Journal ArticleDOI
Thermally excited silicon microactuators
W. Riethmuller,Wolfgang Benecke +1 more
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TLDR
In this paper, a cantilever-type micromachined silicon actuator based on the bimetal effect used extensively for the fabrication of temperature-controlled electrical switches is described.Abstract:
A cantilever-type micromachined silicon actuator based on the bimetal effect used extensively for the fabrication of temperature-controlled electrical switches is described. The silicon actuator consists of a Si-metal sandwich layer and an integrated poly-Si heating resistor as a driving element. Due to the low heat capacity of the transducer element, a high temperature increase per input power unit can be achieved. For a (Si-Au)-cantilever-type actuator, 500- mu m long and several micrometers thick, a specific deflection of approximately 0.1 mu m/K at the free end has been measured. The design considerations, fabrication process, and experimental results of the actuator are discussed. >read more
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References
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Journal Article
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Micromechanical membrane switches on silicon
TL;DR: In this paper, the authors describe the design, fabrication, operating behavior, and potential applications of voltage-controlled, micromechanical switches, which are basically extremely small, electrostatically controlled mechanical relays, typically less than 100 µm long.
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Silicon torsional scanning mirror
TL;DR: This device is extremely simple to make and operate, has operational characteristics comparable to commercial magnetically driven high-frequency scanners, and has exhibited a promising reliability.