Journal ArticleDOI
Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode
M. Kucera,E. Wistrela,G. Pfusterschmied,Víctor Ruiz-Díez,Tomas Manzaneque,J. Hernando-García,José Luis Sánchez-Rojas,Artur Jachimowicz,Artur Jachimowicz,Johannes Schalko,Achim Bittner,Ulrich Schmid +11 more
TLDR
In this article, the electrical performance of micromachined piezoelectric cantilevers having different designs is investigated in liquid environment, thus making most beneficially use of their self-actuated and self-sensing capability.Abstract:
In this work the electrical performance of micromachined piezoelectric cantilevers having different designs is investigated in liquid environment, thus making most beneficially use of their self-actuated and self-sensing capability. The impact of parasitic effects originating from e.g. the electrical feedlines, on the sensing characteristics is discussed. The focus is set on in-plane bending modes excited in a large viscosity range from 1.09 cP to 238.82 cP and the corresponding influence on the conductance peak, which is important especially for liquid monitoring purposes. Furthermore, an analytical model for the dynamic admittance and the conductance peak is presented and compared to the measurements. Based on these results design guidelines for optimizing the performance of piezoelectric in-plane resonators are presented.read more
Citations
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Journal ArticleDOI
Piezoelectric MEMS resonator-based oscillator for density and viscosity sensing
Tomas Manzaneque,Víctor Ruiz-Díez,J. Hernando-García,E. Wistrela,M. Kucera,Ulrich Schmid,José Luis Sánchez-Rojas +6 more
TL;DR: In this paper, an oscillator featuring an in-liquid piezoelectric microplate resonator as the frequency-selective element was used for density and viscosity sensing.
Journal ArticleDOI
Microstructure and piezoelectric response of YxAl1−xN thin films
P. M. Mayrhofer,Helmut Riedl,Holger Euchner,Michael Stöger-Pollach,Paul H. Mayrhofer,Achim Bittner,Ulrich Schmid +6 more
TL;DR: In this article, transition metal doping of aluminium nitride (AlN) type thin films was recently employed to increase the piezoelectric constants for application in micro electromechanical systems.
Journal ArticleDOI
Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes
M. Kucera,E. Wistrela,G. Pfusterschmied,Víctor Ruiz-Díez,Tomas Manzaneque,José Luis Sánchez-Rojas,Johannes Schalko,Achim Bittner,Ulrich Schmid +8 more
TL;DR: In this article, an advanced out-of-plane bending mode for aluminum-nitride (AlN)-actuated cantilevers was presented. But the authors focused on the performance of the bending mode in deionized water at a low resonance frequency of 336 kHz.
Journal ArticleDOI
Optimal design of robust piezoelectric microgrippers undergoing large displacements
D. Ruiz,Ole Sigmund +1 more
TL;DR: Geometrically non-linear modeling is used for the in-plane deformations whereas out-of-plane motions are modeled by a linear, un-coupled plate model to save computational time.
Journal ArticleDOI
Circular test structure for the determination of piezoelectric constants of ScxAl1−xN thin films applying Laser Doppler Vibrometry and FEM simulations
TL;DR: Piezoelectric scandium aluminium nitride (ScxAl1−xN) via sputter deposition and laser Doppler Vibrometry compared to finite element simulations (FEM) using COMSOL are presented.
References
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Vibration of plates
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Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope
TL;DR: In this article, a detailed theoretical analysis of the frequency response of a cantilever beam that is immersed in a viscous fluid and excited by an arbitrary driving force is presented.
Journal ArticleDOI
Cantilever transducers as a platform for chemical and biological sensors
TL;DR: In this article, the authors discuss sensors with transducers in a form of cantilevers, which are especially attractive as transducers for chemical and biological sensors, and provide a brief analysis of historical predecessors of the modern cantilever sensors.
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