Journal ArticleDOI
Diffraction analysis of dielectric surface-relief gratings
M. G. Moharam,Thomas K. Gaylord +1 more
TLDR
In this article, a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory and the analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths.Abstract:
Diffraction by a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory. The analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths. Example results for a wide range of groove depths are presented for sinusoidal, square-wave, triangular, and sawtooth gratings. Diffraction efficiencies obtained from the present method of analysis are compared with previously published numerical results. To obtain large diffraction efficiencies (greater than 85%) for gratings with typical substrate permittivities, it is shown that the grating profile should possess even symmetry.read more
Citations
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Proceedings ArticleDOI
A judgement method for mosaic grating error based on diffraction wavefront measured under multiple incident angles
TL;DR: In this paper, the authors proposed a method to detect the lateral displacement error of a photoresist grating mask based on the measured 0-order reflected diffraction wavefront at gap of the mosaic grating.
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Rigorous coupled wave analysis of front-end-of-line wafer alignment marks
TL;DR: In this article, a model based on rigorous coupled wave analysis is adopted and developed to analyze different types of step grating alignment marks, which are able to give better diffraction efficiency at higher reflected order.
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Light transmission through periodic sub-wavelength textured surface
TL;DR: In this paper, a detailed study about the light transmission through periodic sub-wavelength textured surfaces is presented, where the relative size between the reciprocal lattice period of the textured surface structure and the wavevectors of the reflected and transmitted waves in the dielectric materials is investigated.
Journal ArticleDOI
Potential opportunities of sawtooth diffraction microstructure with two layers and single relief
Greisukh Gregory Isaevich,Yezhov Yevgeniy Grigorievich,Antonov Artem Ivanovich,Danilov Viktor Anatolyevich,Usievich Boris Alexandrovich +4 more
Proceedings ArticleDOI
Reflective infrared quarter-wave plate using silicon nanostructures
Wataru Nakagawa,Ethan G. Keeler,Skyler Rydberg,Carol L. Baumbauer,Jesse Lee,Kyle Gray,David L. Dickensheets +6 more
TL;DR: In this paper, the design, fabrication, and characterization of a reflective quarter-wave plate operating at 1550 nm wavelength is presented. This device consists of a subwavelength-period grating in silicon with an evaporated gold coating, and is compatible with standard fabrication processes.
References
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Journal ArticleDOI
Rigorous coupled-wave analysis of planar-grating diffraction
M. G. Moharam,Thomas K. Gaylord +1 more
TL;DR: In this article, a rigorous coupled-wave approach is used to analyze diffraction by general planar gratings bounded by two different media, and the analysis is based on a state-variables representation and results in a unifying, easily computer-implementable matrix formulation.
Journal ArticleDOI
Theory of Periodic Dielect Waveguides
TL;DR: In this paper, the propagation of electromagnetic waves along open periodic, dielectric waveguides is formulated as a rigorous and exact boundary-value problem, and the characteristic field solutions are shown to be of the surface-wave or leaky-wave type, depending on the ratio of periodicity to wavelength (d/lambda).
Journal ArticleDOI
Analysis and Design of Grating Couplers
Theodor Tamir,S. T. Peng +1 more
TL;DR: In this paper, simple design criteria for grating couplers which transfer the energy of a beam into or out of an optical waveguide are developed based on an accurate perturbation analysis of the guiding properties of dielectric gratings.
Journal ArticleDOI
Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves
TL;DR: In this article, the diffraction of light by deep rectangular-groove transmission phase gratings is treated by solving Maxwell's equations numerically, and results are given for the light diffracted into the zero order by gratings with grating constants d in the range λ < d < 5λ, aspect ratio b (= linewidth/d), 0 < b < 1, and grating depths a < 5 λ, assuming a refractive index n 0 = 1.
Journal ArticleDOI
Analysis of grating-coupled radiation in GaAs:GaAlAs lasers and waveguides - I
TL;DR: In this paper, a general formulation for arbitrary-shaped gratings which need not be small in size was developed for radiated power from traveling waves as a function of grating tooth height, tooth width, refractive index, waveguide thickness, and period.