Journal ArticleDOI
Diffraction analysis of dielectric surface-relief gratings
M. G. Moharam,Thomas K. Gaylord +1 more
TLDR
In this article, a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory and the analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths.Abstract:
Diffraction by a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory. The analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths. Example results for a wide range of groove depths are presented for sinusoidal, square-wave, triangular, and sawtooth gratings. Diffraction efficiencies obtained from the present method of analysis are compared with previously published numerical results. To obtain large diffraction efficiencies (greater than 85%) for gratings with typical substrate permittivities, it is shown that the grating profile should possess even symmetry.read more
Citations
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Sensitivity Enhancement of Surface Plasmon Resonance Imaging Using Periodic Metallic Nanowires
TL;DR: In this paper, a nanowire-mediated surface plasmon resonance (SPR) imaging is numerically investigated for enhanced sensitivity, and the results calculated by rigorous coupled-wave analysis present that interplays between localized surface plasmons and surface Plasmon polaritons contribute to sensitivity enhancement.
Journal ArticleDOI
Direct production of gratings on plastic substrates using 248-nm KrF laser radiation.
TL;DR: A technique is described for the direct production of holographic diffraction gratings on polyethylene terephthalate and polyimide films by irradiation with interfering KrF laser beams, in terms of predicted diffraction efficiencies and formation mechanisms involving ablation of the surface layer.
Journal ArticleDOI
Linewidth measurement of gratings on photomasks: a simple technique.
TL;DR: A novel laser scatterometer linewidth measurement tool has been developed for critical dimension metrology of photomasks based on a rigorous theoretical model, thus eliminating the need for calibrations.
Journal ArticleDOI
A review of selected topics in interferometric optical metrology
TL;DR: This review gathers together 15 special topics in modern interferometric metrology representing a sampling of historical, current and future developments, covering a wide range of applications, including distance and displacement measurement, the testing of optical components, interference microscopy for surface structure analysis, form and dimensional measurements of industrial parts.
Journal ArticleDOI
Analysis of enhanced second-harmonic generation in periodic nanostructures using modified rigorous coupled-wave analysis in the undepleted-pump approximation.
TL;DR: An extension of the rigorous coupled-wave analysis technique to analyze second-harmonic generation (SHG) in periodic optical nanostructures in the undepleted-pump approximation and finds that this nanostructure concurrently achieves transverse localization and phase matching for SHG.
References
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Journal ArticleDOI
Rigorous coupled-wave analysis of planar-grating diffraction
M. G. Moharam,Thomas K. Gaylord +1 more
TL;DR: In this article, a rigorous coupled-wave approach is used to analyze diffraction by general planar gratings bounded by two different media, and the analysis is based on a state-variables representation and results in a unifying, easily computer-implementable matrix formulation.
Journal ArticleDOI
Theory of Periodic Dielect Waveguides
TL;DR: In this paper, the propagation of electromagnetic waves along open periodic, dielectric waveguides is formulated as a rigorous and exact boundary-value problem, and the characteristic field solutions are shown to be of the surface-wave or leaky-wave type, depending on the ratio of periodicity to wavelength (d/lambda).
Journal ArticleDOI
Analysis and Design of Grating Couplers
Theodor Tamir,S. T. Peng +1 more
TL;DR: In this paper, simple design criteria for grating couplers which transfer the energy of a beam into or out of an optical waveguide are developed based on an accurate perturbation analysis of the guiding properties of dielectric gratings.
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Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves
TL;DR: In this article, the diffraction of light by deep rectangular-groove transmission phase gratings is treated by solving Maxwell's equations numerically, and results are given for the light diffracted into the zero order by gratings with grating constants d in the range λ < d < 5λ, aspect ratio b (= linewidth/d), 0 < b < 1, and grating depths a < 5 λ, assuming a refractive index n 0 = 1.
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Analysis of grating-coupled radiation in GaAs:GaAlAs lasers and waveguides - I
TL;DR: In this paper, a general formulation for arbitrary-shaped gratings which need not be small in size was developed for radiated power from traveling waves as a function of grating tooth height, tooth width, refractive index, waveguide thickness, and period.