Imaging XPS—A new technique, I—principles

TLDR: In this paper, the dispersion properties of a spherical condenser-type spectrometer are exploited for decoding the energy and emission position of an analyzed photoelectron. But the only imaging XPS method to date which has been found to be practical is essentially a scanned-particle-beam method, like scanning AES, and it is only applicable to thin film specimens.

Abstract: XPS imaging promises to be a powerful analytic tool because it enables specific information on both elements and bonding to be recorded on a two-dimensional distribution map. As far as the authors are aware, the only scanning XPS method to date which has been found to be practical is essentially a scanned-particle-beam method, like scanning AES, and it is only applicable to thin film specimens. This paper provides the basic ideas of a new imaging XPS technique based on a quite different concept. It will be applicable to any kind of specimen that can be analysed in a conventional XPS system. It makes use of the dispersion properties of a spherical condenser-type spectrometer and applies a two-dimensional electron detection device for decoding the energy and emission position of an analysed photoelectron. Experimental arrangement and theory of operation are presented.