Journal ArticleDOI
The Development of a New Piezoresistive Pressure Sensor for Low Pressures
Reads0
Chats0
TLDR
Compared to other traditional diaphragm types, a significant increase in sensitivity can be achieved by the proposed sensor, and the membrane deflection and nonlinearity error considerably decrease.Abstract:
This paper presents the design methodology and fabrication process of a novel piezoresistive pressure sensor with a combined cross-beam membrane and peninsula (CBMP) diaphragm structure for micropressure measurements. The sensor is then analyzed through various experiments. The sensor is primarily designed based on the optimized sensitivity, and a finite-element method is used to predict the stresses that are induced in the piezoresistors and the deflection of the membrane under different pressures. Compared to other traditional diaphragm types, a significant increase in sensitivity can be achieved by the proposed sensor, and the membrane deflection and nonlinearity error considerably decrease. The sensor fabrication process is performed on an n-type single-crystal silicon wafer, and photolithography is used with five masks to fabricate the sensing elements. Additionally, piezoresistors are formed by boron implantation. The experimental results indicate that the fabricated sensor with the CBMP membrane yields a high sensitivity of 25.7 mV/kPa and a low nonlinearity of −0.28% full-scale span for a pressure range of 0–5 kPa at room temperature.read more
Citations
More filters
Journal ArticleDOI
A squared bossed diaphragm piezoresistive pressure sensor based on CNTs for low pressure range with enhanced sensitivity
TL;DR: In this paper, a piezoresistive pressure sensor with a squared-bossed diaphragm structure was developed for a low-pressure range, where a trade-off between the deformation of the diaphras and the stress induced in the piezo resistors on the edge was analyzed by using Carbon nanotubes (CNTs).
Journal ArticleDOI
A generalized pseudo-rigid-body PPRR model for both straight and circular beams in compliant mechanisms
TL;DR: In this article, a generalized PRB PPRR model with two mutually perpendicular linear springs is established for both straight and circular beams in compliant mechanisms, where the static equations of the deflected beams are derived from Bernoulli's equation.
Journal ArticleDOI
A Low-Cost Flexible Capacitive Pressure Sensor for Health Detection
TL;DR: In this article , a flexible capacitive pressure sensor with simple structure, low cost, wide operating range, excel repeatability and high sensitivity was developed for human detection and biomedical applications.
Journal ArticleDOI
Application of Miniature FBG-MEMS Pressure Sensor in Penetration Process of Jacked Pile.
TL;DR: The test results show that Fiber Bragg grating and silicon piezoresistive sensing technology can better meet the requirements of testing the characteristics of jacked pile in viscous soil.
Journal ArticleDOI
Comparison of Pressure Sensing Properties of Carbon Nanotubes and Carbon Black Polymer Composites
TL;DR: In this paper , the piezoresistive effect was exploited to analyze the process of resistance change according to pressure using polydimethylsiloxane and carbon nanotubes composites.
References
More filters
Journal ArticleDOI
An ultra-sensitive resistive pressure sensor based on hollow-sphere microstructure induced elasticity in conducting polymer film
Lijia Pan,Alex Chortos,Guihua Yu,Yaqun Wang,Scott G. Isaacson,Ranulfo Allen,Yi Shi,Reinhold H. Dauskardt,Zhenan Bao +8 more
TL;DR: An ultra-sensitive resistive pressure sensor based on an elastic, microstructured conducting polymer thin film that enables the detection of pressures of less than 1Pa and exhibits a short response time, good reproducibility, excellent cycling stability and temperature-stable sensing.
Journal ArticleDOI
Giant piezoresistance effect in silicon nanowires
Rongrui He,Peidong Yang +1 more
TL;DR: It is reported that Si nanowires possess an unusually large piezoresistance effect compared with bulk, which may have significant implications in nanowire-based flexible electronics, as well as in nanoelectromechanical systems.
Journal ArticleDOI
Micromachined pressure sensors: review and recent developments
William P. Eaton,James H. Smith +1 more
TL;DR: In this paper, the authors reviewed the history of micromachined pressure sensors and examined new developments in the field of pressure sensors, starting from metal diaphragm sensors with bonded silicon strain gauges, and moving to present developments of surface-micromachines, optical, resonant, and smart pressure sensors.
Journal ArticleDOI
Overview of automotive sensors
TL;DR: An up-to-date review paper on automotive sensors is presented in this article, where the primary sensor technologies in use today are reviewed and classified according to their three major areas of automotive systems application-powertrain, chassis, and body.
Journal ArticleDOI
Fabrication of Single-Walled Carbon-Nanotube-Based Pressure Sensors
Christoph Stampfer,T. Helbling,D Obergfell,Schöberle B,Tripp Mk,A. Jungen,Siegmar Roth,Victor M. Bright,Christofer Hierold +8 more
TL;DR: The fabrication and characterization of bulk micromachined pressure sensors based on individual single-walled carbon nanotubes (SWNTs) as the active electromechanical transducer elements are reported on.
Related Papers (5)
Parameters Optimization and Experiment of A Planar Parallel 3-DOF Nanopositioning System
Ruizhou Wang,Xianmin Zhang +1 more
A high sensitivity and high linearity pressure sensor based on a peninsula-structured diaphragm for low-pressure ranges
Xian Huang,Dacheng Zhang +1 more