Journal ArticleDOI
Diffraction analysis of dielectric surface-relief gratings
M. G. Moharam,Thomas K. Gaylord +1 more
TLDR
In this article, a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory and the analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths.Abstract:
Diffraction by a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory. The analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths. Example results for a wide range of groove depths are presented for sinusoidal, square-wave, triangular, and sawtooth gratings. Diffraction efficiencies obtained from the present method of analysis are compared with previously published numerical results. To obtain large diffraction efficiencies (greater than 85%) for gratings with typical substrate permittivities, it is shown that the grating profile should possess even symmetry.read more
Citations
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Proceedings ArticleDOI
Method for measuring the spatial characteristics of high-resolution diffraction gratings
TL;DR: In this article, indirect measurements of the diffraction gratings by analyzing their scattered distribution were performed using pre-calculated numerical dependencies of the energy characteristics, and the comparison of measured diffraction efficiency values with numerical simulations provided the inverse measurements of profile height.
Proceedings ArticleDOI
Direct laser writing lithography technology based on rotating two-dimensional Dammann grating
TL;DR: In this paper, the authors proposed a rotating 2D Dammann grating technology based on the 1D-Dammann, which can create a finite array of uniform intensity spots so that the efficiency of the writing can be increased.
Journal ArticleDOI
High accuracy cross-sectional shape analysis by coherent soft x-ray diffraction
TL;DR: This work has developed a method to expand the analysis of diffraction analysis in soft x rays to any shape (isolated triangle, rectangle, etc.), and developed a fast simulation method with a small memory size.
Dissertation
Simulation électromagnétique utilisant une méthode modale de décomposition en ondelettes
TL;DR: In this article, le methode modale de Fourier (FMM) is used for diffraction in the context of scatterometrie, and le problem of diffraction par un reseau 1D is formulated as a problem solvable numeriquement by using B-spline.
Journal ArticleDOI
Study on tapered crossed subwavelength gratings by Fourier modal method
TL;DR: In this article, the Fourier modal method incorporating staircase approximation is used to study tapered crossed subwavelength gratings, and three intuitive formulations of eigenvalue functions originating from the prototype are presented, and their convergences are compared through numerical calculation.
References
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Journal ArticleDOI
Rigorous coupled-wave analysis of planar-grating diffraction
M. G. Moharam,Thomas K. Gaylord +1 more
TL;DR: In this article, a rigorous coupled-wave approach is used to analyze diffraction by general planar gratings bounded by two different media, and the analysis is based on a state-variables representation and results in a unifying, easily computer-implementable matrix formulation.
Journal ArticleDOI
Theory of Periodic Dielect Waveguides
TL;DR: In this paper, the propagation of electromagnetic waves along open periodic, dielectric waveguides is formulated as a rigorous and exact boundary-value problem, and the characteristic field solutions are shown to be of the surface-wave or leaky-wave type, depending on the ratio of periodicity to wavelength (d/lambda).
Journal ArticleDOI
Analysis and Design of Grating Couplers
Theodor Tamir,S. T. Peng +1 more
TL;DR: In this paper, simple design criteria for grating couplers which transfer the energy of a beam into or out of an optical waveguide are developed based on an accurate perturbation analysis of the guiding properties of dielectric gratings.
Journal ArticleDOI
Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves
TL;DR: In this article, the diffraction of light by deep rectangular-groove transmission phase gratings is treated by solving Maxwell's equations numerically, and results are given for the light diffracted into the zero order by gratings with grating constants d in the range λ < d < 5λ, aspect ratio b (= linewidth/d), 0 < b < 1, and grating depths a < 5 λ, assuming a refractive index n 0 = 1.
Journal ArticleDOI
Analysis of grating-coupled radiation in GaAs:GaAlAs lasers and waveguides - I
TL;DR: In this paper, a general formulation for arbitrary-shaped gratings which need not be small in size was developed for radiated power from traveling waves as a function of grating tooth height, tooth width, refractive index, waveguide thickness, and period.