Journal ArticleDOI
Effect of multi-coating process on the orientation and microstructure of lead zirconate titanate (PZT) thin films derived by chemical solution deposition
TLDR
In this paper, the effects of multi-coating processes on the orientation, microstructure and electrical property of lead zirconate titanate (PZT) thick films derived by chemical solution deposition were described.About:
This article is published in Thin Solid Films.The article was published on 2005-10-01. It has received 108 citations till now. The article focuses on the topics: Chemical bath deposition & Lead zirconate titanate.read more
Citations
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Journal ArticleDOI
Efficient Piezoelectric Energy Harvesters Utilizing (001) Textured Bimorph PZT Films on Flexible Metal Foils
TL;DR: In this article, a piezoelectric compliant mechanism (PCM) was used to extract energy from low vibration frequencies (<10 Hz) using bimorph Pb(Zr,Ti)O3 (PZT) films on Ni foil deposited by rf magnetron sputtering.
Journal ArticleDOI
Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors
TL;DR: In this article, a silicon micromirror driven by piezoelectric Pb(Zr,Ti)O3 beam actuators has been demonstrated for two-dimensional (2D) scanning mirror applications.
Journal ArticleDOI
A scrape-through piezoelectric MEMS energy harvester with frequency broadband and up-conversion behaviors
TL;DR: In this paper, a MEMS piezoelectric energy harvester with a wide operating frequency range was proposed by incorporating a high-frequency PEC cantilever and a metal base as the top and bottom stoppers with a low frequency PEC.
Journal ArticleDOI
Effect of Crystal and Domain Orientation on the Visible-Light Photochemical Reduction of Ag on BiFeO3
TL;DR: It is concluded that the ferroelectric polarization decreases electron drift to the surface in domains with a negative polarization, causing spatially selective photochemical behavior, and that the direction of the polarization is more important than the amplitude.
Journal ArticleDOI
Van der Pol type self-excited micro-cantilever probe of atomic force microscopy
TL;DR: In this article, a van der Pol-type self-excited cantilever probe whose steady state amplitude can be controlled to be sufficiently small so as not to damage the surface of the observation object is presented.
References
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Journal ArticleDOI
Thin Film Piezoelectrics for MEMS
TL;DR: In this article, the authors reviewed the literature in this field, with an emphasis on the factors that impact the magnitude of the available piezoelectric response for non-ferroelectric materials such as ZnO and AlN.
Journal ArticleDOI
Ferroelectric thin films for micro-sensors and actuators: a review
TL;DR: In this article, the authors present a review of the deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems.
Journal ArticleDOI
{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties
Nicolas Ledermann,Paul Muralt,J. Baborowski,S. Gentil,Kapil Mukati,Marco Cantoni,Andreas Seifert,Nava Setter +7 more
TL;DR: In this paper, the effective transverse piezoelectric coefficient e(31,f) of sol-gel processed films was investigated as a function of composition, film texture and film thickness.
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Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding
Paul Muralt,Thomas Maeder,Laurent Sagalowicz,Stephane Hiboux,Silvia Scalese,D. Naumovic,Raffaele Giuseppe Agostino,N. Xanthopoulos,Hans Jörg Mathieu,L. Patthey,E. L. Bullock +10 more
TL;DR: In this paper, the role of 1 to 5 nm thick seed layers for the growth of textured PbTiO3 and Pb(Zr, Ti)O-3 thin films on textured Pt(111) thin film substrates has been studied.
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Piezoelectric properties of rhombohedral Pb(Zr, Ti)O3 thin films with (100), (111), and “random” crystallographic orientation
D. V. Taylor,Dragan Damjanovic +1 more
TL;DR: In this article, the longitudinal d33 coefficient was studied in rhombohedral Pb(Zr0.6Ti0.4)O3 thin films with (111), (100), and "random" orientation.