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Integrated Design and Control of Flexure-Based Nanopositioning Systems — Part I: Methodology

Vijay Shilpiekandula, +1 more
- 01 Jan 2011 - 
- Vol. 44, Iss: 1, pp 9406-9412
TLDR
In this article, the authors present an integrated design and control method for implementing flexure-based nanopositioning systems, where an automation engine generates a set of flexurebased design topologies and also controllers of varying order in the optimization.
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This article is published in IFAC Proceedings Volumes.The article was published on 2011-01-01 and is currently open access. It has received 1 citations till now. The article focuses on the topics: Integrated design & Automation.

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Optimal balancing of slider-crank servomechanism: closed-loop optimal position control approach

TL;DR: In this article, a closed-loop optimal control theory is proposed to indirectly minimize the shaking forces and input torques in closed-chain mechanisms, and the proposed method is applied on a nonlinear position control problem.
References
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Journal ArticleDOI

Optimal design of a compliant mechanism with circular notch flexure hinges

K. B. Choi, +1 more
TL;DR: In this article, the authors presented an optimal design of a compliant mechanism with circular notch flexure hinges as well as a performance evaluation of a two-axes ultra-precision stage using the compliant mechanism.
Proceedings ArticleDOI

Dynamic Analysis of Compliant Mechanisms

TL;DR: In this paper, a systematic method for dynamic analysis of compliant mechanisms including basic formulations for natural frequencies, modes, dynamic response, and frequency characteristics is presented, and methods for design sensitivity analysis are developed to investigate the effect of various design parameters on the dynamic performance of compliant mechanism.
Journal ArticleDOI

Dynamics of a compliant mechanism based on flexure hinges

K-B Choi
TL;DR: A novel equation of motion for flexure hinge-based mechanisms that describes the behaviours of the rigid bodies better than the conventional equation ofmotion does.
Journal ArticleDOI

Damping of flexural vibration using low-density, low-wave-speed media

TL;DR: In this article, the authors describe a set of experiments in which flexural vibration of aluminum beams over a broad frequency range is damped by introduction of a layer of lossy low-wave-speed foam.
Journal ArticleDOI

Simultaneous optimal structure and control design of flexible linkage mechanism for noise attenuation

TL;DR: In this article, a new set of equations of motion is obtained by employing a set of wavenumber transformations to the original equations, in which the unknown variables can describe the structural acoustic radiation level of the mechanism directly.
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Frequently Asked Questions (14)
Q1. What have the authors contributed in "Integrated design and control of flexure-based nanopositioning systems - part i: methodology" ?

In this paper, the authors present an integrated design and control method for implementing flexurebased nanopositioning systems. The authors discuss the need for varying design topology and order of a controller in design and control optimization. This work may not be copied or reproduced in whole or in part for any commercial purpose. Permission to copy in whole or in part without payment of fee is granted for nonprofit educational and research purposes provided that all such whole or partial copies include the following: a notice that such copying is by permission of Mitsubishi Electric Research Laboratories, Inc. ; an acknowledgment of the authors and individual contributions to the work ; and all applicable portions of the copyright notice. 

The details of the controller parameterization are not covered here and will be part of a future paper from their group. 

Since unmodeled dynamics in the control bandwidth can adversely affect the performance, it is necessary to account for model-truncation errors in the design and control optimization. 

Once the building blocks are generated, a library of design topologies can be generated by using the building block as an implementation of the constraints (following a constraint-based synthesis approach [29]) for satisfying the necessary kinematics. 

Flexure-based mechanisms are composed of slender beam-like spring elements in their mechanical design; they are close to being ideal motion bearings with minimal friction, backlash, and other uncertainties. 

Physical damping is low in flexures made from metals such as aluminium (used in development stages of the design process for ease of machining), or titanium (used in the implementation and testing phase because of its high fatigue strength and other material properties). 

A common systems-based methodology can facilitate developing valuable synthesis tools for achieving the desired closed-loop control performance. 

since the number of possible design configurations in typical nanopositioning system applications are finite, the varying design topology problem can be broken down into a number of fixed design (each tested with a controller of varying order) problems. 

With the actuation location moved closer to the end-point, the portion of the link from the new actuation point to the sensor location is shorter, and hence stiffer. 

Many applications for nanopositioning systems have emerged over the past few decades in various contexts, such as semiconductor manufacturing, metrology, x-ray crystallography, and biological imaging. 

These operations could be, for example, a parallel or serial replication, or a geometrical transformation, or adding a redundant constraint that imparts symmetry. 

It is shown in [36] that, under certain geometry conditions, this topology change results in moving the zeros from the real-axis on to the imaginary axis, making the system minimum-phase. 

In order to avoid the occurrence of the non-minimum phase zero, the actuation point shown in Fig. 1 (a) can be moved away from the motor closer to the end-point, as shown in Fig. 1(b). 

Without this topology change, with the actuator just as the motor and sensor at the end-point, the system would be non-minimum phase and pose critical control challenges.