Patent
Use of multiple laser sources for rapid, flexible machining and production of vias in multi-layered substrates
Roy D. Mead,Jeffrey W. Pierce +1 more
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TLDR
In this paper, a laser via drilling system, and a method of use thereof, is provided, where the output beams from the independently controlled laser systems are combined using a beam splitter that combines the beams into single or multiple processing beams.Abstract:
A laser via drilling system, and a method of use thereof, is provided. The apparatus uses two or more laser systems to achieve processing parameter flexibility. The output beams from the independently controlled laser systems are combined using a beam splitter that combines the beams into single or multiple processing beams. The operational flexibility of the system can be further enhanced through the use of multiple EO modulators and a polarization sensitive beam splitter.read more
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Patent
Multiple-wavelength laser micromachining of semiconductor devices
TL;DR: A specially shaped laser pulse energy profile (98, 104, 156) characterized by different laser wavelengths at different times of the profile provides reduced, controlled jitter to enable semiconductor device micromachining that achieves high quality processing and a smaller possible spot size as discussed by the authors.
Patent
High-peak-power laser device and application to the generation of light in the extreme ultraviolet
TL;DR: In this article, the authors present a system consisting of at least three pulsed lasers (2, 4, 6) operating at the same time on the same spot of a target.
Patent
System and method for multi-pulse laser processing
TL;DR: In this paper, laser pulses are selected from a group of closely spaced laser pulses with an optical modulator by adjusting pulse timing relative to an impingement interval, and a blocked laser source is stabilized by running nearly continuously.
Patent
Dispersion compensation in a chirped pulse amplification system
Laurent Vaissié,James F. Brennan +1 more
TL;DR: In this paper, a system and methods for producing ultra-short optical pulses are described, in which the pulses are generated, stretched, amplified, and compressed to ultra short lengths, and dispersion compensation is provided prior to amplification and optionally before compression.
Patent
Semiconductor structure processing using multiple laser beam spots spaced on-axis to increase single-blow throughput
TL;DR: In this article, the first and second pulses from the first pulsed laser beams were directed onto distinct structures in the row so as to complete irradiation of said structures with a single laser pulse per structure.
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Patent
Ultraviolet laser system and method for forming vias in multi-layered targets
Mark D. Owen,James N. O'brien +1 more
TL;DR: In this paper, the output of a continuously pumped, Q-switched, Nd:YAG laser (10) is frequency converted to provide ultraviolet light for forming vias (72, 74) in multi-layered targets (40).
Patent
Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets
TL;DR: In this article, the output of a continuously pumped, Q-switched, Nd:YAG laser is converted to provide ultraviolet light for forming vias in targets (40) having metallic layers (64,68) and a dielectric layer (66).
Patent
Dental procedures and apparatus using ultraviolet radiation
TL;DR: In this paper, the authors proposed an improved dental procedure and apparatus where ultraviolet radiation pulses are used to etch selectively both hard tissue and soft tissue in dental procedures, where there exists distinct ablation thresholds for hard and soft tissues which are dependent on the material being ablated for a given wavelength of the ultraviolet radiation.
Patent
Low cost, high average power, high brightness solid state laser
TL;DR: In this article, a seed laser beam with a short pulse duration was used to produce a high average power, high brightness solid state laser system, where a laser amplifier (24) amplifies the seed beam to produce an amplified pulse laser beam which is tightly focused to produce pulses with brightness levels in excess of 1011 Watts/cm2.
Patent
Laser system and method for plating vias
TL;DR: The output of a continuously pumped, Q-switched, Nd:YAG laser is frequency converted to provide ultraviolet light for plating internal wall surfaces (79, 126) of vias in multilayered electronic devices as mentioned in this paper.