Physical Review B

2005년 대한 생화학·분자생물학회 하계학술대회를 다녀와서

Damascene copper electroplating for on-chip interconnections, a process that we conceived and developed in the early 1990s, makes it possible to fill submicron trenches and vias with copper without creating a void or a seam and has thus proven superior to other technologies of copper deposition. We discuss here the relationship of additives in the plating bath to superfilling, the phenomenon that results in superconformal coverage, and we present a numerical model which accounts for the experimentally observed profile evolution of the plated metal.

Damascene copper electroplating for chip interconnections

The formation of the Schottky barrier height (SBH) is a complex problem because of the dependence of the SBH on the atomic structure of the metal-semiconductor (MS) interface. Existing models of the SBH are too simple to realistically treat the chemistry exhibited at MS interfaces. This article points out, through examination of available experimental and theoretical results, that a comprehensive, quantum-mechanics-based picture of SBH formation can already be constructed, although no simple equations can emerge, which are applicable for all MS interfaces. Important concepts and principles in physics and chemistry that govern the formation of the SBH are described in detail, from which the experimental and theoretical results for individual MS interfaces can be understood. Strategies used and results obtained from recent investigations to systematically modify the SBH are also examined from the perspective of the physical and chemical principles of the MS interface.

The physics and chemistry of the Schottky barrier height

IEEE transactions on computer-aided design of integrated circuits and systems : a publication of the IEEE Circuits and Systems Society

A physics-based compact model of metal-oxide-based resistive-switching random access memory (RRAM) cell under dc and ac operation modes is presented. In this model, the conductive filament evolution corresponding to the resistive switching process is modeled by considering the transport behaviors of oxygen vacancies and oxygen ions together with the temperature effect. Both the metallic-like and electron hopping conduction transports are considered to model the conduction of RRAM. The model can reproduce both the typical I-V characteristics of RRAM in high-/low-resistance state (LRS) and the nonlinear characteristics in LRS. Moreover, to accurately model ac operation mode, the effects of parasitic capacitance and resistance are included in our model. The developed compact model is verified and calibrated by measured data in different HfOx-based RRAM devices under dc and ac operation modes. The excellent agreement between the model predictions and experimental results shows a promising prospect of the future implementation of this compact model in large-scale circuit simulation to optimize the design of RRAM.

A Physics-Based Compact Model of Metal-Oxide-Based RRAM DC and AC Operations

In this paper, the analog/RF performance of Si nanowire transistors (SNWTs) and the impact of process variation are investigated for the first time. Analog/RF figures of merit of SNWTs are studied, including transconductance efficiency gm/Id, intrinsic gain gm/gd, cutoff frequency ft , and maximum oscillation frequency fmax. The results indicate that SNWTs exhibit superior intrinsic RF scaling capability and are suitable for low-power analog/RF applications. The impact of nanowire cross-sectional shape fluctuation that is caused by process variation is studied and found to be relatively severe, and the acceptable variation tolerance for RF integrated circuit design is given

Analog/RF Performance of Si Nanowire MOSFETs and the Impact of Process Variation

By carefully controlling the reacting conditions, including atmosphere, temperature, and time, α-Fe 2 O 3 nanoleaves have been synthesized by oxygenating pure iron. X-ray diffraction and transmission electronic microscope analyses demonstrate that the nanoleaves are single crystalline. The X-ray photoelectron spectrum, Raman spectrum, optical absorption spectrum, and photoluminescence spectrum are also carried out to characterize the nanoleaves. Magnetic measurement shows that the blocking temperature of the nanoleaves is about 120 K and the coercivity decreases as temperature increases. The more interesting is that a small exchange bias is found in 2 T field cooling hysteresis loops. This small exchange bias may possibly originate from a different magnetic order on the surface of the nanoleaves or the coexistence of a tiny amount of Fe 3 O 4 .

Synthesis and characterization of single-crystalline α-Fe2O3 nanoleaves

As devices continue scaling down into nanometer regime, carrier transport becomes critically important. In this paper, experimental studies on the carrier transport in gate-all-around (GAA) silicon nanowire transistors (SNWTs) are reported, demonstrating their great potential as an alternative device structure for near-ballistic transport from top-down approach. Both ballistic efficiency and apparent mobility were characterized. A modified experimental extraction methodology for SNWTs is adopted, which takes into account the impact of temperature dependence of parasitic source resistance in SNWTs. The highest ballistic efficiency at room temperature is observed in sub-40-nm n-channel SNWTs due to their quasi-1-D carrier transport. The apparent mobility of GAA SNWTs are also extracted, showing their close proximity to the ballistic limit as shrinking the gate length, which can be explained by Shur's model. The physical understanding of the apparent mobility in SNWTs is also discussed using flux's scattering matrix method.

Experimental Investigations on Carrier Transport in Si Nanowire Transistors: Ballistic Efficiency and Apparent Mobility

With technology node scaling down to 5 nm, the narrow device geometry confines the material thermal conductivity and further aggravates the self-heating effect in gate-all-around (GAA) transistors. In this paper, we investigate the self-heating of horizontally stacked three-layer GAA nanosheet transistors by 3-D finite-element modeling (FEM) simulation. The anisotropic thermal conductivity of nanosheets with the dependence of silicon thickness and temperature is implemented in the FEM simulator to evaluate thermal behavior accurately. The impact of layout design on thermal properties is investigated comprehensively from single device to device arrays with implication on electrical performance. The results indicate that the width of nanosheet is the key parameter to make the tradeoffs between self-heating and electrical characteristic. Meanwhile, the optimizations of layout design are given to suppress the thermal effects, including self-heating, nonuniformity of temperature, and thermal crosstalk at device level. This paper will provide guidelines for layout design, thermal management, device performance, and thermal-aware reliability prediction in the GAA-stacked structure.

Xing Zhang

Papers

A Physics-Based Compact Model of Metal-Oxide-Based RRAM DC and AC Operations

Analog/RF Performance of Si Nanowire MOSFETs and the Impact of Process Variation

Synthesis and characterization of single-crystalline α-Fe2O3 nanoleaves

Experimental Investigations on Carrier Transport in Si Nanowire Transistors: Ballistic Efficiency and Apparent Mobility

Layout Design Correlated With Self-Heating Effect in Stacked Nanosheet Transistors