Journal ArticleDOI
Performance of low-loss RF MEMS capacitive switches
TLDR
In this paper, the construction and performance of metal membrane radio frequency MEMS switches at microwave and millimeter-wave frequencies was described. But the authors focused on the performance of the switches in terms of on-off capacitance ratio.Abstract:
'This letter details the construction and performance of metal membrane radio frequency MEMS switches at microwave and millimeter-wave frequencies. These shunt switches possess a movable metal membrane which pulls down onto a metal/dielectric sandwich to form a capacitive switch. These switches exhibit low loss (<0.25 dB at 35 GHz) with good isolation (35 dB at 35 GHz). These devices possess on-off capacitance ratios in the range of 80-110 with a cutoff frequency (figure of merit) in excess of 9000 GHz, significantly better than that achievable with electronic switching devices.read more
Citations
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Journal ArticleDOI
RF MEMS switches and switch circuits
TL;DR: In this paper, the authors concentrate on electrostatic switches at 0.1-100 GHz with high reliability (100 million to 10 billion cycles) and wafer-scale manufacturing techniques.
Journal ArticleDOI
A study of the nonlinear response of a resonant micro-beam to an electric actuation
Mohammad I. Younis,A. H. Nayfeh +1 more
TL;DR: In this article, a nonlinear model is used to account for the midplane stretching, a DC electrostatic force, and an ACharmonic force in the response of a resonant microbeam to an electric actuation.
Journal Article
Reconfigurable Antennas
TL;DR: A review of the past and current technologies applicable to reconfigurable antennas, with several examples of implementations, can be found in this article, where both mechanically movable parts and arrays are discussed, as well as more recent semiconductor component and tunable material technologies.
Journal ArticleDOI
Reconfigurable scan-beam single-arm spiral antenna integrated with RF-MEMS switches
TL;DR: In this paper, a reconfigurable rectangular spiral antenna with a set of micro electro mechanical system (MEMS) switches, which are monolithically integrated and packaged onto the same substrate, is presented.
Journal ArticleDOI
High-isolation CPW MEMS shunt switches. 1. Modeling
TL;DR: In this article, an electromagnetic model for membrane microelectromechanical systems (MEMS) shunt switches for microwave/millimeter-wave applications is presented, where the up-state capacitance can be accurately modeled using three-dimensional static solvers and full-wave solvers are used to predict the current distribution and inductance of the switch.
References
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Journal ArticleDOI
Micromechanical membrane switches on silicon
TL;DR: In this paper, the authors describe the design, fabrication, operating behavior, and potential applications of voltage-controlled, micromechanical switches, which are basically extremely small, electrostatically controlled mechanical relays, typically less than 100 µm long.
Proceedings ArticleDOI
A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 Ghz
J.J. Yao,M.F. Chang +1 more
TL;DR: In this paper, a surface micromachined miniature switch has been made on a semi-insulating GaAs substrate using a suspended silicon dioxide micro-beam as the cantilevered arm, a platinum-to-gold electrical contact, and electrostatic actuation as the switching mechanism.
Proceedings ArticleDOI
Characteristics of micromachined switches at microwave frequencies
C.L. Goldsmith,John N. Randall,S. Eshelman,Tsen-Hwang Lin,David Denniston,S. Chen,B. Norvell +6 more
TL;DR: In this paper, the fundamental characteristics of micromechanical membrane switches operating at microwave frequencies are discussed and the construction and theory of operation of capacitive membrane switches is reviewed. And the inherent advantages of these switches relative to semiconductor switches are discussed.
Proceedings ArticleDOI
Micromechanical membrane switches for microwave applications
TL;DR: In this article, the authors proposed the fabrication of low-cost, low-loss microwave switches using thin metal membranes actuated by electrostatic fields, which have a potential 1000 to 2000-GHz figure-of-merit.
Proceedings ArticleDOI
Micromachined microwave actuator (MIMAC) technology-a new tuning approach for microwave integrated circuits
TL;DR: In this paper, the authors describe an approach to the realization of tunable/variable III-V planar microwave integrated circuits, which uses micromachined electrostatically controlled actuator technology.