Journal ArticleDOI
Diffraction analysis of dielectric surface-relief gratings
M. G. Moharam,Thomas K. Gaylord +1 more
TLDR
In this article, a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory and the analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths.Abstract:
Diffraction by a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory. The analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths. Example results for a wide range of groove depths are presented for sinusoidal, square-wave, triangular, and sawtooth gratings. Diffraction efficiencies obtained from the present method of analysis are compared with previously published numerical results. To obtain large diffraction efficiencies (greater than 85%) for gratings with typical substrate permittivities, it is shown that the grating profile should possess even symmetry.read more
Citations
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Journal ArticleDOI
Chalcogenide gratings produced by the metal photodissolution effect
TL;DR: In this article, a theoretical analysis of transmissive gratings of the type likely to be produced by the metal photodissolution effect in chalcogenide glasses has been carried out and used to predict diffraction efficiencies.
Patent
Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work-pieces
Phillip Walsh,Dale A. Harrison +1 more
TL;DR: In this article, a method and apparatus for using below deep ultra-violet (DUV) wavelength reflectometry for measuring properties of diffracting and/or scattering structures on semiconductor work-pieces is disclosed.
Journal ArticleDOI
A combination of up- and down-going floquet modal functions used to describe the field inside grooves of a deep grating
TL;DR: In this article, an effective computational method based on a fractional modal expansion approach is presented for solving the problem of diffraction by a deep grating, where the material can be a perfect conductor, a dielectric, or a metal.
Journal ArticleDOI
La méthode des coordonnées curvilignes appliquée à la diffraction par des réseaux dont le profil est donné par des équations paramétriques: application à la diffraction par un réseau cycloïdal The method of curvilinear coordinates applied to the problem of scattering from surface-relief gratings defined by parametric equations: application to scattering from a cycloidal grating
Gérard Granet,Jean Chandezon +1 more
TL;DR: In this article, the method of curvilinear coordinates is formulated using the coordinate transformations given by parametric equations, and a translation coordinate system and a relaxation coordinate system are used to calculate the reflectivities of various cycloidal profiles.
Proceedings ArticleDOI
Grating groove metrology and efficiency predictions from the soft x-ray to the far infrared
TL;DR: In this article, the authors apply recently developed metrology techniques to the specific problem of determining the groove structure of diffraction gratings well enough to reliably predict performance, using a contact profilometer and a late-model optical microinterferometer.
References
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Journal ArticleDOI
Rigorous coupled-wave analysis of planar-grating diffraction
M. G. Moharam,Thomas K. Gaylord +1 more
TL;DR: In this article, a rigorous coupled-wave approach is used to analyze diffraction by general planar gratings bounded by two different media, and the analysis is based on a state-variables representation and results in a unifying, easily computer-implementable matrix formulation.
Journal ArticleDOI
Theory of Periodic Dielect Waveguides
TL;DR: In this paper, the propagation of electromagnetic waves along open periodic, dielectric waveguides is formulated as a rigorous and exact boundary-value problem, and the characteristic field solutions are shown to be of the surface-wave or leaky-wave type, depending on the ratio of periodicity to wavelength (d/lambda).
Journal ArticleDOI
Analysis and Design of Grating Couplers
Theodor Tamir,S. T. Peng +1 more
TL;DR: In this paper, simple design criteria for grating couplers which transfer the energy of a beam into or out of an optical waveguide are developed based on an accurate perturbation analysis of the guiding properties of dielectric gratings.
Journal ArticleDOI
Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves
TL;DR: In this article, the diffraction of light by deep rectangular-groove transmission phase gratings is treated by solving Maxwell's equations numerically, and results are given for the light diffracted into the zero order by gratings with grating constants d in the range λ < d < 5λ, aspect ratio b (= linewidth/d), 0 < b < 1, and grating depths a < 5 λ, assuming a refractive index n 0 = 1.
Journal ArticleDOI
Analysis of grating-coupled radiation in GaAs:GaAlAs lasers and waveguides - I
TL;DR: In this paper, a general formulation for arbitrary-shaped gratings which need not be small in size was developed for radiated power from traveling waves as a function of grating tooth height, tooth width, refractive index, waveguide thickness, and period.