Journal ArticleDOI
Development and characterization of surface micromachined, out-of-plane hot-wire anemometer
Jack Chen,Chang Liu +1 more
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In this paper, the authors report the development of a new type of hot-wire anemometer (HWA) realized by using a microfabrication process that combines surface micromachining and an efficient three-dimensional assembly technique.Abstract:
In this paper, we report the development of a new type of hot-wire anemometer (HWA) realized by using a microfabrication process that combines surface micromachining and an efficient three-dimensional assembly technique. The HWA uses a thermal element (hot wire) that is made of Pt/Ni/Pt film with a measured temperature coefficient of resistance (TCR) of 2400 ppm//spl deg/C. The thermal element is elevated out of plane by using support beams made of polyimide. In our current design, the support beam is 2.7 /spl mu/m thick and up to 1 mm tall, and the length of the thermal element varies from 50 /spl mu/m to 200 /spl mu/m. Steady-state response to air velocity has been experimentally obtained up to 20 m/s under both constant current (CC) and constant temperature (CT) modes. The transient-state response has been examined using square wave and sinusoidal wave excitation signals in CT modes with the maximum cutoff frequency found to be approximately 10 kHz. This new HWA offers a number of unique materials and performance characteristics. The sensor does not require the use of silicon as either substrate or sensing materials. Using this process, it is possible to form large arrays of HWA on a variety of substrate materials.read more
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Journal ArticleDOI
A modular microfluidic architecture for integrated biochemical analysis
Kashan Shaikh,Kee Suk Ryu,Edgar D. Goluch,Jwa-Min Nam,Juewen Liu,C. Shad Thaxton,Thomas N. Chiesl,Annelise E. Barron,Yi Lu,Chad A. Mirkin,Chang Liu +10 more
TL;DR: The utility of microfluidic laboratory-on-a-chip (LOC) systems based on a modular architecture is demonstrated by developing systems for two separate biochemical applications: one for detection of protein markers of cancer and another for Detection of metal ions.
Journal ArticleDOI
Design and applications of MEMS flow sensors: A review
Fatemeh Ejeian,Fatemeh Ejeian,Shohreh Azadi,Shohreh Azadi,Amir Razmjou,Amir Razmjou,Yasin Orooji,Ajay Giri Prakash Kottapalli,Majid Ebrahimi Warkiani,Mohsen Asadnia +9 more
TL;DR: This paper presents an overview of the work done on design and development of Microelectromechanical system (MEMS)-based flow sensors in recent years, namely thermal sensors, piezoresistive sensors and piezoelectric sensors.
Journal ArticleDOI
Distant touch hydrodynamic imaging with an artificial lateral line
Yingchen Yang,Jack Chen,Jonathan Engel,Saunvit Pandya,Nannan Chen,Craig Tucker,Sheryl Coombs,Douglas L. Jones,Chang Liu +8 more
TL;DR: It is shown that the artificial lateral line can successfully perform dipole source localization and hydrodynamic wake detection and enables a distant touch hydrod dynamic imaging capability to critically augment sonar and vision systems.
Journal ArticleDOI
Microelectromechanical Systems–Based Feedback Control of Turbulence for Skin Friction Reduction
TL;DR: This article focuses on the feedback control of turbulence for skin friction reduction and reviews the state of the art of control algorithms and distributed microsensors and microactuators, and the rapid development of microelectromechanical systems (MEMS) flow sensors/actUators.
Journal ArticleDOI
Hydrodynamic pressure sensing with an artificial lateral line in steady and unsteady flows
R. Venturelli,Otar Akanyeti,Francesco Visentin,Jaas Ježov,Lily D. Chambers,Gert Toming,Jennifer Brown,Maarja Kruusmaa,William Megill,Paolo Fiorini +9 more
TL;DR: It is reported that a distributed pressure sensing mechanism has the capability to discriminate KáRMán vortex streets from uniform flows, and determine the orientation and position of the platform with respect to the incoming flow and the centre axis of the Kármán vortex street.
References
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Journal ArticleDOI
Hot-Wire Anemometry: Principles and Signal Analysis
TL;DR: Bruun et al. as mentioned in this paper provided a comprehensive survey of the hot-wire anemometry (HWA) technique and its application in the field of fluid mechanics, focusing on a wide variety of flows from studies of atmospheric phenomena to investigations of supersonic flows.
Book
Hot-wire anemometry : principles and signal analysis
TL;DR: Bruun et al. as mentioned in this paper provided a comprehensive survey of the hot-wire anemometry (HWA) technique and its application in the field of fluid mechanics, focusing on a wide variety of flows from studies of atmospheric phenomena to investigations of supersonic flows.
BookDOI
Fluid mechanics measurements
TL;DR: In this article, the physical laws of fluid mechanics and their application to measurement techniques are discussed, as well as the application of these laws to flow visualization and flow visualization by direct injection.
Journal ArticleDOI
Electrical resistivity model for polycrystalline films: the case of specular reflection at external surfaces
TL;DR: In this article, a model for estimating effects due to electron scattering from grain boundaries, occurring simultaneously with background scattering, was developed for polycrystalline metal films in which a very fine-grained structure is often found.