Journal ArticleDOI
Effects of composition and thermal annealing on the mechanical properties of silicon oxycarbide films
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TLDR
In this paper, the silicon oxycarbide (SiOC) films were deposited by RF magnetron co-sputtering from silicon dioxide and silicon carbide targets, and rapid thermal annealing was applied to the as-deposited films to tune the mechanical properties.Abstract:
There is an increasing trend to incorporate silicon carbide (SiC) into silicon oxides to improve the mechanical properties, thermal stability, and chemical resistance. In this work the silicon oxycarbide (SiOC) films were deposited by RF magnetron co-sputtering from silicon dioxide and silicon carbide targets. Subsequently rapid thermal annealing was applied to the as-deposited films to tune the mechanical properties. Energy dispersive spectroscopy, scanning electron microscopy, Fourier transform infrared spectroscopy and ellipsometry were employed to characterize the compositions and microstructure of the films. The residual stress of the films was calculated from the film–substrate curvature measurement using Stoney's equation. The film stress changed from compressive to tensile after annealing, and it generally increased with carbon contents. The Young's modulus and hardness were investigated by the depth-sensing nanoindentation, which were found to increase with the carbon content and annealing temperature. A thorough microstructural analysis was conducted to investigate the effect of carbon content and annealing temperature on the mechanical properties of SiOC films.read more
Citations
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Mechanical Response of He-Implanted Amorphous SiOC/Crystalline Fe Nanolaminates.
TL;DR: Implantation resulted in the formation of He bubbles and an increase in the average size of the Fe grains in the individual Fe layers of the nanolaminates and the single layer Fe film, but the bubble density and grain size were found to be smaller in the former.
Journal ArticleDOI
Additive Manufacturing and size-dependent mechanical properties of three-dimensional microarchitected, high-temperature ceramic metamaterials
TL;DR: In this article, the Weibull theory is utilized to map this dependency with varying single strut volumes and demonstrate the structural benefits of increasing feature resolution in additive manufacturing of ceramic materials.
Journal ArticleDOI
Additive Manufacturing of Ductile, Ultrastrong Polymer-Derived Nanoceramics
Jens Bauer,Cameron Crook,Anna Guell Izard,Zak C. Eckel,Nicolas Ruvalcaba,Tobias A. Schaedler,Lorenzo Valdevit +6 more
TL;DR: In this article, the authors presented a robust route to additively manufacture ductile, ultrastrong silicon oxycarbide (SiOC) via two-photon polymerization direct laser writing (TPP-DLW) of a preceramic resin and subsequent pyrolysis.
Journal ArticleDOI
Polymer derived silicon oxycarbide-based coatings
Kathy Lu,Donald Erb +1 more
TL;DR: In this article, a comprehensive review of silicon oxycarbide (SiOC) compositions and fillers are examined based on their fundamental functions in the coating materials from a processing point of view, different coating formation processes, such as plasmaenhanced chemical vapour deposition, dip coating, and spin coating, are discussed.
Journal ArticleDOI
Nanostructural Surfaces with Different Elastic Moduli Regulate the Immune Response by Stretching Macrophages
TL;DR: It is suggested that the immune response can be regulated by constructing nanostructural surfaces with the proper elastic modulus through their influence on cell adhesion and spreading, which provides new insights into the surface design of biomaterials.
References
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An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
Warren C. Oliver,George M. Pharr +1 more
TL;DR: In this paper, the authors used a Berkovich indenter to determine hardness and elastic modulus from indentation load-displacement data, and showed that the curve of the curve is not linear, even in the initial stages of the unloading process.
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Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology
Warren C. Oliver,George M. Pharr +1 more
TL;DR: In this article, the authors review the current understanding of the mechanics governing elastic-plastic indentation as they pertain to load and depth-sensing indentation testing of monolithic materials and provide an update of how they now implement the method to make the most accurate mechanical property measurements.
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The Tension of Metallic Films Deposited by Electrolysis
TL;DR: It is well known that metallic films deposited electrolytically are in many cases liable to peel off if deposited to any considerable thickness as discussed by the authors, especially if it does not adhere very tightly to the body on which it is deposited.
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What is the Young's Modulus of Silicon?
TL;DR: In this paper, the authors present the best known elasticity data for silicon, both in depth and in a summary form, so that it may be readily accessible to MEMS designers.
Journal ArticleDOI
Influences of pileup on the measurement of mechanical properties by load and depth sensing indentation techniques
Alexei Bolshakov,George M. Pharr +1 more
TL;DR: In this article, the authors used finite element simulation of conical indentation of a wide variety of elastic-plastic materials to investigate the influences of pileup on the accuracy with which hardness and elastic modulus can be measured by load and depth-sensing indentation techniques.