Journal ArticleDOI
Design, Modeling and Fabrication of TPoS MEMS Resonators With Improved Performance at 1 GHz
TLDR
In this paper, the effects of physical dimensions such as length, width and thickness as well as the mode of vibration and the number of anchors on the performance of longitudinal thin film piezoelectric on silicon (TPoS) MEMS resonators have been studied.Abstract:
In this work, the effects of physical dimensions such as length, width and thickness as well as the mode of vibration and the number of anchors on the performance of longitudinal thin film piezoelectric on silicon (TPoS) MEMS resonators have been studied. TPoS resonators, designed for a resonant frequency of around 1 GHz, were fabricated with a 4 mask CMOS compatible process. A $225~\mu \text{m}$ wide resonator excited in its $23^{rd}$ order had an unloaded quality factor of 9453 (in vacuum), which is the highest value reported so far for similar resonators, motional resistance of $107~\Omega $ and linear thermal coefficient of frequency of -28.4 ppm. We have also studied and modeled the different loss mechanisms in these devices. The model matches well with measured results for resonators of different geometries, modes of vibrations and number of anchors. [2020-0397]read more
Citations
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Journal ArticleDOI
Effect of Phononic Crystal Orientation on AlN-on-Silicon Lamb Wave Micromechanical Resonators
TL;DR: In this article , the effect of orientation on the acoustic band gap (ABG) of two PnC designs and their effect on boosting quality factor (Q) of AlN-on-Silicon Lamb Wave Resonators (LWRs) was explored.
Effect of Phononic Crystal Orientation on AlN-on-Silicon Lamb Wave Micromechanical Resonators
TL;DR: In this article , the effect of orientation on the acoustic band gap (ABG) of two PnC designs and their effect on boosting quality factor (Q) was explored, and it was shown that adding a hole into the disk to form a ring changes its ABG to be much more sensitive to orientation.
Proceedings ArticleDOI
Effect of Undercut due to Isotropic Etch while Releasing on the Performance of TPoS Resonators
TL;DR: In this paper , the effect of additional loss due to the isotropic etch used to release the extensional mode thin piezoelectric on silicon (TPoS) resonators is reported and validated.
Proceedings ArticleDOI
Effect of Undercut due to Isotropic Etch while Releasing on the Performance of TPoS Resonators
TL;DR: In this paper , the effect of additional loss due to the isotropic etch used to release the extensional mode thin piezoelectric on silicon (TPoS) resonators is reported and validated.
References
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Proceedings ArticleDOI
Concurrent Enhancement of Q and Power Handling in Multi-Tether High-Order Extensional Resonators
TL;DR: In this paper, the authors demonstrate that quality factor and power handling of a resonator can be improved simultaneously by designing high-order harmonic resonant structures anchored with multiple tethers, but the power handling is often traded off for the higher Q.
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High-Frequency Thin-Film AlN-on-Diamond Lateral–Extensional Resonators
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Proceedings ArticleDOI
Q-enhancement through minimization of acoustic energy radiation in micromachined lateral-mode resonators
TL;DR: In this article, a technique to increase the quality factor (Q) of lateral-mode piezoelectric resonators by reducing the amount of acoustic energy lost through the support tethers is described.
Journal ArticleDOI
Dissipation Analysis Methods and Q-Enhancement Strategies in Piezoelectric MEMS Laterally Vibrating Resonators: A review
TL;DR: A comprehensive review of the substantial progress that has been made during the last two decades for dissipation analysis methods and Q-enhancement strategies of piezoelectric MEMS laterally vibrating resonators is provided.
Journal ArticleDOI
Piezoelectric-on-Silicon Array Resonators With Asymmetric Phononic Crystal Tethering
TL;DR: In this article, a piezoelectric-on-silicon array resonator with asymmetric PnC tethering for high frequency reference oscillators is presented, where a hybrid approach of mechanical arraying along with higher mode of operation is used for minimizing the motional resistance.