Patent
Use of multiple laser sources for rapid, flexible machining and production of vias in multi-layered substrates
Roy D. Mead,Jeffrey W. Pierce +1 more
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TLDR
In this paper, a laser via drilling system, and a method of use thereof, is provided, where the output beams from the independently controlled laser systems are combined using a beam splitter that combines the beams into single or multiple processing beams.Abstract:
A laser via drilling system, and a method of use thereof, is provided. The apparatus uses two or more laser systems to achieve processing parameter flexibility. The output beams from the independently controlled laser systems are combined using a beam splitter that combines the beams into single or multiple processing beams. The operational flexibility of the system can be further enhanced through the use of multiple EO modulators and a polarization sensitive beam splitter.read more
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Patent
Laser segmented cutting, multi-step cutting, or both
James N. O'brien,Lian-Cheng Zou,Yunlong Sun,Kevin P. Fahey,Michael J. Wolfe,Brian W. Baird,Richard S. Harris +6 more
TL;DR: In this article, a long cut path is divided into short segments, from about 10 μm to 1 mm, and the laser output is scanned within a first short segment for a predetermined number of passes before being moved to and scanned within another short segment (122) for a certain number of pass.
Patent
Excimer or molecular fluorine laser system with multiple discharge units
Dirk Basting,Sergei V. Govorkov +1 more
TL;DR: In this paper, a sub-310 nm lithography radiation source with first and second beam generating modules, a beam combiner optic for producing a single combined beam from the first and the second pulsed beams, and optics for directing each of the two pulsed beam sources to be incident upon the beam combinator.
Patent
Active tuning of temporal dispersion in an ultrashort pulse laser system
TL;DR: In this paper, a chirped pulse amplification (CPA) system and method is described wherein the dispersion of the system is tuned by actively tuning one or more system components, for example, using a temperature or strain gradient, or using actinic radiation.
Patent
Method for the production of a hole and device
Thomas Beck,Georg Bostanjoglo +1 more
TL;DR: In this article, the inner surface of a diffuser of a hole is produced using ultra short laser pulse lengths, where it is possible to have a noticeable influence on through flow and/or out-flow behavior.
Patent
Tunable pulse width laser
TL;DR: In this article, a method of tuning the time duration of laser output pulses, including spectrally dispersing optical pulses and further comprising providing an optical pulse having a time duration and a spectral bandwidth, was proposed.
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Patent
Ultraviolet laser system and method for forming vias in multi-layered targets
Mark D. Owen,James N. O'brien +1 more
TL;DR: In this paper, the output of a continuously pumped, Q-switched, Nd:YAG laser (10) is frequency converted to provide ultraviolet light for forming vias (72, 74) in multi-layered targets (40).
Patent
Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets
TL;DR: In this article, the output of a continuously pumped, Q-switched, Nd:YAG laser is converted to provide ultraviolet light for forming vias in targets (40) having metallic layers (64,68) and a dielectric layer (66).
Patent
Dental procedures and apparatus using ultraviolet radiation
TL;DR: In this paper, the authors proposed an improved dental procedure and apparatus where ultraviolet radiation pulses are used to etch selectively both hard tissue and soft tissue in dental procedures, where there exists distinct ablation thresholds for hard and soft tissues which are dependent on the material being ablated for a given wavelength of the ultraviolet radiation.
Patent
Low cost, high average power, high brightness solid state laser
TL;DR: In this article, a seed laser beam with a short pulse duration was used to produce a high average power, high brightness solid state laser system, where a laser amplifier (24) amplifies the seed beam to produce an amplified pulse laser beam which is tightly focused to produce pulses with brightness levels in excess of 1011 Watts/cm2.
Patent
Laser system and method for plating vias
TL;DR: The output of a continuously pumped, Q-switched, Nd:YAG laser is frequency converted to provide ultraviolet light for plating internal wall surfaces (79, 126) of vias in multilayered electronic devices as mentioned in this paper.