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Use of multiple laser sources for rapid, flexible machining and production of vias in multi-layered substrates

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TLDR
In this paper, a laser via drilling system, and a method of use thereof, is provided, where the output beams from the independently controlled laser systems are combined using a beam splitter that combines the beams into single or multiple processing beams.
Abstract
A laser via drilling system, and a method of use thereof, is provided. The apparatus uses two or more laser systems to achieve processing parameter flexibility. The output beams from the independently controlled laser systems are combined using a beam splitter that combines the beams into single or multiple processing beams. The operational flexibility of the system can be further enhanced through the use of multiple EO modulators and a polarization sensitive beam splitter.

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Citations
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References
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Patent

Ultraviolet laser system and method for forming vias in multi-layered targets

TL;DR: In this paper, the output of a continuously pumped, Q-switched, Nd:YAG laser (10) is frequency converted to provide ultraviolet light for forming vias (72, 74) in multi-layered targets (40).
Patent

Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets

TL;DR: In this article, the output of a continuously pumped, Q-switched, Nd:YAG laser is converted to provide ultraviolet light for forming vias in targets (40) having metallic layers (64,68) and a dielectric layer (66).
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Dental procedures and apparatus using ultraviolet radiation

TL;DR: In this paper, the authors proposed an improved dental procedure and apparatus where ultraviolet radiation pulses are used to etch selectively both hard tissue and soft tissue in dental procedures, where there exists distinct ablation thresholds for hard and soft tissues which are dependent on the material being ablated for a given wavelength of the ultraviolet radiation.
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Low cost, high average power, high brightness solid state laser

TL;DR: In this article, a seed laser beam with a short pulse duration was used to produce a high average power, high brightness solid state laser system, where a laser amplifier (24) amplifies the seed beam to produce an amplified pulse laser beam which is tightly focused to produce pulses with brightness levels in excess of 1011 Watts/cm2.
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Laser system and method for plating vias

TL;DR: The output of a continuously pumped, Q-switched, Nd:YAG laser is frequency converted to provide ultraviolet light for plating internal wall surfaces (79, 126) of vias in multilayered electronic devices as mentioned in this paper.
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