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Open AccessJournal ArticleDOI

AlNxOy thin films deposited by DC reactive magnetron sputtering

Joel Nuno Pinto Borges, +2 more
- 15 Dec 2010 - 
- Vol. 257, Iss: 5, pp 1478-1483
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TLDR
AlNxOy thin films were produced by DC reactive magnetron sputtering, using an atmosphere of argon and a reactive gas mixture of nitrogen and oxygen, for a wide range of partial pressures of reactive gas.
About
This article is published in Applied Surface Science.The article was published on 2010-12-15 and is currently open access. It has received 37 citations till now. The article focuses on the topics: Partial pressure & Sputtering.

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Citations
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Journal ArticleDOI

Properties of physically deposited thin aluminium film coatings: A review

TL;DR: In this paper, the properties of thin aluminium films and their complex interactions with process parameters are discussed and the significance of optimising the deposition methods and identifies research gaps in the published studies is highlighted.
Journal ArticleDOI

Polychromic Al–AlN cermet solar absorber coating with high absorption efficiency and excellent durability

TL;DR: In this article, double-absorber Al-N cermet solar selective coatings with double absorbing layers were deposited on Al substrates via a home-made DC magnetron sputter system.
Journal ArticleDOI

(Zr,Ti)CN coatings as potential candidates for biomedical applications

TL;DR: In this article, two (Zr,Ti)CN hard coatings, deposited by DC magnetron sputtering on Ti6Al4V alloy and Si substrates, were investigated as possible candidates to be used as protective layers for medical implants.
Journal ArticleDOI

Nanocomposite Ag:TiN thin films for dry biopotential electrodes

TL;DR: In this article, a DC reactive sputtering with silver-added titanium nitride (Ag:TiN) thin films was used to study the electrical resistivity and thermal properties of bio-electrodes.
References
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Journal ArticleDOI

WSXM: a software for scanning probe microscopy and a tool for nanotechnology.

TL;DR: The most relevant features of WSXM, a freeware scanning probe microscopy software based on MS-Windows, are described and some relevant procedures of the software are carried out.
Journal ArticleDOI

Microstructural evolution during film growth

TL;DR: In this paper, the authors review the present understanding of film growth processes and their role in microstructural evolution as a function of deposition variables including temperature, the presence of reactive species, and the use of low-energy ion irradiation during growth.
Journal ArticleDOI

Metastable alumina polymorphs : Crystal structures and transition sequences

TL;DR: The available literature on the crystal structure of the metastable alumina polymorphs and their associated transitions is critically reviewed and summarized in this article, where possible mechanisms for the phase transitions between the different alumina morphological polymorphs also discussed.
Journal ArticleDOI

Simulated annealing analysis of Rutherford backscattering data

TL;DR: In this article, the combinatorial optimization simulated annealing algorithm is applied to the analysis of Rutherford backscattering data, which is fully automatic and does not require time-consuming human intervention.
Journal ArticleDOI

Recent aspects concerning DC reactive magnetron sputtering of thin films: a review

TL;DR: In this article, the authors have discussed the hysteresis effect and the instability in the reactive gas pressure, differential poisoning of magnetron cathode, as well as the methods which are used to control the process.
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