Patent
Optical near-field scanning microscope
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TLDR
In this paper, an optical near-field scanning microscope consisting of an "objective" (aperture) attached to the conventional vertical adjustment appliance and consisting of optically transparent crystal having a metal coating with an aperture at its tip with a diameter of less than one wavelength of the light used for illuminating the object.Abstract:
This optical near-field scanning microscope comprises an "objective" (aperture) attached to the conventional vertical adjustment appliance and consisting of an optically transparent crystal having a metal coating with an aperture at its tip with a diameter of less than one wavelength of the light used for illuminating the object. Connected to the aperture-far end of the "objective" is a photodetector via an optical filter and an optical fiber glass cable. Scanning the object is done by appropriately moving the support along x/y-coordinates. The resolution obtainable with this microscope is about 10 times that of state-of-the-art microscopes.read more
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PatentDOI
Apertureless near field optical microscopy
TL;DR: In this paper, a dither motion is applied to the tip at a first frequency in a direction substantially normal (22) to the plane of the sample surface (18), and then at a second frequency the motion is simultaneously applied to a sample (20) at a parallel direction (24) parallel to the surface plane (18) to reduce the detected background signal.
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PatentDOI
Photon scanning tunneling microscopy.
TL;DR: In this article, a method and apparatus for photon scanning tunneling microscopy for examining a sample (20) in a sample area (21) on a surface (16) at subwavelength resolution is disclosed.
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TL;DR: In this article, a method is described for characterizing defects on a test surface of a semiconductor wafer using a confocal-microscope-based automatic defect characterization (ADC) system.
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Patent
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