Journal ArticleDOI
Feedforward control of piezoactuators in atomic force microscope systems
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TLDR
In this paper, an inversion-based feed-forward approach is proposed to compensate for dynamic and hysteresis effects in piezoactuators with application to AFM technology.Abstract:
This article describes an inversion-based feedforward approach to compensate for dynamic and hysteresis effects in piezoactuators with application to AFM technology. To handle the coupled behavior of dynamics and hysteresis, a cascade model is presented to enable the application of inversion-based feedforward control. The dynamics, which include vibration and creep, are modeled using linear transfer functions. A frequency-based method is used to invert the linear model to find an input that compensates for vibration and creep. The inverse is noncausal for nonminimum-phase systems. Similarly, the hysteresis is handled by an inverse-Preisach model. To avoid the complexity of finding the inverse-Preisach model, high- gain feedback control can be used to linearize the system's behavior. A feedforward input is then combined with the feedback system to compensate for the linear dynamics to achieve high-speed AFM imaging. Finally, recent efforts in feedforward control for an SPM application including the use of iteration to handle hysteresis as well as uncertainties and variations in the system model is discussed.read more
Citations
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Journal ArticleDOI
Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey
TL;DR: The progresses of different modeling and control approaches for piezo-actuated nanopositioning stages are discussed and new opportunities for the extended studies are highlighted.
Journal ArticleDOI
Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues.
TL;DR: This paper surveys key advances in mechanical design and control of dynamic effects and nonlinearities, in the context of high-speed nanopositioning, as well as future challenges and research topics.
Journal ArticleDOI
An Analytical Generalized Prandtl–Ishlinskii Model Inversion for Hysteresis Compensation in Micropositioning Control
TL;DR: In this paper, the analytical inverse of a generalized Prandtl-Ishlinskii model is formulated to compensate for hysteresis nonlinearities of smart actuators.
Journal ArticleDOI
A review of nanometer resolution position sensors: Operation and performance
TL;DR: In this paper, the authors define concise performance metrics and provide exact and approximate expressions for error sources including nonlinearity, drift and noise for position sensors with nanometer resolution, including resistive, piezoelectric and piezoresistive strain sensors.
Journal ArticleDOI
Design and Control of a Three-Axis Serial-Kinematic High-Bandwidth Nanopositioner
Brian J. Kenton,Kam K. Leang +1 more
TL;DR: In this article, a three-axis serial-kinematic nanopositioning stage is designed for high-bandwidth applications that include video-rate scanning probe microscopy and high-throughput probe-based nanofabrication.
References
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Book
Nonlinear Control Systems
Alberto Isidori,M. Thoma,Eduardo D. Sontag,B. W. Dickinson,A. Fettweis,J. L. Massey,J. W. Modestino +6 more
TL;DR: In this paper, a systematic feedback design theory for solving the problems of asymptotic tracking and disturbance rejection for linear distributed parameter systems is presented, which is intended to support the development of flight controllers for increasing the high angle of attack or high agility capabilities of existing and future generations of aircraft.
Book
Materials Science and Engineering: An Introduction
TL;DR: In this paper, the International System of Units (SI) is used to measure the properties of materials and their properties in the context of materials science and engineering, including properties of metal alloys.
Book
Introduction to the mechanics of a continuous medium
TL;DR: In this article, the authors propose a linearized theory of elasticity for tensors, which they call Linearized Theory of Elasticity (LTHE), which is based on tensors and elasticity.
Book
Mathematical models of hysteresis
TL;DR: A new approach to the scalar Preisach model of hysteresis, which emphasizes its phenomenological nature and mathematical generality, is described in this paper, which gives the necessary and sufficient conditions for the representation of actual hystresis nonlinearities by the scalareach model.
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