Open AccessBook
Principles of Lithography
TLDR
The second edition of this book as discussed by the authors was written to address several needs, and the revisions for the second edition were made with those original objectives in mind, and many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail.Abstract:
Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.read more
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Journal Article
Digital wavefront measuring interferometer for testing optical surfaces and lenses
TL;DR: In this article, a self-scanned 1024 element photodiode array and a minicomputer are used to measure the phase (wavefront) in the interference pattern of an interferometer to lambda/100.
Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology
Wim Bogaerts,Pieter Dumon,Wiaux,Johan Wouters,Stephan Beckx,Dirk Taillaert,Bert Luyssaert,Joris Van Campenhout,Dries Van Thourhout,Roel Baets +9 more
TL;DR: In this paper, the authors compared the performance of photonic wires and photonic-crystal waveguides for photonic integration in silicon-on-insulator (SiOI) circuits.
Journal ArticleDOI
Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology
Wim Bogaerts,Roel Baets,Pieter Dumon,Vincent Wiaux,Stephan Beckx,Dirk Taillaert,Bert Luyssaert,J. Van Campenhout,Peter Bienstman,D. Van Thourhout +9 more
TL;DR: In this paper, the authors compared the performance of photonic wires and photonic-crystal waveguides for photonic integration in silicon-on-insulator (SiOI) circuits.
Journal Article
Improving resolution in photolithography with a phase-shifting mask
TL;DR: The phase-shifting mask as mentioned in this paper consists of a normal transmission mask that has been coated with a transparent layer patterned to ensure that the optical phases of nearest apertures are opposite.
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Innovation in Layer-by-Layer Assembly.
Joseph J. Richardson,Joseph J. Richardson,Jiwei Cui,Mattias Björnmalm,Julia A. Braunger,Hirotaka Ejima,Frank Caruso +6 more
TL;DR: This Review explores, discusses, and detail innovation in layer-by-layer assembly in terms of past and present developments, and highlights how these might guide future advances.
References
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Journal ArticleDOI
Introduction to Fourier Optics
Joseph W. Goodman,Mary E. Cox +1 more
TL;DR: The second edition of this respected text considerably expands the original and reflects the tremendous advances made in the discipline since 1968 as discussed by the authors, with a special emphasis on applications to diffraction, imaging, optical data processing, and holography.
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X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
TL;DR: In this article, the atomic scattering factors for all angles of coherent scattering and at the higher photon energies are obtained from these tabulated forward-scattering values by adding a simple angle-dependent form-factor correction.
Journal ArticleDOI
Calculations of electron inelastic mean free paths. III. Data for 15 inorganic compounds over the 50–2000 eV range
TL;DR: In this article, the electron inelastic mean free paths (IMFPs) of 14 organic compounds were computed for a group of 14 compounds: 26-n-paraffin, adenine, β-carotene, bovine plasma albumin, deoxyribonucleic acid, diphenylhexatriene, guanine, kapton, polyacetylene, poly(butene-1-sulfone), polyethylene, polymethylmethacrylate, polystyrene and poly(2-vinyl
Journal Article
Digital wavefront measuring interferometer for testing optical surfaces and lenses
TL;DR: In this article, a self-scanned 1024 element photodiode array and a minicomputer are used to measure the phase (wavefront) in the interference pattern of an interferometer to lambda/100.
Journal ArticleDOI
The Axicon: A New Type of Optical Element
TL;DR: The axicon autocollimator as discussed by the authors is a projector which projects a straight line of images into space, and it can be used to determine the perpendicularity of a mirror.