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Journal ArticleDOI

Resistivity and Temperature Coefficient of Thin Metal Films with Rough Surface

Yoshikatsu Namba
- 01 Nov 1970 - 
- Vol. 9, Iss: 11, pp 1326-1329
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TLDR
In this paper, the surface roughness of thin metal films has been used to predict the thickness dependence of resistivity and its temperature coefficient of metal films, and the ratio of the roughness to the mean free path, h/λ, is introduced as a convenient parameter.
Abstract
The thickness dependence of resistivity and its temperature coefficient of thin metal films has been studied. A theory is proposed to include, the surface roughness in determining the film resistivity, in addition to the reduced mean free path to conduction electrons. The ratio of the roughness to the mean free path, h/λ, is introduced as a convenient parameter. The thickness dependence of the resistivity predicted by the present theory agrees with the well known Fuchs-Sondheimer theory if h/λ=0. If h/λ>0, the discrepancy between the two theories increases with the decrease in film thickness. Satisfactory agreement between the theoretical and experimental results can be obtained by adjusting the value of h/λ.

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Citations
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Journal ArticleDOI

Transparent conductive electrodes for electrochromic devices: A review

TL;DR: In this article, the optical and electrical properties of thin films that are useful as transparent electrodes in electrochromic devices are discussed, and the properties of certain heavily doped widebandgap semiconductor oxides (especially In2O3:Sn) and of metal films are discussed.
Journal ArticleDOI

Thickness dependent electrical resistivity of ultrathin (<40 nm) Cu films

TL;DR: In this article, Namba's model that uses the measured surface roughness provides the best description of the resistivity-thickness behavior in sub-40-nm thick Cu films.
Journal ArticleDOI

The search for the most conductive metal for narrow interconnect lines

TL;DR: In this paper, a list of metals (Rh, Pt, Ir, Nb, Ru, Ni, etc.) with a small product of the bulk resistivity times the bulk electron mean free path was provided.
Journal ArticleDOI

Resistivity of thin Cu films with surface roughness

TL;DR: In this article, an atomistic first-principles calculation of resistivity induced by atomically rough surfaces of thin Cu films is presented, which shows that the resistivity increases significantly due to surface roughness scattering and it is quite sensitive to both the amount and the nature of roughness.
Journal ArticleDOI

A theoretical description of grain boundary electron scattering by an effective mean free path

C.R. Tellier
- 15 Jun 1978 - 
TL;DR: A mathematical analysis based on the Mayadas-Shatzkes model indicates that an effective mean free path may be defined in order to describe electronic conduction in both thin polycrystalline and monocrystalline metallic films as discussed by the authors.