Journal ArticleDOI
A curved multimorph based electrothermal micromirror with large scan range and low drive voltage
Sagnik Pal,Huikai Xie +1 more
TLDR
In this paper, a circular micromirror with a 1-mm aperture and an optical scan range of 60° at 0.68 V applied voltage and 11mW power input is reported.Abstract:
We report a circular micromirror with a 1 mm aperture that has an optical scan range of 60° at 0.68 V applied voltage and 11 mW power input. The mirror is actuated by a semicircular aluminum (Al)–tungsten (W) electrothermal multimorph that bends and twists upon controlled Joule heating. W acts as an active layer of the multimorph and a resistive heater. The curved actuator design not only maximizes the efficiency of chip area usage, but also achieves high resonant frequency due to torsional stiffness encountered during beam deformation. The first three resonant modes of the micromirror are at 104 Hz, 400 Hz and 416 Hz, respectively. Two-dimensional (2D) optical scanning is demonstrated by using the second resonant mode. The low power consumption may be attributed to the use of a single actuator beam. Mirror-center shift produced by actuator bending and twisting partially compensate each other and this results in 1.6 times lower center-shift compared to previously reported straight multimorph based designs. Device fabrication involves surface and bulk micromachining on an SOI wafer.read more
Citations
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Journal ArticleDOI
Scanning Micromirror Platform Based on MEMS Technology for Medical Application.
TL;DR: This topical review discusses recent development and trends on scanning micromirrors for biomedical applications and provides description of the key fabrication processes and common materials in order to be a basic guideline for selecting micro-actuators.
Journal ArticleDOI
An electromagnetic scanning mirror integrated with blazed grating and angle sensor for a near infrared micro spectrometer
TL;DR: In this article, an electromagnetic scanning mirror integrated with blazed grating and an angle sensor for a near infrared micro spectrometer is presented, which is fabricated on an aluminum coated 7.9° off-oriented (1 1 1) silicon substrate.
Journal ArticleDOI
A Two-Dimensional MEMS Scanning Mirror Using Hybrid Actuation Mechanisms With Low Operation Voltage
Kah How Koh,Chengkuo Lee +1 more
TL;DR: In this article, a hybrid-driven CMOS-compatible 2D raster scanning mirror based on hybrid actuation mechanisms is presented. But the authors focus on the low-power biasing condition.
Proceedings ArticleDOI
Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors
TL;DR: In this article, the authors presented designs and fabrication process of two single-axis PZT micromirrors with 1 mm diameter and 1.4 mm × 4 mm apertures, whose frequencies are 60 kHz and 17 kHz, respectively.
Proceedings ArticleDOI
Piezoelectric resonant micromirror with high frequency and large deflection applying mechanical leverage amplification
Shanshan Gu-Stoppel,Joachim Janes,Dirk Kaden,Hans Joachim Quenzer,Ulrich Hofmann,Wolfgang Benecke +5 more
TL;DR: In this article, the authors present a single-axis PZT MEMS micromirror with 1 mm2 apertures for laser projection with high resonant frequency and large deflection angles.
References
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Analysis of Bi-Metal Thermostats
TL;DR: In this article, a general theory of bending of a bi-metal strip submitted to a uniform heating is presented, which is applied in analysis of the operation of a Bi-metal Strip thermostat.
Journal ArticleDOI
Thermally excited silicon microactuators
W. Riethmuller,Wolfgang Benecke +1 more
TL;DR: In this paper, a cantilever-type micromachined silicon actuator based on the bimetal effect used extensively for the fabrication of temperature-controlled electrical switches is described.
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TL;DR: In this article, two-dimensional arrays of micromechanical bimorphs can be used as thermal sensors to image IR radiation, and a density of 100 pixels per mm2 is achieved by coiling a bimomorph beam into the shape of a flat spiral.
BookDOI
Advanced Mechanics of Materials and Applied Elasticity
TL;DR: This book constitutes the refereed proceedings of the 8th International Conference on WebBased Learning, ICWL 2009, held in Aachen, Germany, in August 2009 and deals with topics such as technology enhanced learning, web-based learning for oriental languages, mobile learning, social software and Web 2.0.
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An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs
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