H
Hiroki Kondo
Researcher at Nagoya University
Publications - 501
Citations - 7926
Hiroki Kondo is an academic researcher from Nagoya University. The author has contributed to research in topics: Etching (microfabrication) & Plasma etching. The author has an hindex of 41, co-authored 483 publications receiving 7010 citations. Previous affiliations of Hiroki Kondo include Toyota & Kobe University.
Papers
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Proceedings ArticleDOI
Development of New Continuously Variable Transmission for 2.0-Liter Class Vehicles
Proceedings ArticleDOI
Sticking coefficient of hydrogen radicals on ArF photoresist estimated by parallel plate structure in conjunction with numerical analysis
Arkadiusz Malinowski,Makoto Sekine,Masaru Hori,Kenji Ishikawa,Hiroki Kondo,Toshiya Suzuki,Takuya Takeuchi,Hiroshi Yamamoto,Andrzej Jakubowski,Lidia Lukasiak,Daniel Tomaszewski +10 more
TL;DR: In this paper, a new technique for radicals kinetic behavior investigation and its sticking coefficient estimation is developed based on application of parallel plate structure in conjunction with numerical analysis, which allows for radicals behavior investigation apart from ions and ultraviolet photons.
Journal Article
A Confining potential Model for a quark Core and Its Surrounding Pion Clouds(vol71,p1303)
Masayuki Uehara,Hiroki Kondo +1 more
Journal ArticleDOI
Simulation-aided design of very-high-frequency excited nitrogen plasma confinement using a shield plate
Yasuhiro Isobe,Yasuhiro Isobe,Takayuki Sakai,Takayuki Sakai,Kyoichi Suguro,Kyoichi Suguro,Naoto Miyashita,Naoto Miyashita,Hiroki Kondo,Kenji Ishikawa,Amalraj Frank Wilson,Naohiro Shimizu,Osamu Oda,Makoto Sekine,Masaru Hori +14 more
TL;DR: In this article, a high-density very-high-frequency excited plasma of N2 without ammonia was used for large-scale wafer processing, where the plasma shield plate (PSP) allowed the samples to be separated in a downstream chamber.
Patent
Power transmission control device
TL;DR: In this article, a power transmission control device is used to prevent abrupt engagement of a first clutch C1 caused by transition from a state with the C1 pressure Pc1 necessary for engaging the first C1 unsecured to a state of the same secured during engagement operation of the first clutters.