H
Hiroki Kondo
Researcher at Nagoya University
Publications - 501
Citations - 7926
Hiroki Kondo is an academic researcher from Nagoya University. The author has contributed to research in topics: Etching (microfabrication) & Plasma etching. The author has an hindex of 41, co-authored 483 publications receiving 7010 citations. Previous affiliations of Hiroki Kondo include Toyota & Kobe University.
Papers
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Journal ArticleDOI
Reaction mechanisms between chlorine plasma and a spin-on-type polymer mask for high-temperature plasma etching
Yan Zhang,Masato Imamura,Kenji Ishikawa,Takayoshi Tsutsumi,Hiroki Kondo,Makoto Sekine,Masaru Hori +6 more
TL;DR: In this article, a novolac-based polymer mask was evaluated during high-temperature Cl2 plasma etching, and the results showed that the mask was a promising candidate for high temperature plasma etch with high etch resistance, and a smooth surface can be obtained during processes above 300 °C.
Proceedings ArticleDOI
Pr-Oxide-Based Dielectric Films on Ge Substrates
Mitsuo Sakashita,Nobuyuki Kito,Akira Sakai,Hiroki Kondo,Osamu Nakatsuka,Masaki Ogawa,Shigeaki Zaima +6 more
TL;DR: In this article, the physical and electrical properties of addition Ti into Er2O3 gate dielectrics are discussed. But the authors do not discuss the performance of the TFT with low Trapping and Off Current by CF4 plasma.
Journal Article
Morphological control of carbon nanowalls by reactive ion etching
Proceedings ArticleDOI
Crystallographic and Electrical Properties of Semiconducting Graphene Nanoribbon Grown Employing CH 4 /H 2 plasma
Proceedings ArticleDOI
Crystalline Structures and Electrical Properties of High Nitrogen-content Hf-Si-N Films
TL;DR: In this paper, the crystalline structures and electrical properties of high-nitrogen (N)-content Hf-Si-N films were investigated, and it was shown that Hf3N4 and high-N content Hf−Si−N films have semiconducting features.