High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout.
Brahim El Mansouri,L.M. Middelburg,R. H. Poelma,Guoqi Zhang,Henk van Zeijl,Jia Wei,Hui Jiang,Johan G. Vogel,Willem van Driel +8 more
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TLDR
The design of a bulk micromachined MEMS device exploiting non-linear buckling behaviour is described, aiming for n∕Hz resolution by maximising mechanical and capacitive sensitivity.Abstract:
Commercially available gravimeters and seismometers can be used for measuring Earth’s acceleration at resolution levels in the order of $${\mathrm{ng}}/\sqrt {\mathrm{Hz}}$$
(where g represents earth’s gravity) but they are typically high-cost and bulky. In this work the design of a bulk micromachined MEMS device exploiting non-linear buckling behaviour is described, aiming for $${\mathrm{ng}}/\sqrt {\mathrm{Hz}}$$
resolution by maximising mechanical and capacitive sensitivity. High mechanical sensitivity is obtained through low structural stiffness. Near-zero stiffness is achieved through geometric design and large deformation into a region where the mechanism is statically balanced or neutrally stable. Moreover, the device has an integrated capacitive comb transducer and makes use of a high-resolution impedance readout ASIC. The sensitivity from displacement to a change in capacitance was maximised within the design and process boundaries given, by making use of a trench isolation technique and exploiting the large-displacement behaviour of the device. The measurement results demonstrate that the resonance frequency can be tuned from 8.7 Hz–18.7 Hz, depending on the process parameters and the tilt of the device. In this system, which combines an integrated capacitive transducer with a sensitivity of 2.55 aF/nm and an impedance readout chip, the theoretically achievable system resolution equals 17.02 $${\mathrm{ng}}/\sqrt {\mathrm{Hz}}$$
. The small size of the device and the use of integrated readout electronics allow for a wide range of practical applications for data collection aimed at the internet of things. A micromechanical system (MEMS) has been developed that allows accurate measurement of acceleration at high-resolution levels. Commercially available gravimeters and seismometers can be used for high-resolution measurement of the earth’s acceleration, but they are typically very expensive and bulky. However, a team headed by Guo Qi Zhang at Delft University of Technology, Netherlands was able to design, simulate, fabricate and test a low-cost MEMS device with an integrated miniaturized high-sensitivity transducer for high-resolution acceleration measurements. The team was able to process and package its device by wirebonding it to a printed circuit board containing an application-specific integrated circuit. The authors believe that their extremely compact, low-power inertial sensor has considerable potential for a wide range of practical applications for data collection with the Internet of things.read more
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Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review.
Chen Wang,Chen Wang,Chen Wang,Fang Chen,Yuan Wang,Sina Sadeghpour,Chenxi Wang,Mathieu Baijot,Rui Esteves,Chun Zhao,Jian Bai,Huafeng Liu,Michael Kraft +12 more
TL;DR: This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz and different methods of reducing the noise floor are analyzed.
Journal ArticleDOI
Investigating the mechanical response of microscale pantographic structures fabricated by multiphoton lithography
Zacharias Vangelatos,M. Erden Yildizdag,Ivan Giorgio,Francesco dell’Isola,Costas P. Grigoropoulos +4 more
TL;DR: In this article, the authors investigate how the design of micro-scale pantographic structures can be circumvented through the use of microscale Pantographs, which possess riveting hyperelastic response inherited by their structural design, providing exorbitant reversible deformations.
Journal ArticleDOI
The Recent Progress of MEMS/NEMS Resonators.
Lei Wei,Xuebao Kuai,Xuebao Kuai,Yidi Bao,Jiangtao Wei,Liangliang Yang,Peishuai Song,Mingliang Zhang,Fuhua Yang,Xiaodong Wang +9 more
TL;DR: In this paper, a review of the latest research progress of MEMS/NEMS resonators with different structures is presented, and the resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced.
Journal ArticleDOI
Measurement of Tidal Tilt by a Micromechanical Inertial Sensor Employing Quasi-Zero- Stiffness Mechanism
Wenjie Wu,Dandan Liu,Huafeng Liu,Shitao Yan,Shihao Tang,Jinquan Liu,Fangjing Hu,Ji Fan,Liang-Cheng Tu +8 more
TL;DR: In this paper, the authors proposed a quasi-zero-stiffness mechanism that is compatible with MEMS technologies together with a micromaching approach for adjusting the stiffness precisely.
Journal ArticleDOI
Effect of Deep-Defects Excitation on Mechanical Energy Dissipation of Single-Crystal Diamond
Huanying Sun,Liwen Sang,Haihua Wu,Zilong Zhang,Tokuyuki Teraji,Tie-Fu Li,J. Q. You,Masaya Toda,Satoshi Koizumi,Meiyong Liao +9 more
TL;DR: In this article, the effect of deep defects on the mechanical energy dissipation of single-crystal diamond was investigated experimentally and theoretically up to 973 K. Energy dissipation is found to increase with temperature and exhibits local maxima due to the interaction between phonons and deep defects activated at specific temperatures.
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