Journal ArticleDOI
A Systematic Review of Reliability Issues in RF-MEMS Switches
TLDR
In this paper, different failure modes in the RF-MEMS switches like stiffness, residual stress, cyclic fatigue, creep, wear, and packaging are reviewed and the origin of these failure modes, their characterization procedure and respective solutions presented in the literature are presented to get a better understanding of the state of the art work done in the field of RFMEMS reliability.Abstract:
\n\nThe main challenge in the commercialization of the RF-MEMS switches is their reliability,\nrelated to both the electrical and mechanical domains. The development of test standards and understanding\nthe underlying physics of different failure modes has always been of major concern for the\nRF-MEMS designers. This paper reviews the different failure modes in the RF-MEMS switches like\nstiction, residual stress, cyclic fatigue, creep, wear and packaging in detail. The origin of these failure\nmodes, their characterization procedure and respective solutions presented in the literature are presented\nto get a better understanding of the state of the art work done in the field RF-MEMS reliability\nfor nearly past two decades.\nread more
Citations
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Journal ArticleDOI
A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications
Kurmendra,Rajesh Kumar +1 more
TL;DR: In this article, a review of the MEMS switch by considering key aspects on the basis of mechanical structure, actuation methods, and types of contact and circuit configurations are explored and discussed.
Journal ArticleDOI
Surface roughness effects on electromechanical performance of RF-MEMS capacitive switches
Hamid Nawaz,Muhammad Umar Masood,Muhammad Umar Masood,Muhammad Mubasher Saleem,Muhammad Mubasher Saleem,Javaid Iqbal,Javaid Iqbal,Muhammad Zubair +7 more
TL;DR: In this article, the effect of surface roughness on the electromechanical performance of radio frequency micro-electromechanical system (RF-MEMS) based capacitive switches is an important reliability concern.
Journal ArticleDOI
Reliability of RF MEMS switches at cryogenic (liquid He) temperatures
R.R. Benoit,N.S. Barker +1 more
TL;DR: In this paper, the reliability of RF MEMS switches operating in a cryogenic environment was investigated and the authors reported that the switches operated in a state-of-the-art performance.
Journal ArticleDOI
An efficient design of dual-axis MEMS accelerometer considering microfabrication process limitations and operating environment variations
Muhammad Ahmad Raza Tahir,Muhammad Mubasher Saleem,Syed Ali Raza Bukhari,Amir Hamza,Rana I. Shakoor +4 more
TL;DR: An efficient design approach for the micro electromechanical systems (MEMS) accelerometers considering design parameters affecting the long-term reliability of these inertial sensors in comparison to traditional iterative microfabrication and experimental characterization approach is presented.
Journal ArticleDOI
Investigations on beam membrane and dielectric materials using Ashby’s methodology and their impact on the performance of a MEMS capacitive switch
Kurmendra,Rajesh Kumar +1 more
TL;DR: In this paper, Ashby's material selection methodology is employed for choosing the best material for the beam membrane and dielectric layer by investigating a database of materials, including Young's modulus, Poisson's ratio, thermal coefficient, electrical resistivity, thermal conductivity, and fracture strength.
References
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