Journal ArticleDOI
Subsurface microscopy of integrated circuits with angular spectrum and polarization control
Reads0
Chats0
TLDR
It is shown that focal spot shape is highly sensitive to both polarization and angular spectrum of the incoming light and a lateral spatial resolution of 145 nm (lambda(0)/9) in the direction perpendicular to the polarization direction is demonstrated.Abstract:
We investigate the effect of an annular pupil-plane aperture in confocal imaging while using an NA increasing lens. We show that focal spot shape is highly sensitive to both polarization and angular spectrum of the incoming light. We demonstrate a lateral spatial resolution of 145 nm (λ0/9) in the direction perpendicular to the polarization direction.read more
Citations
More filters
Journal ArticleDOI
Enhanced resolution beyond the Abbe diffraction limit with wavelength-scale solid immersion lenses
TL;DR: From full three-dimensional, finite-difference time-domain calculations, it is demonstrated that the FWHM of the focal spot of an objective-lens-nSIL system can be reduced by greater than 25% compared to a regular macroscopic SIL.
Journal ArticleDOI
Nonlinear dark-field microscopy.
TL;DR: This work introduces a nonlinear dark-field scheme that works with samples of any material and is compatible with applications ranging from biological imaging to failure analysis.
Evaluating subsurface damage in optical glasses
TL;DR: In this paper, the typical SSD evaluation techniques are reviewed, which are regularly used in optical workshops or laboratories, and they provide researchers with invaluable information on the subsurface damage in various materials.
Journal ArticleDOI
Feasibility study of the application of radially polarized illumination to solid immersion lens-based near-field optics.
TL;DR: The behavior of the electric field in a focal plane consisting of a solid immersion lens, an air gap, and a measurement sample for radially polarized illumination in SIL-based near-field optics with an annular aperture with Debye diffraction integral and multiple beam interference is analyzed.
References
More filters
Journal ArticleDOI
Electromagnetic Diffraction in Optical Systems. II. Structure of the Image Field in an Aplanatic System
B. Richards,Emil Wolf +1 more
TL;DR: In this article, an investigation of the structure of the electromagnetic field near the focus of an aplanatic system which images a point source is made, and the results are illustrated by diagrams and in a tabulated form based on data obtained by extensive calculations on an electronic computor.
Journal ArticleDOI
Solid immersion microscope
S. M. Mansfield,Gordon S. Kino +1 more
TL;DR: In this article, a real-time optical microscope was developed that operates on the same principle as a liquid immersion microscope, with the liquid replaced by a solid lens of high refractive index material.
Journal ArticleDOI
Orientational imaging of single molecules by annular illumination
TL;DR: The absorption dipole orientation of single fluorescent molecules is determined by mapping the spatial distribution of the squared electric field components in a high-numerical-aperture laser focus and holds promise to monitor rotational diffusion of single molecules in complex environments.
Journal ArticleDOI
Annular Pupils, Radial Polarization, and Superresolution
TL;DR: An annular pupil, which can be used to produce a Bessel beam, when combined with radially polarized illumination promises improvements in microscope resolution, increased packing density for optical storage, and finer optical lithography.
Related Papers (5)
Electromagnetic Diffraction in Optical Systems. II. Structure of the Image Field in an Aplanatic System
B. Richards,Emil Wolf +1 more