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Journal ArticleDOI

Birefringence free planar optical waveguide made by flame hydrolysis deposition (FHD) through tailoring of the overcladding

A. Kilian, +3 more
- 01 Feb 2000 - 
- Vol. 18, Iss: 2, pp 193-198
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TLDR
In this article, the authors demonstrate the absence of birefringence in a commercial waveguide layer overclad with this glass and show that the high doping levels required for the cladding to have a thermal expansion coefficient sufficient for this raises concerns about the moisture sensitivity of such a glass.
Abstract
Stresses developing in a planar waveguide resulting from the different thermal expansion coefficients of the substrate and the three glass layers (buffer, core and cladding) were analyzed using a finite element method. It can be shown that mainly the thermal expansion of the overcladding determines the birefringence in the finished waveguide. Based on that result, recipes for an overcladding made with the flame-hydrolysis-deposit ion (FHD)-process were devised. We demonstrate the absence of birefringence in a commercial waveguide layer overclad with this glass. The high doping levels required for the cladding to have a thermal expansion coefficient sufficient for this raises concerns about the moisture sensitivity of such a glass. We examined the depth dependent composition of the glass using WD-ESCA (wavelength dispersive electron microprobe) and show, that at the surface a layer depleted of dopants is formed during the high temperature sintering process, This layer can serve as a protective coating to isolate the underlying, higher doped layer from the effects of moisture. Analysis of the stresses shows that this does not effect the birefringence behavior of the waveguide.

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Citations
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Journal ArticleDOI

Stress effects on the performance of optical waveguides

TL;DR: In this paper, the photo-elastic relation and wave equations for inhomogeneous and anisotropic waveguides are reviewed and the effective refractive indexes and mode shapes of planar waveguide under different stress states are obtained analytically.
Patent

Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides

TL;DR: In this article, a method for forming a waveguide structure on a substrate surface including forming a cladding layer on the substrate surface, forming a core layer, depositing an amorphous carbon hardmask on the core layer and forming a patterned photoresist layer.
Journal ArticleDOI

Planar waveguide echelle gratings in silica-on-silicon

TL;DR: In this paper, a planar waveguide echelle grating demultiplexers with 48 channels and 256 channels are described and demonstrated, which have a measured crosstalk of -35 dB, an insertion loss better than 4 dB, and a uniformity of 1 dB across the C-band.
Journal ArticleDOI

Optical communication components

TL;DR: In this article, the authors review and contrast key technologies developed to address the optical components market for communication applications and present their pros and cons as well as the functions achieved to date in each of them.
References
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Journal ArticleDOI

Young's Modulus, Shear Modulus, and Poisson's Ratio in Silicon and Germanium

TL;DR: In this paper, the elastic coefficients for an arbitrary rectangular coordinate system are calculated as a function of direction cosines in the crystal and graphs of these moduli are also plotted for orientations in the (100) and (110) planes as well as planes determined by the [110] direction and any perpendicular direction.
Journal ArticleDOI

Silica-based optical integrated circuits

TL;DR: In this article, the authors reviewed the performance of waveguide grating routers and Fourier filters and found that the good performance was due to the high degree of path delay and coupler control achievable by and processing in this technology.
Journal ArticleDOI

Polarization mode converter with polyimide half waveplate in silica-based planar lightwave circuits

TL;DR: In this paper, a TE/TM polarization mode converter was constructed by inserting a polyimide half waveplate into a groove formed in a silica-based single mode waveguide.
Journal ArticleDOI

Stress-induced index profile distortion in optical waveguides

TL;DR: A method of calculating the effects of residual thermal stresses in optical waveguide fibers and the influence of various dopants on the magnitudes of the stresses is presented.
Journal ArticleDOI

Recent progress in silica-based planar lightwave circuits on silicon

M. Kawachi
TL;DR: In this article, the authors review recent progress on silica waveguide technologies which are currently penetrating the passive component market for optical networks and providing innovative ways of packaging OE components.
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