New theoretical and experimental results on high frequency surface acoustic waves excited on oriented LiNbO/sub 3/ single crystal layers transferred

TLDR: In this paper, the Rayleigh-like and shear waves on a 4" LiNbO3(YX)/Silicon wafer operating at 1 GHz were compared to the state of the art.

Abstract: Previous work has shown the possibility to transfer thin layers of oriented single crystal LiNbO3 onto silicon. Predictions and measurements of the Rayleigh-like and shear waves on a 4” LiNbO3(YX)/Silicon wafer operating at 1 GHz already have been presented and compared to the state of the art. Considering theoretical predictions, one can expect a factor of 2 for the coupling and reflection coefficients when exploiting the shear mode at 2 GHz. Comparing our new experimental results with theoretical predictions assuming the substrate conductive yields an improved agreement between theory and measurements. These new results at 2 GHz (measured coupling equal to 12.5% and 15% for the theoretical and experimental reflection coefficient) clearly prove the interest of the method.