Journal ArticleDOI
Effects of residual stress on the mechanical and structural properties of TiC thin films grown by RF sputtering
TLDR
In this paper, the sputtering pressure was varied from 0.35 to 1 Pa at a sputtering power of 300 W. Various sputtering pressures were carried out in order to observe the influence of this parameter on structural and mechanical properties.Abstract:
Titanium carbide thin films show attractive mechanical properties for engineering applications. Thin films of TiC were deposited on a 〈100〉 silicon substrate by RF sputtering from a TiC target. Various sputtering pressures were carried out in order to observe the influence of this parameter on structural and mechanical properties. The sputtering pressure was varied from 0.35 to 1 Pa at a sputtering power of 300 W. Rutherford backscattering spectroscopy (RBS), X-ray diffraction (XRD) and atomic force microscopy (AFM) were used to characterize TiC thin films. Hardness was obtained by nanoindentation. Residual stress was determined by radius of curvature measurements. Lower pressures induce the formation of a distorted titanium carbide and a dense structure. In correlation to the lower pressure, large residual stress was measured and changed the TiC texture in XRD results. Both the compressive stress and the hardness exhibited a maximum value at a process pressure using pure argon at 0.35 Pa with a pressure of 1 Pa necessary to obtain TiC films with 〈111〉 texture.read more
Citations
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Journal ArticleDOI
Sputter deposition of transition-metal carbide films - A critical review from a chemical perspective
TL;DR: In this paper, a review of the literature on sputter-deposited carbide films based on chemical aspects of the various elements in the films is presented, where the chemical affinities (primarily towards carbon) and structural preferences of different elements are considered.
Journal ArticleDOI
On the origin of a third spectral component of C1s XPS-spectra for nc-TiC/a-C nanocomposite thin films
Erik Lewin,Per Persson,Martina Lattemann,Michael Stüber,Mihaela Gorgoi,Anders Sandell,Carlos Ziebert,Franz Schäfers,Walter Braun,J. Halbritter,S. Ulrich,Wolfgang Eberhardt,Lars Hultman,Hans Siegbahn,S. Svensson,Ulf Jansson +15 more
TL;DR: In this paper, the authors used high kinetic energy XPS (HIKE-XPS) on magnetron-sputtered nc-TiC/a-C thin films to show that this feature represents a third chemical environment in the nanocomposites, besides the carbide and the amorphous carbon.
Journal ArticleDOI
Nanocomposite nc-TiC∕a-C thin films for electrical contact applications
TL;DR: In this article, thin film nanocomposites of nanocrystalline TiC embedded in a matrix of amorphous carbon have been prepared by nonreactive unbalanced dc-magnetron sputtering.
Journal ArticleDOI
Effect of interparticle interaction on the low temperature oxidation of CO over size-selected Au nanocatalysts supported on ultrathin TiC films
TL;DR: In this paper, the influence of interparticle interactions on catalysis was investigated using low temperature CO oxidation as a model reaction, and a strong dependence of the catalytic activity and stability of gold nanoparticles uniformly dispersed on polycrystalline TiC films was observed as a function of the inter-particle distance.
Journal ArticleDOI
Indentation Size Effect for the Hardness of Refractory Carbides
TL;DR: In this paper, the authors measured the Vickers hardness of sintered refractory carbides B4C, Mo2C, NbC, TiC, V8C7,W 2C, WC, WC-SiC, and ZrC over a wide range of test forces between 0.49 and 196 N.
References
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Journal ArticleDOI
The Deformation and Ageing of Mild Steel: III Discussion of Results
TL;DR: In this paper, an attempt is made to explain the observed phenomena in the yielding and ageing of mild steel, described in two previous papers, in the general terms of a grain-boundary theory.
Journal ArticleDOI
The Tension of Metallic Films Deposited by Electrolysis
TL;DR: It is well known that metallic films deposited electrolytically are in many cases liable to peel off if deposited to any considerable thickness as discussed by the authors, especially if it does not adhere very tightly to the body on which it is deposited.
Journal ArticleDOI
Design of a Ti/TiC/DLC functionally gradient coating based on studies of structural transitions in Ti–C thin films
TL;DR: In this paper, phase transitions between adhesive metal, load supporting carbide, and wear-resistant diamond-like carbon (DLC) surfaces were investigated on the Ti-C system prepared by a hybrid of magnetron sputtering and pulsed laser deposition.
Journal ArticleDOI
Extensions of the Stoney formula for substrate curvature to configurations with thin substrates or large deformations
TL;DR: In this paper, the curvature-strain relastionship was derived for cases in which the Stoney formula relating substrate curvature to mis-match strain in a bonded thin film was relaxed, providing a biasis for interpretation of experimental observations for a broader class of film-substrate configurations.
Journal ArticleDOI
Load-adaptive crystalline–amorphous nanocomposites
TL;DR: In this paper, a load-adaptive concept was used to design super-tough coatings consisting of nanocrystalline (10-50 nm) TiC grains embedded in an amorphous carbon matrix.
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