Journal ArticleDOI
Ultra-low-k cyclic carbon-bridged PMO films with a high chemical resistance
Frederik Goethals,Ivan Ciofi,Oreste Madia,Kris Vanstreels,Mikhail R. Baklanov,Christophe Detavernier,Pascal Van Der Voort,Isabel Van Driessche +7 more
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TLDR
In this article, the authors presented a series of PMO thin films that combine an ultra-low-k value, a hydrophobic property and a high resistance against aggressive chemical conditions.Abstract:
Periodic mesoporous organosilicas (PMOs) are one of the most promising candidates to be used as ultra-low-k dielectrics in microelectronic devices. In this paper, PMO thin films that combine an ultra-low-k value, a hydrophobic property and a high resistance against aggressive chemical conditions are presented. The films are synthesized via spin-coating of a 1,1,3,3,5,5-hexaethoxy-1,3,5-trisilacyclohexane, hydrochloric acid, water and ethanol mixture using polyoxyethylene (10) stearyl ether as a porogen template. The obtained highly porous films are hydrophobic, crack-free and an ultra-low k-value of 1.8 is achieved. Finally, the chemical resistance of these PMO films against alkaline solutions is investigated in detail and compared with the resistance of mesoporous silicas and PMOs synthesized with cetyl trimethylammonium chloride.read more
Citations
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Journal ArticleDOI
Periodic mesoporous organosilicas : from simple to complex bridges : a comprehensive overview of functions, morphologies and applications
Pascal Van Der Voort,Dolores Esquivel,Els De Canck,Frederik Goethals,Isabel Van Driessche,Francisco J. Romero-Salguero +5 more
TL;DR: This review will give a comprehensive overview of all these different functionalities and applications that have been created for Periodic Mesoporous Organosilicas.
Journal ArticleDOI
Mesoporous thin films: properties and applications
Plinio Innocenzi,Luca Malfatti +1 more
TL;DR: This review presents a short overview of the main fields of application of mesoporous ordered films obtained via templating self-assembly because of their very special properties such as high surface area, ordered porosity, versatile functionalization of the pore surface.
Journal ArticleDOI
Periodic mesoporous organosilicas for advanced applications
TL;DR: In this paper, the authors review how the wide range of morphologies and functionalities that have been prepared to date make PMOs desirable for numerous and varied practical applications, such as catalysis and drug delivery to the sorption of guest molecules and optoelectronics.
Journal ArticleDOI
Intrinsic low dielectric behaviour of a highly thermally stable Sr-based metal–organic framework for interlayer dielectric materials
Muhammad Usman,Muhammad Usman,Cheng-Hua Lee,Dung-Shing Hung,Shang-Fan Lee,Chih-Chieh Wang,Tzuoo-Tsair Luo,L. Zhao,Mau-Kuen Wu,Mau-Kuen Wu,Kuang-Lieh Lu +10 more
TL;DR: In this paper, a Sr-based metal-organic framework was synthesized under hydrothermal conditions by the reaction of Sr(NO3)2 and 1,3-bis(4,5-dihydro-2-oxazolyl)benzene.
Journal ArticleDOI
Low-k films modification under EUV and VUV radiation
Tatyana Rakhimova,A. T. Rakhimov,Yu. A. Mankelevich,Dmitry Lopaev,A.S. Kovalev,A. N. Vasil’eva,S M Zyryanov,K. A. Kurchikov,Olga Proshina,D. G. Voloshin,N. N. Novikova,Mikhail Krishtab,Mikhail R. Baklanov +12 more
TL;DR: In this article, the photo absorption (PA) cross-section σPA and effective quantum yield φ of OSG low-k photodissociation was used as a criterion of VUV damage in OSG films.
References
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Journal ArticleDOI
Silica-based mesoporous organic-inorganic hybrid materials.
TL;DR: An overview of the preparation, properties, and potential applications of mesoporous organic-inorganic hybrid materials in the areas of catalysis, sorption, chromatography, and the construction of systems for controlled release of active compounds, as well as molecular switches, are given.
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Periodic mesoporous organosilicas with organic groups inside the channel walls
TL;DR: In this article, a periodic mesoporous organosilica containing bridge-bonded ethene groups directly integrated into the silica framework is described, which is able to solvent-extract and ion-exchange the surfactant templates to create a stable and periodic mesophorous ethenesilica.
Journal ArticleDOI
Novel Mesoporous Materials with a Uniform Distribution of Organic Groups and Inorganic Oxide in Their Frameworks
TL;DR: In this article, the synthesis of highly ordered organic-inorganic hybrid mesoporous materials is described. But the synthesis procedure to polymerize the organosilane monomer containing two trialkoxysilyl groups in the presence of surfactant can be applied to synthesize a variety of high-order mesopore materials.
Journal ArticleDOI
Low dielectric constant materials for microelectronics
Karen Maex,Mikhail R. Baklanov,Denis Shamiryan,F. lacopi,Sywert Brongersma,Z. S. Yanovitskaya +5 more
TL;DR: In this paper, a review of porosity in on-chip wires can be found, with an attempt to give an overview of the classification, the character, and the characteristics of the porosity.
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Continuous formation of supported cubic and hexagonal mesoporous films by sol–gel dip-coating
Yunfeng Lu,R. Ganguli,C. A. Drewien,M.T. Anderson,C. J. Brinker,Weiliang Gong,Guo Yx,Soyez H,Bruce Dunn,Michael H. Huang,Jeffrey I. Zink +10 more
TL;DR: In this article, a solgel-based dip-coating method for the rapid synthesis of continuous mesoporous thin films on a solid substrate is presented, which can be used for membrane-based separations, selective catalysis and sensors.