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Journal ArticleDOI

Out-of-plane motion detection in encapsulated electrostatic MEMS gyroscopes: Principal parametric resonance

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TLDR
Park et al. as discussed by the authors proposed a measurement method for out-of-plane motion detection in an encapsulated electrostatic MEMS gyroscope based on a variant of the harmonic detection of resonance (HDR) of the motion-induced current.
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This article is published in International Journal of Mechanical Sciences.The article was published on 2021-01-15. It has received 12 citations till now. The article focuses on the topics: Motion detection & Gyroscope.

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Proceedings Article

Bifurcation-based micro/nano-electromechanical mass detection

TL;DR: In this paper, an alternative mass detection based on the hysteretic behavior of the nonlinear frequency responses that takes advantage of bi-stability and bifurcations is investigated.
Journal ArticleDOI

Exploiting bi-stable magneto-piezoelastic absorber for simultaneous energy harvesting and vibration mitigation

TL;DR: In this paper, a tunable bi-stable magneto-pieozelastic absorber (BMPA) was proposed for simultaneous energy harvesting and vibration suppression utilizing a bimorph cantilever beam exposed to a magnetic field.
Posted ContentDOI

Dynamic Behavior of T-beam Resonator With Repulsive Actuation

TL;DR: In this paper, a reduced-order model is derived from mode shapes formed from electromechanical coupling effects, and dynamic behaviors are investigated through the theory of multiple scales, including both primary and principal parametric resonances, reveal softening behavior originating from quadratic and cubic nonlinearities in the governing equation.
Journal ArticleDOI

Hyperelastic Microcantilever AFM: Efficient Detection Mechanism Based on Principal Parametric Resonance

TL;DR: In this article , an efficient detection mechanism was proposed to scan the surface profile of a micro-sample using cantilever-based atomic force microscopy (AFM), operating in non-contact mode.
Journal ArticleDOI

Multiple particle identification by sequential frequency-shift measurement of a micro-plate

TL;DR: In this paper , a theoretical framework is introduced to detect both the masses and positions of multiple particles absorbed on a two-dimensional micro-plate, where the history of the mass deposition events is sequentially measured from the recorded frequency shifts.
References
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Journal ArticleDOI

Cantilever transducers as a platform for chemical and biological sensors

TL;DR: In this article, the authors discuss sensors with transducers in a form of cantilevers, which are especially attractive as transducers for chemical and biological sensors, and provide a brief analysis of historical predecessors of the modern cantilever sensors.
Book

Linear and nonlinear structural mechanics

TL;DR: In this paper, the authors propose a reduction of the string model to two equations, and then a reduction to a single-mode response with a Discretization Approach (DMR) approach.
Journal ArticleDOI

Electrostatic pull-in instability in MEMS/NEMS: A review

TL;DR: In this paper, a review of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices is presented, along with physical principles that have enabled fundamental insights into the pullin instability as well as pullin induced failures.
Journal ArticleDOI

Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor

TL;DR: In this article, the effects of nonlinearity on the behavior of parametric resonance of a micro-machined oscillator were investigated. And the authors showed that the nonlinearities (electrostatic and mechanical) have a large impact on the dynamic response of the structure.
Journal ArticleDOI

Wireless Intraocular Pressure Sensing Using Microfabricated Minimally Invasive Flexible-Coiled LC Sensor Implant

TL;DR: In this paper, an implantable parylene-based pressure sensor has been developed, featuring an electrical LC-tank resonant circuit for passive wireless sensing without power consumption on the implanted site.
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