Kinetic-energy induced smoothening and delay of epitaxial breakdown in pulsed-laser deposition
Byungha Shin,Michael J. Aziz +1 more
TLDR
In this paper, the effect of kinetic energy of depositing species from flux pulsing during pulsed-laser deposition (PLD) on surface morphology evolution of Ge(001) homoepitaxy at low temperature was isolated.Abstract:
We have isolated the effect of kinetic energy of depositing species from the effect of flux pulsing during pulsed-laser deposition (PLD) on surface morphology evolution of Ge(001) homoepitaxy at low temperature $(100\phantom{\rule{0.2em}{0ex}}\ifmmode^\circ\else\textdegree\fi{}\mathrm{C})$. Using a dual molecular beam epitaxy (MBE) PLD chamber, we compare morphology evolution from three different growth methods under identical experimental conditions except for the differing nature of the depositing flux: (a) PLD with average kinetic energy $300\phantom{\rule{0.3em}{0ex}}\mathrm{eV}$ (PLD-KE); (b) PLD with suppressed kinetic energy comparable to thermal evaporation energy (PLD-TH); and (c) MBE. The thicknesses at which epitaxial breakdown occurs are ranked in the order $\mathrm{PLD}\text{\ensuremath{-}}\mathrm{KE}g\mathrm{MBE}g\mathrm{PLD}\text{\ensuremath{-}}\mathrm{TH}$; additionally, the surface is smoother in PLD-KE than in MBE. The surface roughness of the films grown by PLD-TH cannot be compared due to the early epitaxial breakdown. These results demonstrate convincingly that kinetic energy is more important than flux pulsing in the enhancement of epitaxial growth, i.e., the reduction in roughness and the delay of epitaxial breakdown.read more
Citations
More filters
Journal ArticleDOI
Recent advances in pulsed-laser deposition of complex oxides
Hans M. Christen,Gyula Eres +1 more
TL;DR: Detailed growth kinetics results are discussed, which illustrate that 'true' layer-by-layer (LBL) growth can only be approached, not fully met, even though many characterization techniques reveal interfaces with unexpected sharpness.
Journal ArticleDOI
Film Growth Mechanisms in Pulsed Laser Deposition
TL;DR: In this article, a comparison of growth morphology evolution for pulsed laser deposition and thermal deposition in the same dual-use chamber under identical thermal, background, and surface preparation conditions, and varying the kinetic energy by varying the laser fluence or using an inert background gas was made.
Journal ArticleDOI
Impact of the interplay between nonstoichiometry and kinetic energy of the plume species on the growth mode of SrTiO 3 thin films
TL;DR: In this paper, the authors studied the pulsed laser deposition of homoepitaxial SrTiO3 thin films in different deposition regimes in order to elucidate the possibility to promote two-dimensional growth by increasing the kinetic energy of the oncoming particles.
Journal ArticleDOI
Pulsed laser deposition of nanoparticle films of Au
TL;DR: In this paper, Nanosecond pulsed laser deposition (PLD) has been used to grow nanoparticle films of Au on Si and sapphire substrates, and the equivalent solid density thickness was measured with a quartz crystal monitor and the ion flux was measured using a time-of-flight Langmuir probe.
Journal ArticleDOI
Evolution of InGaAs quantum dot molecules
TL;DR: In this paper, the formation and evolution process of self-assembled InGaAs quantum dot molecules (QDMs) is studied in terms of configuration, volume, and types of QDMs.
References
More filters
Journal ArticleDOI
Monte Carlo simulations of epitaxial growth: comparison of pulsed laser deposition and molecular beam epitaxy
M. E. Taylor,Harry A. Atwater +1 more
TL;DR: In this article, the influence of epitaxial growth method on surface morphology was explored using a solid-on-solid, rate equation, Monte Carlo simulation whose parameters were chosen to approximate (1×1) Si (001).
Journal ArticleDOI
Nonequilibrium interlayer transport in pulsed laser deposition.
Jonathan Zachary Tischler,Gyula Eres,Ben C Larson,Christopher M. Rouleau,P. Zschack,Douglas H. Lowndes +5 more
TL;DR: Analysis of surface coverage evolution shows that extremely fast nonequilibrium interlayer transport, which occurs concurrently with the arrival of the laser plume, dominates the deposition process.
Journal ArticleDOI
The concept of two mobilities in homoepitaxial growth
TL;DR: In this article, a general kinetic concept is introduced which can be used to control growth modes in homoepitaxy, and the concept can be realized experimentally in a variety of ways and is not restricted to special systems.
Letter to the Editors The concept of two mobilities in homoepitaxial growth
TL;DR: In this article, a general kinetic concept is introduced which can be used to control growth modes in homoepitaxy, and the concept can be realized experimentally in a variety of ways and is not restricted to special systems.
Journal ArticleDOI
Effect of energetic particles on island formation in sputter deposition of Pt on Pt(111)
TL;DR: In this paper, the influence of these particles on the island formation of Pt films on a Pt(111) surface has been examined by variation of the deposition geometry, the primary ion energy, and the substrate temperature.
Related Papers (5)
Role of Cluster Transient Mobility in Pulsed Laser Deposition-Type Growth Kinetics
E. Vasco,J. L. Sacedón +1 more