Journal ArticleDOI
Diffraction analysis of dielectric surface-relief gratings
M. G. Moharam,Thomas K. Gaylord +1 more
TLDR
In this article, a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory and the analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths.Abstract:
Diffraction by a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory. The analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths. Example results for a wide range of groove depths are presented for sinusoidal, square-wave, triangular, and sawtooth gratings. Diffraction efficiencies obtained from the present method of analysis are compared with previously published numerical results. To obtain large diffraction efficiencies (greater than 85%) for gratings with typical substrate permittivities, it is shown that the grating profile should possess even symmetry.read more
Citations
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Journal ArticleDOI
Zero-reflectivity homogeneous layers and high spatial-frequency surface-relief gratings on lossy materials
TL;DR: The required thickness and complex refractive index of single homogeneous layers on lossy substrates to produce zero reflectivity are calculated by a rigorous impedance matching approach and multiple zeroreflectivity solutions exist for both TE and TM polarizations.
Journal ArticleDOI
Lamellar metallic grating anomalies
TL;DR: A detailed numerical investigation of anomalies in lossy metallic lamellar gratings in a large interval of a wavelength-to-period λ/d ratio finds that when the groove width is large enough, the absorption can reach almost 100%.
Journal ArticleDOI
Antireflection gold surface-relief gratings: experimental characteristics
TL;DR: This work clearly shows that the systematic design of zero specular reflection grating surfaces is possible and can be used as a starting point to design antireflection metallic gratings with lower spatial frequencies using rigorous coupled-wave analysis.
Journal ArticleDOI
Ultraviolet-visible ellipsometry for process control during the etching of submicrometer features
TL;DR: In this article, it was shown that the applications of ellipsometry in microelectronics are no longer restricted to the control of uniform films or to unpatterned areas dedicated to film thickness measurement but extend also to monitoring the etching of multilayer stacks during the fabrication of submicrometer devices or gratings with high aspect ratios.
Journal ArticleDOI
Reformulation of the coordinate transformation method through the concept of adaptive spatial resolution. Application to trapezoidal gratings.
TL;DR: It is shown that the convergence of the coordinate transformation method is closely related to the representation of the profile, and a proper choice of the representation permits handling profiles that previously had been out of reach owing to their sharp edges.
References
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Journal ArticleDOI
Rigorous coupled-wave analysis of planar-grating diffraction
M. G. Moharam,Thomas K. Gaylord +1 more
TL;DR: In this article, a rigorous coupled-wave approach is used to analyze diffraction by general planar gratings bounded by two different media, and the analysis is based on a state-variables representation and results in a unifying, easily computer-implementable matrix formulation.
Journal ArticleDOI
Theory of Periodic Dielect Waveguides
TL;DR: In this paper, the propagation of electromagnetic waves along open periodic, dielectric waveguides is formulated as a rigorous and exact boundary-value problem, and the characteristic field solutions are shown to be of the surface-wave or leaky-wave type, depending on the ratio of periodicity to wavelength (d/lambda).
Journal ArticleDOI
Analysis and Design of Grating Couplers
Theodor Tamir,S. T. Peng +1 more
TL;DR: In this paper, simple design criteria for grating couplers which transfer the energy of a beam into or out of an optical waveguide are developed based on an accurate perturbation analysis of the guiding properties of dielectric gratings.
Journal ArticleDOI
Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves
TL;DR: In this article, the diffraction of light by deep rectangular-groove transmission phase gratings is treated by solving Maxwell's equations numerically, and results are given for the light diffracted into the zero order by gratings with grating constants d in the range λ < d < 5λ, aspect ratio b (= linewidth/d), 0 < b < 1, and grating depths a < 5 λ, assuming a refractive index n 0 = 1.
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Analysis of grating-coupled radiation in GaAs:GaAlAs lasers and waveguides - I
TL;DR: In this paper, a general formulation for arbitrary-shaped gratings which need not be small in size was developed for radiated power from traveling waves as a function of grating tooth height, tooth width, refractive index, waveguide thickness, and period.