6.6 μW at 428 Hz and 2.0 g rms, and is above 1 μW at 50 Hz. When the frequency drops below 60 Hz, a 'frequency-up' conversion behavior is observed with peaks of power at 34 Hz and 52 Hz. The −3 dB bandwidth is more than 60% of its central frequency, both including and excluding the hysteresis introduced by the nonlinear stoppers. We also perform experiments with wideband Gaussian noise. The device is eventually tested with an RF data transmission setup, where a communication node with an internal temperature sensor is powered. Every 2 min, a data transmission at 868 MHz is performed by the sensor node supplied by the e-VEH, and received at a distance of up to 15 m.

Investigation of molten metal droplet deposition and solidification for 3D printing techniques

Abstract: This study investigated the transient transport phenomenon during the pile up of molten lead-free solder via the inkjet printing method. With regard to the droplet impact velocity, the distance from nozzle to substrate can be controlled by using the pulse voltage and distance control apparatus. A high-speed digital camera was used to record the solder impact and examine the accuracy of the pile up. These impact conditions correspond to We = 2.1–15.1 and Oh = 5.4 × 10−3–3.8 × 10−3. The effects of impact velocity and relative distance between two types of molten droplets on the shape of the impact mode are examined. The results show that the optimal parameters of the distance from nozzle to substrate and the spreading factor in this experiment are 0.5 mm and 1.33. The diameter, volume and velocity of the inkjet solder droplet are around 37–65 μm, 25–144 picoliters, and 2.0–3.7 m s−1, respectively. The vertical and inclined column structures of molten lead-free solder can be fabricated using piezoelectric ink-jet printing systems. The end-shapes of the 3D micro structure have been found to be dependent upon the distance from nozzle to substrate and the impact velocity of the molten lead-free solder droplet.

MEMS Mass Spectrometers: the Next Wave of Miniaturization

Abstract: This paper reviews mass spectrometers based on micro-electro-mechanical systems (MEMS) technology. The MEMS approach to integration is first briefly described, and the difficulties of miniaturizing mass spectrometers are outlined. MEMS components for ionization and mass filtering are then reviewed, together with additional components for ion detection, vacuum pressure measurement and pumping. Mass spectrometer systems containing MEMS sub-components are then described, applications for miniaturized and portable systems are discussed, and challenges and opportunities are presented.

Enhanced performance of microfluidic soft pressure sensors with embedded solid microspheres

Abstract: The cross-sectional geometry of an embedded microchannel influences the electromechanical response of a soft microfluidic sensor to applied surface pressure. When a pressure is exerted on the surface of the sensor deforming the soft structure, the cross-sectional area of the embedded channel filled with a conductive fluid decreases, increasing the channel's electrical resistance. This electromechanical coupling can be tuned by adding solid microspheres into the channel. In order to determine the influence of microspheres, we use both analytic and computational methods to predict the pressure responses of soft microfluidic sensors with two different channel cross-sections: a square and an equilateral triangular. The analytical models were derived from contact mechanics in which microspheres were regarded as spherical indenters, and finite element analysis (FEA) was used for simulation. For experimental validation, sensor samples with the two different channel cross-sections were prepared and tested. For comparison, the sensor samples were tested both with and without microspheres. All three results from the analytical models, the FEA simulations, and the experiments showed reasonable agreement confirming that the multi-material soft structure significantly improved its pressure response in terms of both linearity and sensitivity. The embedded solid particles enhanced the performance of soft sensors while maintaining their flexible and stretchable mechanical characteristic. We also provide analytical and experimental analyses of hysteresis of microfluidic soft sensors considering a resistive force to the shape recovery of the polymer structure by the embedded viscous fluid.

Higher order modes excitation of electrostatically actuated clamped–clamped microbeams: experimental and analytical investigation

Abstract: In this study, we demonstrate analytically and experimentally the excitations of the higher order modes of vibrations in electrostatically actuated clamped–clamped microbeam resonators. The concept is based on using partial electrodes with shapes that induce strong excitation of the mode of interest. The devices are fabricated using polyimide as a structural layer coated with nickel from the top and chrome and gold layers from the bottom. Experimentally, frequency sweeps with different electro-dynamical loading conditions are shown to demonstrate the excitation of the higher order modes of vibration. Using a half electrode, the second mode is excited with high amplitude of vibration compared with almost zero response using the full electrode. Also, using a two-third electrode configuration is shown to amplify the third mode resonance amplitude compared with the full electrode under the same electrical loading conditions. An analytical model is developed based on the Euler–Bernollui beam model and the Galerkin method to simulate the device response. Good agreement between the simulation results and the experimental data is reported.

Estimation of line dimensions in 3D direct laser writing lithography

Abstract: Two photon polymerization (TPP) based 3D direct laser writing (3D-DLW) finds application in a wide range of research areas ranging from photonic and mechanical metamaterials to micro-devices. Most common structures are either single lines or formed by a set of interconnected lines as in the case of crystals. In order to increase the fidelity of these structures and reach the ultimate resolution, the laser power and scan speed used in the writing process should be chosen carefully. However, the optimization of these writing parameters is an iterative and time consuming process in the absence of a model for the estimation of line dimensions. To this end, we report a semi-empirical analytic model through simulations and fitting, and demonstrate that it can be used for estimating the line dimensions mostly within one standard deviation of the average values over a wide range of laser power and scan speed combinations. The model delimits the trend in onset of micro-explosions in the photoresist due to over-exposure and of low degree of conversion due to under-exposure. The model guides setting of high-fidelity and robust writing parameters of a photonic crystal structure without iteration and in close agreement with the estimated line dimensions. The proposed methodology is generalizable by adapting the model coefficients to any 3D-DLW setup and corresponding photoresist as a means to estimate the line dimensions for tuning the writing parameters.

Irreversible bonding of polyimide and polydimethylsiloxane (PDMS) based on a thiol-epoxy click reaction

Abstract: Polyimide is one of the most popular substrate materials for the microfabrication of flexible electronics, while polydimethylsiloxane (PDMS) is the most widely used stretchable substrate/encapsulant material. These two polymers are essential in fabricating devices for microfluidics, bioelectronics, and the internet of things; bonding these materials together is a crucial challenge. In this work, we employ click chemistry at room temperature to irreversibly bond polyimide and PDMS through thiol-epoxy bonds using two different methods. In the first method, we functionalize the surfaces of the PDMS and polyimide substrates with mercaptosilanes and epoxysilanes, respectively, for the formation of a thiol-epoxy bond in the click reaction. In the second method, we functionalize one or both surfaces with mercaptosilane and introduce an epoxy adhesive layer between the two surfaces. When the surfaces are bonded using the epoxy adhesive without any surface functionalization, an extremely small peel strength ( 0.3 N mm−1 (method 2) are observed, and failure occurs by tearing of the PDMS layer. We envision that the novel processing route employing click chemistry can be utilized in various cases of stretchable and flexible device fabrication.

Hybrid additive manufacturing of 3D electronic systems

Abstract: A novel hybrid additive manufacturing (AM) technology combining digital light projection (DLP) stereolithography (SL) with 3D micro-dispensing alongside conventional surface mount packaging is presented in this work. This technology overcomes the inherent limitations of individual AM processes and integrates seamlessly with conventional packaging processes to enable the deposition of multiple materials. This facilitates the creation of bespoke end-use products with complex 3D geometry and multi-layer embedded electronic systems. Through a combination of four-point probe measurement and non-contact focus variation microscopy, it was identified that there was no obvious adverse effect of DLP SL embedding process on the electrical conductivity of printed conductors. The resistivity maintained to be less than 4 × 10−4 Ω centerdot cm before and after DLP SL embedding when cured at 100 °C for 1 h. The mechanical strength of SL specimens with thick polymerized layers was also identified through tensile testing. It was found that the polymerization thickness should be minimised (less than 2 mm) to maximise the bonding strength. As a demonstrator a polymer pyramid with embedded triple-layer 555 LED blinking circuitry was successfully fabricated to prove the technical viability.

Designing and modeling a centrifugal microfluidic device to separate target blood cells

Abstract: The objective of this study is to design a novel and efficient portable lab-on-a-CD (LOCD) microfluidic device for separation of specific cells (target cells) using magnetic beads. In this study the results are shown for neutrophils as target cells. However, other kinds of target cells can be separated in a similar approach. The designed microfluidics can be utilized as a point of care system for neutrophil detection. This microfluidic system employs centrifugal and magnetic forces for separation. After model validation by the experimental data in the literature (that may be used as a design tool for developing centrifugo-magnetophoretic devices), two models are presented for separation of target cells using magnetic beads. The first model consists of one container in the inlet section and two containers in the outlets. Initially, the inlet container is filled with diluted blood sample which is a mixture of red blood cells (RBCs) plus neutrophils which are attached to Magnetic beads. It is shown that by using centrifugal and magnetic forces, this model can separate all neutrophils with recovery factor of ~100%. In the second model, due to excess of magnetic beads in usual experimental analysis (to ensure that all target cells are attached to them) the geometry is improved by adding a third outlet for these free magnetic beads. It is shown that at angular velocity of 45 rad s−1, recovery factor of 100% is achievable for RBCs, free magnetic beads and neutrophils as target cells.

A micro-chip initiator with controlled combustion reactivity realized by integrating Al/CuO nanothermite composites on a microhotplate platform

Abstract: The interfacial contact area between the fuel and oxidizer components plays an important role in determining the combustion reactivity of nanothermite composites. In addition, the development of compact and reliable ignition methods can extend the applicability of nanothermite composites to various thermal engineering fields. In this study we report the development of a micro-chip initiator with controlled combustion reactivity using concepts usually applied to microelectromechanical systems (MEMS) and simple nanofabrication processes. The nanothermite composites fabricated in this study consisted of aluminum nanoparticles (Al NPs) as the fuel and copper oxide nanoparticles (CuO NPs) as the oxidizer accumulated on a silicon oxide substrate with a serpentine-shaped gold (Au) electrode. The micro-chip initiator rapidly ignited and exploded when minimal current was supplied. The effects of stacking structures of Al and CuO-based multilayers on the combustion properties were systematically investigated in terms of the pressurization rate, peak explosion time, and heat flow. Pressurization rates of 0.004–0.025 MPa μs−1 and heat flows of 2.0–3.8 kJ g−1 with a commonly fast response time of less than 20 ms could be achieved by simply changing the interfacial structures of the Al and CuO multilayers. The controllability of combustion reactivity of micro-chip initiator can be made for general nanothermite composites composed of Al and various metal oxides (e.g. Fe2O3, CuO, KMnO4, etc). The micro-chip initiator fabricated in this study was reliable, compact, and proved to be a versatile platform, exhibiting controlled combustion reactivity and fast response time, which could be used for various civilian and military thermal engineering applications, such as in initiators and propulsion, welding, and ordinance systems.

High performance flexible ultraviolet photodetectors based on TiO2/graphene hybrid for irradiation monitoring applications

Abstract: This paper reports a novel ultraviolet (UV) photodetector based on a TiO2/graphene hybrid, with high responsivity (0.482 A W−1) at 3 V bias and 330 nm irradiation, which is ~100 times higher than that based on pure TiO2. The collaboration of TiO2 and graphene in the hybrid material contributes to the high performance of the device. To be more specific, graphene provides a large surface area to load sufficient TiO2 nanoparticles, and the generated electrons are instantly collected due to the prominent electrical properties of graphene which can overcome the low quantum efficiency of pristine TiO2 caused by recombination of photo-induced electron–hole pairs. The device was fabricated on a flexible substrate using a facile spraying method that shows the possibility of broadening the future of photodetectors in wearable devices. An on-board interface circuit based on commercial IC components is implemented to collaborate with the photodetector to demonstrate a UV sensing application.

Amplitude modulated Lorentz force MEMS magnetometer with picotesla sensitivity

Abstract: This paper demonstrates ultra-high sensitivities for a Lorentz force resonant MEMS magnetometer enabled by internal-thermal piezoresistive vibration amplification. A detailed model of the magneto-thermo-electro-mechanical internal amplification is described and is in good agreement with the experimental results. Internal amplification factors up to ~1620 times have been demonstrated by artificially boosting the effective quality factor of the resonator from 680 to 1.14 × 106 by tuning the bias current. The increase in the resonator bias current in addition to the improvement in the quality factor of the device led to a sensitivity enhancement by ~2400 times. For a bias current of 7.245 mA, where the effective quality factor of the device and consequently the sensitivity is maximum (2.107 mV nT−1), the noise floor is measured to be as low as 2.8 pT (√Hz)−1. This is by far the most sensitive Lorentz force MEMS magnetometer demonstrated to date.

Patterned gradient surface for spontaneous droplet transportation and water collection: simulation and experiment

Abstract: We demonstrate spontaneous droplet transportation and water collection on wedge-shaped gradient surfaces consisting of alternating hydrophilic and hydrophobic regions. Droplets on the surfaces are modeled and simulated to analyze the Gibbs free energy and free energy gradient distributions. Big half-apex angle and great wettability difference result in considerable free energy gradient, corresponding to large driving force for spontaneous droplet transportation, thus causing the droplets to move towards the open end of the wedge-shaped hydrophilic regions, where the Gibbs free energy is low. Gradient surfaces are then fabricated and tested. Filmwise condensation begins on the hydrophilic regions, forming wedge-shaped tracks for water collection. Dropwise condensation occurs on the hydrophobic regions, where the droplet size distribution and departure diameters are controlled by the width of the regions. Condensate water from both the hydrophilic and hydrophobic regions are collected directionally to the open end of the wedge-shaped hydrophilic regions, agreeing with the simulations. Directional droplet transport and controllable departure diameters make the branched gradient surfaces more efficient than smooth surfaces for water collection, which proves that gradient surfaces are potential in water collection, microfluidic devices, anti-fogging and self-cleaning.

Design, fabrication and skin-electrode contact analysis of polymer microneedle-based ECG electrodes

Abstract: Microneedle-based 'dry' electrodes have immense potential for use in diagnostic procedures such as electrocardiography (ECG) analysis, as they eliminate several of the drawbacks associated with the conventional 'wet' electrodes currently used for physiological signal recording. To be commercially successful in such a competitive market, it is essential that dry electrodes are manufacturable in high volumes and at low cost. In addition, the topographical nature of these emerging devices means that electrode performance is likely to be highly dependent on the quality of the skin-electrode contact.This paper presents a low-cost, wafer-level micromoulding technology for the fabrication of polymeric ECG electrodes that use microneedle structures to make a direct electrical contact to the body. The double-sided moulding process can be used to eliminate post-process via creation and wafer dicing steps. In addition, measurement techniques have been developed to characterize the skin-electrode contact force. We perform the first analysis of signal-to-noise ratio dependency on contact force, and show that although microneedle-based electrodes can outperform conventional gel electrodes, the quality of ECG recordings is significantly dependent on temporal and mechanical aspects of the skin-electrode interface.

VHF-band biconvex AlN-on-silicon micromechanical resonators with enhanced quality factor and suppressed spurious modes

Abstract: This paper reports experimental results demonstrating the use of biconvex-edge designs to enhance the quality factor (Q) in aluminum nitride (AlN)-on-silicon micromechanical resonators. The proposed biconvex design serves to confine the acoustic energy to the center of the resonators, thus reducing out-of-plane bending on the supporting tethers that contribute to acoustic energy leakage, thereby enhancing Q. We here demonstrate that the biconvex design concept can be scaled and applied across a range of operating frequencies from 70 to 141 MHz with the notable effect of boosting Q relative to conventional flat-edge designs. Our measurements of several resonators have shown that the biconvex designs result in an increase in Q by 4–10 times compared to conventional flat-edge designs. In addition, we have also investigated the effect of using different lengths of supporting tethers on Q for both biconvex and flat-edge designs. From the measurement results of devices under test, we have found that the variation in Q as a function of tether length was insignificant compared to the increase in Q going from a flat-edge to biconvex design. As such, the level of enhancement for Q using the biconvex design is much more significant compared to varying the geometry of the support structures. Interestingly, the biconvex shape causes a modal split that gives rise to an additional anti-symmetric mode not found in the flat-edge design. We show experimentally that this spurious anti-symmetric mode can be suppressed by over 54 dB by applying a novel center-loaded electrode design that matches the strain field pattern of the desired symmetric mode. Close agreements between the 3D coupled-domain finite element simulations and the measured results of fabricated devices have been obtained for the resonant frequencies and motional capacitances.

A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array

Abstract: We experimentally demonstrate a dynamically tunable terahertz (THz) metamaterial absorber based on an electrostatic microelectromechanical systems (MEMS) actuator and electrical dipole resonator array. The absorption of the THz wave is mainly a result of the electrical dipole resonance, which shows a tunable performance on demand. By preforming the finite integral technique, we discovered that the central absorption frequency and the amplitude can be simultaneously tuned by the applied voltage U. Characterized by a white light interferometer and a THz time domain spectroscopy system, our THz absorber is measured to show a modulation of the central frequency and the amplitude to about 10% and 20%, respectively. The experimental results show good agreement with the simulation. This dynamically tunable absorber has potential applications on THz filters, modulators and controllers.

Development and precision position/force control of a new flexure-based microgripper

Abstract: This paper presents the design, modeling and position/force control of a new piezo-driven microgripper with integrated position and force sensors. The structural design of the microgripper is based on double amplification mechanisms employing the bridge-type mechanism and the parallelogram mechanism. The microgripper can generate a large gripping range and pure translation of the gripping arm. Through the pseudorigid-body-model method, theoretical models are derived. By means of several finite-element analysis simulations, the optimal structural parameters for the microgripper are acquired and the theoretical models are analyzed and validated. Furthermore, to improve the performance of the microgripper, a new hybrid position/force control scheme employing a nonlinear fuzzy logic controller combined with an incremental proportional-integral controller is presented. The control scheme is capable of regulating the position and the gripping force of the microgripper simultaneously. Experimental investigation and validation were performed and the experimental results verify the effectiveness of the developed structural design and the proposed hybrid control scheme.

Initially curved microplates under electrostatic actuation: theory and experiment

Abstract: Microplates are the building blocks of many micro-electro-mechanical systems. It is common for them to experience initial curvature imperfection due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly flat ones and cannot be modeled using flat plate models. In this paper, we adopt a dynamic analog of the von Karman governing equations of imperfect plates. These equations are then used to develop a reduced order model based on the Galerkin procedure, to simulate the static and dynamic behavior of the microplate under electrostatic actuation. To validate the simulation results, an initially curved imperfect microplate made of silicon nitride is fabricated and tested. The static behaviour of the microplate is investigated when applying a DC voltage V dc. Then, the dynamic behaviour of the microplate is examined under the application of a harmonic AC voltage, V ac, superimposed to V dc. The simulation results show good agreement with the experimentally measured responses.