Journal ArticleDOI
Nonlinear Dynamics of MEMS Arches Assuming Out-of-Plane Actuation Arrangement
Hassen M. Ouakad,Fehmi Najar +1 more
TLDR
In this paper, the nonlinear dynamics of a microbeam shallow arch actuated through an out-of-plane electrostatic force arrangement is investigated, and a reduced order model is developed to analyze the static, free vibration, and nonlinear dynamic response of the microstructure under different direct current and alternating current load conditions.Abstract:
In this work, the nonlinear dynamics of a microbeam shallow arch actuated through an out-of-plane electrostatic force arrangement is investigated. A reduced order model is developed to analyze the static, free vibration, and nonlinear dynamic response of the microstructure under different direct current and alternating current load conditions. A numerical investigation is conducted by comparing the response of the arch near primary and secondary resonances using a nonparallel plates actuation scheme where the arch itself forms a moving electrode. The results show that the nonparallel excitation can be efficient for primary and secondary resonances excitation. Moreover, unlike the classical parallel plates method, where the structure is vulnerable to the dynamic pull-in instability, this nonparallel excitation arrangement can provide large amplitude motion while protecting the structure from the so-called static and dynamic pull-in instabilities. In addition to primary resonance, secondary resonances are demonstrated at twice and one-half the primary resonance frequency. The ability to actuate primary and/or secondary resonances without reaching the dynamic pull-in instability can serve various applications where large strokes increase their performance, such as for resonator-based sensitive mass sensors.read more
Citations
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Journal ArticleDOI
On nonlocal mechanics of curved elastic beams
TL;DR: In this article, the size-dependent static behavior of curved elastic nano-beams is investigated by stress-driven nonlocal continuum mechanics, where axial strain and flexural curvature fields are integral convolutions between equilibrated axial force and bending moment fields and an averaging kernel.
Journal ArticleDOI
A double-side electrically-actuated arch microbeam for pressure sensing applications
TL;DR: In this article, the authors considered a pressure sensor whose main component is a clamped-clamped shallow arched microbeam and formulated a fully-coupled multi-physics model of the electrically-actuated shallow arch microbeam combining the nonlinear Euler-Bernoulli beam theory with nonlinear Reynolds equation governing the surrounding fluid domains (drive and sense zones).
Journal ArticleDOI
2D electrostatic energy harvesting device using a single shallow arched microbeam
TL;DR: In this paper, a shallow arched microbeam was used to design a compact 2D energy harvesting device using a single electrostatic transducer, and the associated nonlinear differential equations were solved using a Galerkin technique.
Journal ArticleDOI
Autonomous shock sensing using bi-stable triboelectric generators and MEMS electrostatic levitation actuators
TL;DR: In this article, a threshold shock-sensing trigger system that consists of a bi-stable triboelectric transducer and a levitation-based electrostatic mechanism is presented.
Journal ArticleDOI
Out-of-plane motion detection in encapsulated electrostatic MEMS gyroscopes: Principal parametric resonance
TL;DR: Park et al. as discussed by the authors proposed a measurement method for out-of-plane motion detection in an encapsulated electrostatic MEMS gyroscope based on a variant of the harmonic detection of resonance (HDR) of the motion-induced current.
References
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Journal ArticleDOI
Differential Quadrature Method in Computational Mechanics: A Review
Charles W. Bert,Moinuddin Malik +1 more
TL;DR: The differential quadrature method (DQM) as discussed by the authors is a numerical solution technique for initial and/or boundary problems, which was developed by the late Richard Bellman and his associates in the early 70s.
Journal ArticleDOI
A piezoelectric bistable plate for nonlinear broadband energy harvesting
TL;DR: In this article, the authors exploit the nonlinear behavior of a bistable composite plate with bonded piezoelectric patches for broadband nonlinear energy harvesting, and the response of the structure is experimentally investigated revealing different large amplitude oscillations.
Journal ArticleDOI
The dynamic behavior of MEMS arch resonators actuated electrically
TL;DR: In this article, the authors investigated the dynamic behavior of clamped-clamped micromachined arches when actuated by a small DC electrostatic load superimposed to an AC harmonic load.
Journal ArticleDOI
Bistable nanowire for micromechanical memory
Benoit Charlot,W. Sun,Kiyotaka Yamashita,Hiroyuki Fujita,Hiroshi Toshiyoshi,Hiroshi Toshiyoshi +5 more
TL;DR: In this paper, a micromechanical device designed to be used as a nonvolatile mechanical memory is presented, which is composed of a suspended slender nanowire (width: 100 nm, thickness: 430 nm, length: 8 to 30?m) clamped at both ends.
Journal ArticleDOI
Bifurcation-based mass sensing using piezoelectrically-actuated microcantilevers
Vijay Kumar,J. William Boley,Yushi Yang,Hendrik Ekowaluyo,Jacob K. Miller,George T.-C. Chiu,Jeffrey F. Rhoads +6 more
TL;DR: In this paper, an alternative sensing approach based upon dynamic transitions across saddle-node bifurcations is investigated, which not only has the potential to render improved sensor metrics but also to eliminate frequency tracking components from final device implementations.