Journal ArticleDOI
Specialized electron beam nanolithography for EUV and X-ray diffractive optics
TLDR
In this article, on axis calibration, beam placement, subpixel image processing for overlay, and smooth generation of arc shapes have been used to make diffractive structures with linewidths approaching 10 nm and near diffraction limited optical performance.Abstract:
Diffraction of electromagnetic radiation remains a viable method for manipulation and focusing of extreme ultraviolet and X-ray wavelengths where the optical properties preclude significant phase shift without attenuation. As the wavelength becomes smaller, the characteristic dimensions needed for effective utilization of diffraction proportionally shrink, placing significant demands on the half-pitch of the diffractive structure. State-of-the-art nanofabrication technology is then required. Additionally, line placement over the entire grating, zone plate lens, or other diffractive element requires an accuracy on the order of a small fraction of a linewidth over the entire structure. This places a heavy burden on the alignment and calibration of the pattern-generating tool. In the case of zone plate lenses, smooth curved geometric elements are required. Specialized techniques for electron beam lithography have been developed to meet these demands, which diverge from the technology used to meet the challenges encountered in mask making and electronic circuit research. The techniques are in four areas: on axis calibration, beam placement, subpixel image processing for overlay, and smooth generation of arc shapes. Using the ensemble of these specialized techniques, high-resolution electron beam lithography nanofabrication has been used to successfully make diffractive structures with linewidths approaching 10 nm and near diffraction limited optical performance.read more
Citations
More filters
Book
X-Rays and Extreme Ultraviolet Radiation: Principles and Applications
TL;DR: In this paper, the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation are discussed and their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy.
Journal ArticleDOI
Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution
C. Brewer,Fernando Brizuela,Przemyslaw Wachulak,Dale Martz,Weilun Chao,Erik H. Anderson,David Attwood,Alexander V. Vinogradov,I. A. Artyukov,Alexander G. Ponomareko,V. V. Kondratenko,Mario C. Marconi,Jorge J. Rocca,Carmen S. Menoni +13 more
TL;DR: Near-wavelength resolution microscopy in the extreme ultraviolet with a single ~1 ns duration pulse from a desktop-size 46.9 nm laser is demonstrated, demonstrating that 54 nm half-period structures can be resolved.
Journal ArticleDOI
Three-dimensional nanoscale molecular imaging by extreme ultraviolet laser ablation mass spectrometry
Ilya Kuznetsov,Jorge Filevich,Feng Dong,Mark Woolston,Weilun Chao,Weilun Chao,Erik H. Anderson,Erik H. Anderson,Elliot R. Bernstein,Dean C. Crick,Jorge J. Rocca,Carmen S. Menoni +11 more
TL;DR: A mass spectral imaging method is described that exploits the high 3D localization of absorbed extreme ultraviolet laser light and its fundamentally distinct interaction with matter to determine molecular composition from a volume as small as 50 zl in a single laser shot.
Journal ArticleDOI
Nanometer-scale ablation with a table-top soft x-ray laser
Georgiy O. Vaschenko,A. Garcia Etxarri,Carmen S. Menoni,Jorge J. Rocca,Oscar Hemberg,Scott H. Bloom,W. Chao,Erik H. Anderson,David Attwood,Y. Lu,Bruce A. Parkinson +10 more
TL;DR: The results demonstrate the feasibility of using focused soft x-ray laser beams for the direct nanoscale patterning of materials and the development of new nanoprobes.
Journal Article
Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination
Sergio Carbajo,Fernando Brizuela,Yong Wang,C. Brewer,Francesco Pedaci,Weilun Chao,E. H. Anderson,Yongmin Liu,Kenneth A. Goldberg,Patrick P. Naulleau,Przemyslaw Wachulak,Mario C. Marconi,David Attwood,Jorge J. Rocca,Carmen S. Menoni +14 more
TL;DR: In this article, a reflection microscope that operates at 13.2 nm wavelength with a spatial resolution of 55+/-3 nm was demonstrated using illumination from a tabletop extreme ultraviolet laser to acquire aerial images of photolithography masks.
References
More filters
Journal ArticleDOI
Numerical Recipes, The Art of Scientific Computing
Journal ArticleDOI
X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
TL;DR: In this article, the atomic scattering factors for all angles of coherent scattering and at the higher photon energies are obtained from these tabulated forward-scattering values by adding a simple angle-dependent form-factor correction.
Journal ArticleDOI
Soft X-ray microscopy at a spatial resolution better than 15 nm
Weilun Chao,Weilun Chao,Bruce Harteneck,J. Alexander Liddle,Erik H. Anderson,David Attwood,David Attwood +6 more
TL;DR: The achievement of sub-15-nm spatial resolution with a soft X-ray microscope—and a clear path to below 10 nm—using an overlay technique for zone plate fabrication is reported.
Journal ArticleDOI
Coherent Soft X-ray Generation in the Water Window with Quasi-Phase Matching
Emily A. Gibson,Ariel Paul,Nicholas L. Wagner,Ra'anan Tobey,David M. Gaudiosi,Sterling Backus,Ivan P. Christov,Andrew Aquila,Eric M. Gullikson,David Attwood,David Attwood,Margaret M. Murnane,Henry C. Kapteyn +12 more
TL;DR: Enhanced generation of coherent light in the “water window” region of the soft x-ray spectrum at 4.4 nanometers is demonstrated, using quasi–phase-matched frequency conversion of ultrafast laser pulses to use neon gas as the nonlinear medium to coherently convert light up to the water window.