Journal ArticleDOI
Diffraction analysis of dielectric surface-relief gratings
M. G. Moharam,Thomas K. Gaylord +1 more
TLDR
In this article, a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory and the analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths.Abstract:
Diffraction by a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory. The analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths. Example results for a wide range of groove depths are presented for sinusoidal, square-wave, triangular, and sawtooth gratings. Diffraction efficiencies obtained from the present method of analysis are compared with previously published numerical results. To obtain large diffraction efficiencies (greater than 85%) for gratings with typical substrate permittivities, it is shown that the grating profile should possess even symmetry.read more
Citations
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Electromagnetic beam diffraction by a finite lamellar structure: an aperiodic coupled-wave method
TL;DR: A new formulation of the coupled-wave method to handle aperiodic lamellar structures is developed, and it will be referred to as the a periodic coupled- wave method (ACWM), which compares the results with three independent formalisms.
Journal ArticleDOI
Effective grating theory for resonance domain surface-relief diffraction gratings
TL;DR: An effective grating model, which generalizes effective-medium theory to the case of resonance domain surface-relief gratings, is presented and takes into account the first diffraction order, which obeys the Bragg condition.
Journal ArticleDOI
Critical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetry
Martin Foldyna,A. De Martino,Enric Garcia-Caurel,Razvigor Ossikovski,C. Licitra,F. Bertin,Kamil Postava,Bernard Drevillon +7 more
TL;DR: In this paper, the authors characterized two samples consisting of photoresist layers on silicon with square arrays of square holes by spectroscopic ellipsometry (SE) and Mueller matrix polarimetry (MMP).
Journal ArticleDOI
Design and investigation of color separation diffraction gratings.
Leonid L. Doskolovich,Nikolay L. Kazanskiy,Svetlana N. Khonina,Roman V. Skidanov,N. Heikkilä,Samuli Siitonen,Jari Turunen +6 more
TL;DR: The results of the experimental study of a CSG to separate three wavelengths are presented and the optimality of the scalar-theory-based solutions is estimated.
Journal ArticleDOI
Design, fabrication and characterization of subwavelength computer-generated holograms for spot array generation
TL;DR: The analysis, design, fabrication and experimental characterization of novel subwavelength computer-generated holograms that produce uniform symmetric spot array and shows that a linearly polarized incident illumination is required in the former case in order to generate a symmetric reconstruction.
References
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Journal ArticleDOI
Rigorous coupled-wave analysis of planar-grating diffraction
M. G. Moharam,Thomas K. Gaylord +1 more
TL;DR: In this article, a rigorous coupled-wave approach is used to analyze diffraction by general planar gratings bounded by two different media, and the analysis is based on a state-variables representation and results in a unifying, easily computer-implementable matrix formulation.
Journal ArticleDOI
Theory of Periodic Dielect Waveguides
TL;DR: In this paper, the propagation of electromagnetic waves along open periodic, dielectric waveguides is formulated as a rigorous and exact boundary-value problem, and the characteristic field solutions are shown to be of the surface-wave or leaky-wave type, depending on the ratio of periodicity to wavelength (d/lambda).
Journal ArticleDOI
Analysis and Design of Grating Couplers
Theodor Tamir,S. T. Peng +1 more
TL;DR: In this paper, simple design criteria for grating couplers which transfer the energy of a beam into or out of an optical waveguide are developed based on an accurate perturbation analysis of the guiding properties of dielectric gratings.
Journal ArticleDOI
Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves
TL;DR: In this article, the diffraction of light by deep rectangular-groove transmission phase gratings is treated by solving Maxwell's equations numerically, and results are given for the light diffracted into the zero order by gratings with grating constants d in the range λ < d < 5λ, aspect ratio b (= linewidth/d), 0 < b < 1, and grating depths a < 5 λ, assuming a refractive index n 0 = 1.
Journal ArticleDOI
Analysis of grating-coupled radiation in GaAs:GaAlAs lasers and waveguides - I
TL;DR: In this paper, a general formulation for arbitrary-shaped gratings which need not be small in size was developed for radiated power from traveling waves as a function of grating tooth height, tooth width, refractive index, waveguide thickness, and period.