Journal ArticleDOI
X-ray diffraction from laterally structured surfaces: Total external reflection.
TLDR
In this article, x-ray diffraction measurements from GaAs surface gratings are performed using a three-crystal diffractometer and compared with model calculations based on a dynamical scattering theory.Abstract:
In this work x-ray-diffraction measurements from GaAs surface gratings are presented. The experiments were performed using a three-crystal diffractometer. Measurements in the region of total external reflection (small incidence angles) for five samples were done and compared with model calculations based on a dynamical scattering theory. The theory is able to explain all experiments quantitatively. Mesoscopic grating parameters as well as microscopic surface roughnesses of the samples were obtained from fits of the data. For three samples scanning-electron-microscope pictures were taken. The analysis of these pictures leads to the same mesoscopic parameters as obtained from x-ray diffraction.read more
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Journal ArticleDOI
Probing surface and interface morphology with Grazing Incidence Small Angle X-Ray Scattering
TL;DR: A review of the GISAXS technique, from experimental issues to the theories underlying the data analysis, with a wealth of examples, can be found in this paper, where the authors introduce the notions of particle form factor and interference function, together with the different cases encountered according to the size/shape dispersion.
Journal ArticleDOI
Review on grazing incidence X-ray spectrometry and reflectometry ☆
Krassimir N. Stoev,Kenji Sakurai +1 more
TL;DR: Grazing incidence X-ray spectrometers are now widely used for surface and thin film analysis as discussed by the authors, and the recent advancement since 1993 of the grazing incidence X ray spectrometry and reflectometry in both theoretical and experimental aspects is described in detail through the introduction of numerous published works on the application in various fields of the science and industrial technologies.
Journal ArticleDOI
Small Angle X-Ray Scattering for Sub-100 nm Pattern Characterization
Ronald L. Jones,Tengjiao Hu,Eric K. Lin,Wen-Li Wu,Rainer Kolb,Diego Casa,Patrick J. Bolton,George G. Barclay +7 more
TL;DR: In this paper, the authors used small angle x-ray scattering to characterize sub-100 nm photolithographic patterns with nanometer scale resolution. Butts et al. demonstrated the method through the characterization of a series of polymer photoresist gratings using a synchrotron X-ray source.
Journal ArticleDOI
Three-Dimensional Coherent X-Ray Surface Scattering Imaging Near Total External Reflection
TL;DR: In this article, the authors demonstrate coherent X-ray surface scattering imaging in a grazing-incidence geometry that takes advantage of enhanced X-rays surface scattering and interference near total external reflection.
Journal ArticleDOI
Coherent diffraction imaging of a single epitaxial InAs nanowire using a focused x-ray beam
Ana Diaz,Ana Diaz,Cristian Mocuta,J. Stangl,Bernhard Mandl,Christian David,Joan Vila-Comamala,Virginie Chamard,Virginie Chamard,T. H. Metzger,Gerrit E. W. Bauer +10 more
TL;DR: In this paper, the cross section of an InAs nanowire with a diameter of 150 nm epitaxially grown on a 111-oriented InP substrate was characterized using a combination of x-ray scanning microdiffraction and coherent diffraction imaging.