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Journal ArticleDOI

Diffraction analysis of dielectric surface-relief gratings

TLDR
In this article, a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory and the analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths.
Abstract
Diffraction by a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory. The analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths. Example results for a wide range of groove depths are presented for sinusoidal, square-wave, triangular, and sawtooth gratings. Diffraction efficiencies obtained from the present method of analysis are compared with previously published numerical results. To obtain large diffraction efficiencies (greater than 85%) for gratings with typical substrate permittivities, it is shown that the grating profile should possess even symmetry.

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Citations
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Journal ArticleDOI

Computational electromagnetics for nanowire solar cells

TL;DR: An overview of various novel nanowire array solar cells and the aspects of electromagnetic simulations that are a valuable tool for understanding the optical processes leading to their distinct properties are provided.
Journal ArticleDOI

Shape and size dependence of the anti‐reflective and light‐trapping action of periodic grooves

TL;DR: In this paper, the shape and size dependence of the anti-reflective and light-diffusing properties of surfaces with linear periodic grooves is studied, and it is shown that surfaces with shallow, sub-micrometre rectangular grooves have substantial antireflective properties contrary to geometric optics results.
Book ChapterDOI

II Light Diffraction by Relife Gratings: A Macroscopic and Microscopic View

TL;DR: In this paper, the macroscopic and microscopic view of light diffraction by relief gratings is discussed, and the quasi-periodicity that is common for other types of grating materials and incident conditions is discussed.
Journal ArticleDOI

Thin-film-based field penetration engineering for surface plasmon resonance biosensing

TL;DR: This work investigates penetration depth variation implemented with dielectric layers in a SPR sensing structure and shows that the penetration depth can be controlled to increase or decrease depending on a specific configuration.
Patent

Measuring an alignment target with multiple polarization states

Abstract: An alignment target includes periodic patterns on two elements. The periodic patterns are aligned when the two elements are properly aligned. By measuring the two periodic patterns at multiple polarization states and comparing the resulting intensities of the polarization states, it can be determined if the two elements are aligned. A reference measurement location may be used that includes third periodic pattern on the first element and a fourth periodic pattern on the second element, which have a designed in offset, i.e., an offset when there is an offset of a known magnitude when the first and second element are properly aligned. The reference measurement location is measured at two polarization states. The difference in the intensities of the polarization states at reference measurement location and is used to determine the amount of the alignment error.
References
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Journal ArticleDOI

Rigorous coupled-wave analysis of planar-grating diffraction

TL;DR: In this article, a rigorous coupled-wave approach is used to analyze diffraction by general planar gratings bounded by two different media, and the analysis is based on a state-variables representation and results in a unifying, easily computer-implementable matrix formulation.
Journal ArticleDOI

Theory of Periodic Dielect Waveguides

TL;DR: In this paper, the propagation of electromagnetic waves along open periodic, dielectric waveguides is formulated as a rigorous and exact boundary-value problem, and the characteristic field solutions are shown to be of the surface-wave or leaky-wave type, depending on the ratio of periodicity to wavelength (d/lambda).
Journal ArticleDOI

Analysis and Design of Grating Couplers

TL;DR: In this paper, simple design criteria for grating couplers which transfer the energy of a beam into or out of an optical waveguide are developed based on an accurate perturbation analysis of the guiding properties of dielectric gratings.
Journal ArticleDOI

Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves

TL;DR: In this article, the diffraction of light by deep rectangular-groove transmission phase gratings is treated by solving Maxwell's equations numerically, and results are given for the light diffracted into the zero order by gratings with grating constants d in the range λ < d < 5λ, aspect ratio b (= linewidth/d), 0 < b < 1, and grating depths a < 5 λ, assuming a refractive index n 0 = 1.
Journal ArticleDOI

Analysis of grating-coupled radiation in GaAs:GaAlAs lasers and waveguides - I

TL;DR: In this paper, a general formulation for arbitrary-shaped gratings which need not be small in size was developed for radiated power from traveling waves as a function of grating tooth height, tooth width, refractive index, waveguide thickness, and period.
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