scispace - formally typeset
H

Hiroki Kondo

Researcher at Nagoya University

Publications -  501
Citations -  7926

Hiroki Kondo is an academic researcher from Nagoya University. The author has contributed to research in topics: Etching (microfabrication) & Plasma etching. The author has an hindex of 41, co-authored 483 publications receiving 7010 citations. Previous affiliations of Hiroki Kondo include Toyota & Kobe University.

Papers
More filters
Proceedings ArticleDOI

Sticking coefficient of hydrogen radicals on ArF photoresist estimated by parallel plate structure in conjunction with numerical analysis

TL;DR: In this paper, a new technique for radicals kinetic behavior investigation and its sticking coefficient estimation is developed based on application of parallel plate structure in conjunction with numerical analysis, which allows for radicals behavior investigation apart from ions and ultraviolet photons.
Journal ArticleDOI

Simulation-aided design of very-high-frequency excited nitrogen plasma confinement using a shield plate

TL;DR: In this article, a high-density very-high-frequency excited plasma of N2 without ammonia was used for large-scale wafer processing, where the plasma shield plate (PSP) allowed the samples to be separated in a downstream chamber.
Patent

Power transmission control device

TL;DR: In this article, a power transmission control device is used to prevent abrupt engagement of a first clutch C1 caused by transition from a state with the C1 pressure Pc1 necessary for engaging the first C1 unsecured to a state of the same secured during engagement operation of the first clutters.