Journal ArticleDOI
System of four distance sensors for high-accuracy measurement of topography
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TLDR
A novel sensor system consisting of four distance sensors is proposed for the scanning measurement of topography that achieves high accuracy and allows high lateral resolution and is compared to a previously proposed three-sensor system by analyzing simulated data.Abstract:
A novel sensor system consisting of four distance sensors is proposed for the scanning measurement of topography. The system achieves high accuracy and allows high lateral resolution. The configuration of the system can be chosen such that it guarantees perfect reconstruction of the topography in the presence of offset and pitch errors of the scan system provided the sensor measurements are error-free. Moreover, a favorable propagation of the random and systematic errors of the sensor measurements is achieved. The error influences are investigated and the sensor system is compared to a previously proposed three-sensor system by analyzing simulated data.read more
Citations
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Journal ArticleDOI
Metrology of freeform shaped parts
TL;DR: In this article, the authors present the state of the art in the metrology of freeform shapes with focus on the freeform capabilities of the most important measuring techniques and on related metrological issues.
Journal ArticleDOI
Coupled distance sensor systems for high-accuracy topography measurement: Accounting for scanning stage and systematic sensor errors
TL;DR: It is shown that perfect topography reconstruction can be achieved in the presence of systematic sensor and certain scanning stage errors provided that the measurements are noise-free and no further systematic errors emerge.
Journal ArticleDOI
Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage
Ping Yang,Tomohiko Takamura,Satoru Takahashi,Kiyoshi Takamasu,Osamu Sato,Sonko Osawa,Toshiyuki Takatsuji +6 more
TL;DR: In this article, the authors designed a multi-probe measurement system to evaluate the motion accuracy of each stage of a high-precision micro-coordinate measuring machines (M-CMM).
Journal ArticleDOI
High accuracy error separation technique for on-machine measuring straightness
Zi-qiang Yin,Sheng-yi Li +1 more
TL;DR: In this paper, a method based on difference measurement was proposed to reconstruct the straightness profile of workpiece exactly for on-machine measurement, which can use two or three displacement probes.
Journal ArticleDOI
Traceable multiple sensor system for measuring curved surface profiles with high accuracy and high lateral resolution
Michael Schulz,Clemens Elster +1 more
TL;DR: In this paper, a new scanning system is presented for the high-accuracy form measurement of flat and slightly curved surface profiles, which employs a small measuring head with multiple distance sensors that is scanned along the surface.
References
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Journal ArticleDOI
Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute Testing’
TL;DR: A partial survey of methods for dimensional metrology, their ranges of application, and their limits is presented in the hope that this may provide the basis for development of “new” methods.
Journal ArticleDOI
Some theoretical aspects of error separation techniques in surface metrology
TL;DR: An analysis is presented of existing and new multi-orientation and multiprobe techniques and it is shown how they can be used to remove systematic and variable errors.
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Precision measurement of cylinder straightness using a scanning multi-probe system
TL;DR: In this article, a scanning multi-probe system for measuring straightness profiles of cylinder workpieces is described, which consists of two probe-units, each having three displacement probes.
Journal ArticleDOI
The penta‐prism LTP: A long‐trace‐profiler with stationary optical head and moving penta prism (abstract)a)
TL;DR: In this paper, the authors investigated a number of error sources in a commercial figure measurement instrument, the Long Trace-Profiler II, and demonstrated that, with some simple modifications, they can significantly reduce the effect of errors and improve the accuracy and reliability of the measurement.
Journal ArticleDOI
A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers
TL;DR: In this paper, a two-dimensional angle probe was developed to realize a new scanning multi-probe instrument employing 2D angle probes for flatness measurement of large silicon wafers.
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